Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of ALD-Al2O3 Passivation Layer on the Corrosion Properties of CrAlSiN Coatings

ALD-Al2O3 보호층이 적용된 CrAlSiN 코팅막의 내부식성 특성에 관한 연구

  • Wan, Zhixin (School of Materials Science and Engineering, Pusan National University) ;
  • Lee, Woo-Jae (School of Materials Science and Engineering, Pusan National University) ;
  • Jang, Kyung Su (Nano Convergence Team, Seo Yeong Co. Ltd.) ;
  • Choi, Hyun-Jin (MEMS/NANO Component Production Center, Busan Techno Park) ;
  • Kwon, Se Hun (School of Materials Science and Engineering, Pusan National University)
  • 만지흠 (부산대학교, 재료공학부) ;
  • 이우재 (부산대학교, 재료공학부) ;
  • 장경수 ((주)서영, 나노융합사업팀) ;
  • 최현진 (부산테크노파크, 멤스나노부품생산센터) ;
  • 권세훈 (부산대학교, 재료공학부)
  • Received : 2017.08.17
  • Accepted : 2017.10.30
  • Published : 2017.10.31
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Abstract

Highly corrosion resistance performance of CrAlSiN coatings were obtained by applying ultrathin $Al_2O_3$ thin films using atomic layer deposition (ALD) method. CrAlSiN coatings were prepared on Cr adhesion layer/SUS304 substrates by a hybrid coating system of arc ion plating and high power impulse magnetron sputtering (HiPIMS) method. And, ultrathin $Al_2O_3$ passivation layer was deposited on the CrAlSiN/Cr adhesion layer/SUS304 sample to protect CrAlSiN coatings by encapsulating the whole surface defects of coating using ALD. Here, the high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) and energy dispersive X-ray spectrometry (EDX) analysis revealed that the ALD $Al_2O_3$ thin films uniformly covered the inner and outer surface of CrAlSiN coatings. Also, the potentiodynamic and potentiostatic polarization test revealed that the corrosion protection properties of CrAlSiN coatings/Cr/SUS304 sample was greatly improved by ALD encapsulation with 50 nm-thick $Al_2O_3$ thin films, which implies that ALD-$Al_2O_3$ passivation layer can be used as an effect barrier layer of corrosion.

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References

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