한국정보디스플레이학회:학술대회논문집

한국정보디스플레이학회 (The Korean Infomation Display Society)
권호 표지

Effects of surface geometry of MgO protective layer for AC-PDPs

  • Park, Sun-Young (School of Materials Science & Engineering, Seoul National University) ;
  • Moon, Sung-Hwan (School of Materials Science & Engineering, Seoul National University, Samsung SDI Corporate R & D Center) ;
  • Heo, Tae-Wook (School of Materials Science & Engineering, Seoul National University) ;
  • Kim, Jae-Hyuk (School of Materials Science & Engineering, Seoul National University, Samsung SDI Corporate R & D Center) ;
  • Lee, Joo-Hwi (School of Materials Science & Engineering, Seoul National University) ;
  • Kim, Hyeong-Joon (School of Materials Science & Engineering, Seoul National University, Inter-University Semiconductor Research Center, Seoul National University)
  • 발행 : 2007.08.27
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초록

MgO thin films were deposited by e-beam evaporator using the 2-step method for alternate current plasma display panels (AC-PDPs). Glancing angle deposition (GLAD) method was employed to produce various surface geometry of the thin film; the bottom layer was deposited on a substrate by normal e-beam evaporation method and the top layer was deposited on bottom layer with $85^{\circ}$ by GLAD method. Results show that firing and sustain voltages improved as the sharpness of surface and isolated columnar structures increases, respectively.

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