Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Properties of SBT Thin Film Synthesized by Self-seed Layer Method

Self-seed layer를 이용하여 증착한 SBT박막의 특성

  • Kim, Hyung-Sub (School of Materials Science and Engineering, Pusan National University) ;
  • Hwang, Dong-Hyun (School of Materials Science and Engineering, Pusan National University) ;
  • Yoon, Ji-Un (School of Materials Science and Engineering, Pusan National University) ;
  • Son, Young-Gook (School of Materials Science and Engineering, Pusan National University)
  • Published : 2007.05.30
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Abstract

Thin films of $SBT(SrBi_2Ta_2O_9)$ having $Pt/SBT/Seed/Pt/Ti/SiO_2/Si$ structure were fabricated using self-seed layer method by R.F. Magnetron sputter. Self-seed layers were deposited at room temperature and $600^{\circ}C$, which had 30 nm thickness. To investigate crystallization of self-seed layer we characterized by XRD after various heat treatment. And we characterized the crystallinity and electrical properties of SBT on self-seed layer after various heat treatment.

[ $Pt/SBT/Seed/Pt/Ti/SiO_2/Si$ ]의 구조로 $SBT(SrBi_2Ta_2O_9)$ 박막을 Self-seed layer를 사용하여 R.F. Magnetron sputter를 이용하여 증착을 하였다. Self-seed layer는 기판온도 RT(room temperature)와 $600^{\circ}C$에서 두께 30 nm으로 증착하였다. Self-seed layer의 결정화 온도를 알아보기 위해 열처리온도를 변화시켰고 이를 XRD를 통하여 결정화 유무를 확인하였다. Self-seed layer 위에 증착한 SBT를 XRD와 전기적 측정을 통해 특성을 관찰하였다.

Keywords

References

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