• 제목/요약/키워드: Thin layer

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Thin Film Encapsulation with Organic-Inorganic Nano Laminate using Molecular Layer Deposition and Atomic Layer Deposition

  • 윤관혁;조보람;방지홍;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.270-270
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    • 2016
  • We fabricated an organic-inorganic nano laminated encapsulation layer using molecular layer deposition (MLD) combined with atomic layer deposition (ALD). The $Al_2O_3$ inorganic layers as an effective single encapsulation layer were deposited at 80 degree C using ALD with alternating surface-saturation reactions of TMA and $H_2O$. A self-assembled organic layers (SAOLs) were fabricated at the same temperature using MLD. MLD and ALD deposition process were performed in the same reaction chamber. The prepared SAOL-$Al_2O_3$ organic-inorganic nano laminate films exhibited good mechanical stability and excellent encapsulation property. The measurement of water vapor transmission rate (WVTR) was performed with Ca test. We controlled thickness-ratio of organic and inorganic layer, and specific ratio showed a lowest WVTR value. Also this encapsulation layer contained very few pin-holes or defects which were linked in whole area by defect test. To apply into real OLEDs panels, we controlled a film stress from tensile to compressive and flexibility defined as an elastic modulus with organic-inorganic ratio. It has shown that OLEDs panel encapsulated with nano laminate layer exhibits better properties than single layer encapsulated in acceleration conditions. These results indicate that the organic-inorganic nano laminate thin films have high potential for flexible display applications.

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Self-seed layer를 이용하여 증착한 SBT박막의 특성 (Properties of SBT Thin Film Synthesized by Self-seed Layer Method)

  • 김형섭;황동현;윤지언;손영국
    • 한국진공학회지
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    • 제16권3호
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    • pp.215-220
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    • 2007
  • [ $Pt/SBT/Seed/Pt/Ti/SiO_2/Si$ ]의 구조로 $SBT(SrBi_2Ta_2O_9)$ 박막을 Self-seed layer를 사용하여 R.F. Magnetron sputter를 이용하여 증착을 하였다. Self-seed layer는 기판온도 RT(room temperature)와 $600^{\circ}C$에서 두께 30 nm으로 증착하였다. Self-seed layer의 결정화 온도를 알아보기 위해 열처리온도를 변화시켰고 이를 XRD를 통하여 결정화 유무를 확인하였다. Self-seed layer 위에 증착한 SBT를 XRD와 전기적 측정을 통해 특성을 관찰하였다.

버퍼층 삽입을 통한 박막 태양전지의 고효율화 시뮬레이션 (A simulation of high efficiently thin film solar cell with buffer layer)

  • 김희중;장주연;백승신;이준신
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2011년도 추계학술대회 초록집
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    • pp.64.2-64.2
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    • 2011
  • a-Si 박막 태양전지는 a-Si:H을 유리 기판 사이에 주입해 만드는 태양전지로, 뛰어난 적용성과 경제성을 지녔으나 c-Si 태양전지에 비해 낮은 변환 효율을 보이는 단점이 있다. 변환 효율을 높이기 위한 연구 방법으로는 a-Si 박막 태양전지 단일cell 제작 시 high Bandgap을 가지는 p-layer를 사용함으로 높은 Voc와 Jsc의 향상에 기여할 수 있는데, 이 때 p-layer의 defect 증가와 activation energy 증가도 동시에 일어나 변환 효율의 증가폭을 감소시킨다. 이를 보완하기 위해 본 실험에서는 p-layer에 기존의 p-a-Si:H를 사용함과 동시에 high Bandgap의 buffer layer를 p-layer와 i-layer 사이에 삽입함으로써 그 장점을 유지하고 높은 defect과 낮은 activation energy의 영향을 최소화하였다. ASA 시뮬레이션을 통해 a-Si:H보다 high Bandgap을 가지는 a-SiOx 박막을 사용하여 p-type buffer layer의 두께를 2nm, Bandgap 2.0eV, activation energy를 0.55eV로 설정하고, i-type buffer layer의 두께를 2nm, Bandgap 1.8eV로 설정하여 삽입하였을 때 박막 태양전지의 변환 효율 10.74%를 달성할 수 있었다. (Voc=904mV, Jsc=$17.48mA/cm^2$, FF=67.97).

