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http://dx.doi.org/10.5695/JKISE.2017.50.5.339

Effect of ALD-Al2O3 Passivation Layer on the Corrosion Properties of CrAlSiN Coatings  

Wan, Zhixin (School of Materials Science and Engineering, Pusan National University)
Lee, Woo-Jae (School of Materials Science and Engineering, Pusan National University)
Jang, Kyung Su (Nano Convergence Team, Seo Yeong Co. Ltd.)
Choi, Hyun-Jin (MEMS/NANO Component Production Center, Busan Techno Park)
Kwon, Se Hun (School of Materials Science and Engineering, Pusan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.50, no.5, 2017 , pp. 339-344 More about this Journal
Abstract
Highly corrosion resistance performance of CrAlSiN coatings were obtained by applying ultrathin $Al_2O_3$ thin films using atomic layer deposition (ALD) method. CrAlSiN coatings were prepared on Cr adhesion layer/SUS304 substrates by a hybrid coating system of arc ion plating and high power impulse magnetron sputtering (HiPIMS) method. And, ultrathin $Al_2O_3$ passivation layer was deposited on the CrAlSiN/Cr adhesion layer/SUS304 sample to protect CrAlSiN coatings by encapsulating the whole surface defects of coating using ALD. Here, the high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) and energy dispersive X-ray spectrometry (EDX) analysis revealed that the ALD $Al_2O_3$ thin films uniformly covered the inner and outer surface of CrAlSiN coatings. Also, the potentiodynamic and potentiostatic polarization test revealed that the corrosion protection properties of CrAlSiN coatings/Cr/SUS304 sample was greatly improved by ALD encapsulation with 50 nm-thick $Al_2O_3$ thin films, which implies that ALD-$Al_2O_3$ passivation layer can be used as an effect barrier layer of corrosion.
Keywords
Atomic layer deposition; Corrosion; CrAlSiN hard coatings; Passivation layer;
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Times Cited By KSCI : 1  (Citation Analysis)
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