• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.601-602
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• 2009

• 한국진공학회지
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• 제22권1호
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• pp.1-6
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• 2013

$600{\times}1,200mm$ 기판에 대면적 CIGS 광흡수층 증착을 위한 선형증발원 개발을 위해 다른 크기의 노즐과 일정한 노즐 간격을 가지는 선형증발원의 플럭스 밀도를 전산 모사하여 플럭스 균일도 ${\pm}5%$의 조건을 구하였다. 이를 바탕으로 제작된 선형증발원을 이용하여 Cu, In의 단일막 두께균일도를 확인하였고, CIGS 광흡수층을 동시증발법으로 증착하여 박막의 두께균일도 및 증착 조성의 균일도로 선형증발원을 평가하였다. XRF 조성 분석을 통해 구한 조성불균일도는 600 mm 폭에서 $$Cu{\leq_-}5%$$, $$In{\leq_-}7%$$, $$Ga{\leq_-}4%$$, $$Se{\leq_-}3%$$으로 균일한 조성비로 성막된 것을 확인하였고 SEM 분석을 통해 표면 결정립의 형상을 확인하였다. 또한 XRD측정을 통해 선형증발원 방향의 대면적 CIGS 광흡수층이 칼코피라이트 구조임을 확인하였다. 이를 통해서 개발된 하향 선형증발원이 CIGS 광흡수층 증착에 적합함을 확인하였다.

• 센서학회지
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• 제16권5호
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• pp.325-330
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• 2007

For the application to optic devices, wafer level package including spacer with particular thickness according to optical design could be required. In these cases, the uniformity of spacer thickness is important for bonding strength and optical performance. Packaging process has to be performed at low temperature in order to prevent damage to devices fabricated before packaging. And if photosensitive material is used as spacer layer, size and shape of pattern and thickness of spacer can be easily controlled. This paper presents polymer bonding using thick, uniform and patterned spacing layer of SU-8 2100 photoresist for wafer level package. SU-8, negative photoresist, can be coated uniformly by spin coater and it is cured at $95^{\circ}C$ and bonded well near the temperature. It can be bonded to silicon well, patterned with high aspect ratio and easy to form thick layer due to its high viscosity. It is also mechanically strong, chemically resistive and thermally stable. But adhesion of SU-8 to glass is poor, and in the case of forming thick layer, SU-8 layer leans from the perpendicular due to imbalance to gravity. To solve leaning problem, the wafer rotating system was introduced. Imbalance to gravity of thick layer was cancelled out through rotating wafer during curing time. And depositing additional layer of gold onto glass could improve adhesion strength of SU-8 to glass. Conclusively, we established the coating condition for forming patterned SU-8 layer with $400{\mu}m$ of thickness and 3.25 % of uniformity through single coating. Also we improved tensile strength from hundreds kPa to maximum 9.43 MPa through depositing gold layer onto glass substrate.

• Tribology and Lubricants
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• 제32권4호
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• pp.125-131
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• 2016

In recent years, thick ta-C coating has attracted considerable interest owing to its existing and potential commercial importance in applications such as automobile accessories, drills, and gears. The thickness of the ta-C coating is an important parameter in these applications. However, the biggest problems are achieving efficient coating and uniformity over a large area with high-speed deposition. Feasibility is confirmed for the ta-C coating thickness of up to 9.0 µm (coating speed: 3.0 µm/h, fixed substrate) using a single FCVA cathode. The thickness was determined using multiple coating cycles that were controlled using substrate temperature and residual stresses. In the present research, we have designed a coating system using FCVA plasma and produced enhanced thick ta-C coating. The system uses a specialized magnetic field configuration with stabilized DC arc plasma discharge during deposition. To achieve quality that is acceptable for use in automobile accessories, the magnetic field, T-type filters, and 10 pieces of a multi-cathode are used to demonstrate the deposition of the thick ta-C coating. The results of coating performance indicate that uniformity is ±7.6 , deposited area is 400 mm, and the thickness of the ta-C coating is up to 5.0 µm (coating speed: 0.3 µm/h, revolution and rotation). The hardness of the coating ranges from 30 to 59 GPa, and the adhesion strength level (HF1) ranges from 20 to 60 N, depending on the ta-C coating.