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입구 경계층 두께가 축류 압축기 손실에 미치는 영향 (Effects of the Inlet Boundary Layer Thickness on the Loss Mechanism in an Axial Compressor)

  • 최민석;백제현
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2004년도 유체기계 연구개발 발표회 논문집
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    • pp.419-426
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    • 2004
  • A three-dimensional computation was conducted to understand effects of the inlet boundary layer thickness on the loss mechanism in a low-speed axial compressor operating at the design condition(${\phi}=85\%$) and near stall condition(${\phi}=65\%$). At the design condition, the flow phenomena such as the tip leakage flow and hub comer stall are similar independent of the inlet boundary layer thickness. However, when the axial compressor is operating at the near stall condition, the large separation on the suction surface near the casing is induced by the tip leakage flow and the boundary layer on the blade for thin inlet boundary layer but the hub corner stall is enlarged for thick inlet boundary layer. These differences of internal flows induced by change of the boundary layer thickness on the casing and hub enable loss distributions of total pressure to be altered. When the axial compressor has thin inlet boundary layer, the total pressure loss is increased at regions near both casing and tip but decreased in the core flow region. In order to analyze effects of inlet boundary layer thickness on total loss in detail, using Denton's loss models, total loss is scrutinized through three major loss categories in a subsonic axial compressor such as profile loss, tip leakage loss and endwall loss.

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ALD-Al2O3 보호층이 적용된 CrAlSiN 코팅막의 내부식성 특성에 관한 연구 (Effect of ALD-Al2O3 Passivation Layer on the Corrosion Properties of CrAlSiN Coatings)

  • 만지흠;이우재;장경수;최현진;권세훈
    • 한국표면공학회지
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    • 제50권5호
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    • pp.339-344
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    • 2017
  • Highly corrosion resistance performance of CrAlSiN coatings were obtained by applying ultrathin $Al_2O_3$ thin films using atomic layer deposition (ALD) method. CrAlSiN coatings were prepared on Cr adhesion layer/SUS304 substrates by a hybrid coating system of arc ion plating and high power impulse magnetron sputtering (HiPIMS) method. And, ultrathin $Al_2O_3$ passivation layer was deposited on the CrAlSiN/Cr adhesion layer/SUS304 sample to protect CrAlSiN coatings by encapsulating the whole surface defects of coating using ALD. Here, the high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) and energy dispersive X-ray spectrometry (EDX) analysis revealed that the ALD $Al_2O_3$ thin films uniformly covered the inner and outer surface of CrAlSiN coatings. Also, the potentiodynamic and potentiostatic polarization test revealed that the corrosion protection properties of CrAlSiN coatings/Cr/SUS304 sample was greatly improved by ALD encapsulation with 50 nm-thick $Al_2O_3$ thin films, which implies that ALD-$Al_2O_3$ passivation layer can be used as an effect barrier layer of corrosion.

Exchange Coupling of FerromagneticlAntiferrmagnetic through Nonmagnetic Layer in Antiferromagnetic

  • Kim Jong-Min;Kim Young-Sung
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2004년도 동계학술연구발표회 논문개요집
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    • pp.200-201
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    • 2004
  • The $H_{EB}$ was investigated for exchange coupling $20\;{\AA}\;Fe/x\;{\AA}\;NiO\;(type-I samples)$, $20\;{\AA}\;Fe/x\;{\AA}$ nonmagnetic layer $(MgO, Ag, Cu)/(500-x{\AA})$ NiO (type-II smaples). In type-I samples, the $H_{EB}$ is long-range coupling when looking from the point of view of the AFM. The $H_{EB}$ consistent with a generalized Meiklejohn-Bean approach. The critical thickness, which $H_{EB}$ is observed, is $130\;{\AA}$. In type-II samples, MgO layer more decouples the thin interfacial NiO from bottom NiO than other nonmagnetic layer. Nd the decoupling of Ag smallest. This means that the Ag layer has strong coupling the thin interfacial NiO with bottom NiO.

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한국산 석패과 ( Unionidae ) 패각의 미세구조 연구 (A Scanning Electron Microscopic Study of the Shells of Unionidae ( Bivalvia ))

  • 손진기;박갑만
    • 한국패류학회지
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    • 제11권1호
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    • pp.70-77
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    • 1995
  • The purpose of this study is to determine the differences of the conchiolin layer, prismatic layer and nacreous layer deposited within the shell of the freshwater family Unionidae. shether they possess species-specific characteristics and differences of the microstructure of these layers, A Scanning electron microscopic obwervations were conducted on seven species. The results indicate that all species possess thin and homogeneous layers within the periostracum. The prismatic layers of these species were composed of ednsely packed prisms. The prismatic layers of the shell in six species were typical shape of prisms. especially Inio douglasiae and Lamprotual gottschei. But, in Unio douglasiae sinuolatus, it was irregular and oblique prism shape.The nacreous layer of weven unionids characterized by possession of three types by lamillae shape: thin and homogeneous on genus Anodonta(0.4 pm size of lamella), Unio(1.3pm) and Lamprotual (1.7pm), homogeneous in shape and irregular in size of lamillae in Lanceolaria(1.0 pm)and irregulat in shape and size in Solenaia(0.2-0.4 pm). The microstructure of the naceous layer may be useful as a taxonomic character at the generic level.

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Effect of TiO2 buffer layer on the electrical and optical properties of IGZO/TiO2 bi-layered films

  • Gong, Tae-Kyung;joo, Moon hyun;Choi, Dong-Hyuk;Son, Dong-Il;Kim, Daeil
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.178.1-178.1
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    • 2015
  • In and Ga doped ZnO (IGZO) thin films were prepared by radio frequency magnetron sputtering without intentional substrate heating on glass substrate and TiO2-deposited glass substrates to consider the effect of a thin TiO2 buffer layer on the optical and electrical properties of the films. The thicknesses of the TiO2 buffer layer and IGZO films were kept constant at 5 and 100 nm, respectively. Since the IGZO/TiO2 bi-layered films show the higher FOM value than that of the IGZO single layer films, it is supposed that the IGZO/TiO2 bi-layered films will likely perform better in TCO applications than IGZO single layer films.

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Effects of surface geometry of MgO protective layer for AC-PDPs

  • Park, Sun-Young;Moon, Sung-Hwan;Heo, Tae-Wook;Kim, Jae-Hyuk;Lee, Joo-Hwi;Kim, Hyeong-Joon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1395-1398
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    • 2007
  • MgO thin films were deposited by e-beam evaporator using the 2-step method for alternate current plasma display panels (AC-PDPs). Glancing angle deposition (GLAD) method was employed to produce various surface geometry of the thin film; the bottom layer was deposited on a substrate by normal e-beam evaporation method and the top layer was deposited on bottom layer with $85^{\circ}$ by GLAD method. Results show that firing and sustain voltages improved as the sharpness of surface and isolated columnar structures increases, respectively.

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P3HT와 PVK 블렌드 막에서의 전계 발광 특성 (Electroluminescence Properties from Blend films of poly(3-hexylthiophene) and poly(N-vinylcarvazole))

  • 김대중;김상기;구할본;정운조;박계춘
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.972-975
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    • 2002
  • Electroluminescence(EL) devices based on organic thin layers have attracted lot of interests because of their application as display. One of the problems is red material. It offered a short life and poor emission efficiency to boot. In this study, this problem can be solved by using a multi-layer device structure. Organic electroluminescent devices which are composed of organic thin multi-layer films are fabricated. The basic structure is ITO / Emitting layer / LiP / Al EL device in which Hole transport/Electron blocking PVK layer was blending. We demonstrate the enhancement of eletroluminescence (EL) from blends of poly(3-hexylthiophene) in poly(N-vinylcarvazole). The emitting layer is consisted of a host material(PVK) and a guest emitting material(P3HT). It was showed higher EL intensity and their electro-optical properties were investigated.

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