• Transactions on Electrical and Electronic Materials
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• 제9권2호
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• pp.73-78
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• 2008

We investigated for comparison of large-area i-a-Si:H and p-a-SiC:H film quality like thickness uniformity, optical bandgap and surface roughness using both ICP-CVD and PECVD on the large-area substrate(diameter of 100 mm). As a whole, films using ICP-CVD could be achieved much uniform thickness and bandgap of that using PECVD. For i-a-Si:H films, its uniformity of thickness and optical bandgap were 2.8 % and 0.38 %, respectively. Also, thickness and optical bandgap of p-a-SiC:H films using ICP-CVD could be obtained at 1.8 % and 0.3 %, respectively. In case of surface roughness, average surface roughness (below 5 nm) of ICP-CVD film could be much better than that (below 30 nm) of PECVD film. HIT solar cell with 2 wt%-AZO/p-a-SiC:H/i-a-Si:H/c-Si/Ag structure was fabricated and characterized with diameter of 152.3 mm in this large-area ICP-CVD system. Conversion efficiency of 9.123 % was achieved with a practical area of $100\;mm\;{\times}\;100\;mm$, which can show the potential to fabrication of the large-area solar cell using ICP-CVD method.

• Design & Manufacturing
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• 제12권2호
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• pp.5-10
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• 2018

Vacuum-assisted thermoforming is one of the critical steps for successful application of film insert molding(FIM) to parts of complex shape. In this study, the simulations and experiments of thermoforming processes were performed to investigate the effects of process conditions on thickness distribution and printed pattern deformation of films in vacuum-assisted thermoforming. The film thickness uniformity increased with decreasing film heating time, whereas it increased with increasing vacuum delay time. After thermoforming of films with uniform pattern space of 5mm, the maximum space was 9.432mm. Based on the simulation, a modified pattern was calculated to obtain uniform spaces after thermoforming. In the experiments for film with the modified pattern, the maximum space appeared 5.837mm. In, addition. the predicted patterns were in good agreement with the experimental results.

• 한국세라믹학회지
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• 제46권3호
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• pp.301-305
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• 2009

The novel carbon coating process for interlayer of fiber reinforced ceramic composites between fiber and matrix was performed by carbonizing phenolic resin solution that coated on fiber surface in $N_2$ atmosphere at $600^{\circ}C$ to improve the strength and fracture toughness of CMC(ceramic matrix composite). 160 nm carbon layer was coated on fiber surface with 5 vol% of phenolic resin solution. Since the process temperature ($600^{\circ}C$) is lower than chemical vapor deposition($900{\sim}1000^{\circ}C$), the strength and toughness could be preserved. Furthermore the coating thickness uniformity was improved to 8% of deviation along the stacking sequence. Therefore, prevention from fiber degradation during coating process and controlling coating thickness uniformity along the preform depth were achieved by coating with phenolic resin carbonizing method.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.1203-1207
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• 2008

For a large sized, ultra definition (UD) and high refresh rate for motion blur free AMLCD TVs, amorphous IGZO thin film transistor (TFT) are applied and investigated in terms of threshold voltage ($V_{th}$) shift influenced by active layer thickness uniformity, source drain etching technology, heat treatment and passivation condition. Optimizing above parameters, we fabricated the world's largest 15 inch XGA AMLCD successfully.

• 한국생산제조학회지
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• 제24권2호
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• pp.217-223
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• 2015

In this paper, the performance of a system was analyzed according to the design parameters of a LED secondary lens that can be applied at a very close range, e.g., for direct lighting or display systems. We designed the secondary lens of the very-close-range LED using an aspheric equation and analyzed its performance-particularly the angle of the beam spread, central luminous intensity, and light uniformity-with respect to the thickness of lens, radius, conic constant, and asphericity (4th). Our analysis shows that four parameters affect the performance. The simulation results indicate an optimal thickness of 1 mm and show that a larger radius yields higher performance. The optimal range for the conic constant was determined as -1.21 to -1.25, the optimal range for the asphericity was determined as 0.0047xx to 0.0049xx (4th).

• 대한조선학회논문집
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• 제50권3호
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• pp.167-174
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• 2013

Model ice forming process in ice tank needs several steps of seeding, freezing, tempering. In those process, one of the most important factors to affect the accuracy of experiment is the homogeneity of the ice thickness and the temperature. This paper investigated a computational and statistical method to assess the uniformity of the model ice. In addition, the different configurations of freezing systems were considered to improve the uniformity. Qualitative assessment using streamlines from the cooling units was carried out by computational fluid dynamics (CFD) and the quantitative evaluations of the homogeneity were compared using the temperature distribution on the ice surface. In addition, multi species transport analysis is introduced to understand the circulation efficiency of cold air from the cooling units. As the results, optimized configurations were determined by adjusting the angles of vane in the cooling units.