• Title/Summary/Keyword: Thickness uniformity

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The Effect of Fiber Volume Fraction Non-uniformity in Thickness Direction on the Buckling Load of Cylindrical Composite Lattice Structures (두께 방향 섬유체적비 불균일이 원통형 복합재 격자 구조 좌굴하중에 미치는 영향)

  • Kong, Seung-Taek;Jeon, Min-Hyeok;Kim, In-Gul;Lee, Sang-Woo
    • Composites Research
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    • v.34 no.2
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    • pp.129-135
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    • 2021
  • In this paper, in order to examine the effect of fiber volume fraction non-uniformity in thickness direction on the buckling load of cylindrical composite lattice structures, we modified the equation of buckling load of the cylindrical composite lattice structures proposed by Vasiliev. The thickness of each layer of the rib was varied by fiber volume fraction, and material properties were applied differently by using the rule of mixture. Also, we performed linear buckling analysis by varying the structure size, thickness, and average value of the fiber volume fraction of finite element model. Finally, by comparing the calculation results of the buckling load of the equivalent model using the modified buckling load equation and the results of the finite element analysis, we found that the fiber volume fraction non-uniformity in thickness direction can reduce the buckling load of the cylindrical composite lattice structure.

HARDNESS CHANGE OF LIGHT-ACTIVATED GLASS IONMER CEMENT WITH THICKNESS AND TIME (광경화형 글래스아이오노머 시멘트의 두께 및 시간경과에 따른 경도의 변화)

  • Lee, Kyoung-Jin;Oh, Won-Mann;Kim, Sun-Hun
    • Restorative Dentistry and Endodontics
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    • v.20 no.1
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    • pp.303-315
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    • 1995
  • An adequate and homogeneous cure of light-activated restroative material is very important for improvement of marginal adaptation and prevention of marginal leakage, secondary caries and pulpal irritation as well as expressing natural physical property of that material. The purpose of this study was to evaluate the change of surface hardness and cure uniformity of light-activated glass ionomer cements. Restorative(Fuji II LC, Vitremer) and lining(Baseline VLC, Vitrebond) light-activated glass ionomer cements were investigated for this study. The surface hardness of the top and bottom surfaces and cure uniformity of each 1mm, 1.5mm, 2mm, 2.5mm & 3mm in the thickness of specimen were measured immediately, at 1 hour, 24 hours and 1 week after light activation. The surface hardness change and cure uniformity of all the specimens were measured by Knoop hardness tester. The results were as follows. 1. The surface hardness of top and bottom surfaces in all groups increased with time(p<0.01). 2. Both top and bottom surfaces hardness of Vitrebond group measured immediately after light-activation were significantly lower than those of the other groups(p<0.01). 3. The surface hardness of top and bottom surfaces of restorative light -activated glass ionomer cements was higher than those of lining materials at 1 week(p<0.10). 4. Surface hardness of Vitremer group decreased as the specimen thickness increased, except top and bottom surfaces hardness of the specimen at 1 week(p<0.01). There was no significant difference in the surface hardness of Fuji II LC with changes in the thickness except bottom surface hardness of specimen at 24 hours and 1 week (p>0.05). 5. Surface hardness of Vitrebond group significantly decreased as the specimen thickness increased(p<0.01). There was no significant difference in the surface hardness of Baseline VLC group with changes in the thickness except bottom surface hardness of specimen measured immediately after light -activation(p>0.05). 6. The hardness ratio of top against bottom surface in all groups decreased with time(p<0.05). 7. There was no significant difference in the hardness ratio of top against bottom surface with changes of the thickness except Vitrebond group, 24 hours and 1 week of Vitremer group and 1 week of Baseline VLC group (p>0.05). These results suggest that surface hardness of restorative ligh-activated glass ionomer cements were highter than those of lining light-activated materials. In all groups, the surface hardness and cure uniformity continuously increased with time.

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Improvement of uniformity in chemical vapor deposition of silicon carbide using CFD (탄화규소 화학기상증착 공정에서 CFD를 이용한 균일도 향상 연구)

  • Seo, Jin-Won;Kim, Jun-Woo;Hahn, Yoon-Soo;Choi, Kyoon;Lee, Jong-Heun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.6
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    • pp.242-245
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    • 2014
  • In order to increase the thickness uniformity in chemical vapor depositon of silicon carbide, we have carried out CFD studies for a CVD apparatus having a horizontally-rotated 3-stage susceptor. We deposited silicon carbide films of 3C-SiC phase showing quite uniform thickness between stages but not uniform one in the stage. The cause of this nonuniformity is thought to be originated from the high rotational speed. And the uniformity between stages can be further increased with the $120^{\circ}$ split type nozzles from CFD results. Through the formation of silicon carbide film on graphite substrates we can make oxidation-resistant and dust-free graphite components with high hardness for the semiconductor applications.

A Study on the Deposit Uniformity and Profile of Cu Electroplated in Miniaturized, Laboratory-Scale Through Mask Plating Cell for Printed Circuit Board (PCBs) Fabrication

  • Cho, Sung Ki;Kim, Jae Jeong
    • Korean Chemical Engineering Research
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    • v.54 no.1
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    • pp.108-113
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    • 2016
  • A miniaturized lab-scale Cu plating cell for the metallization of electronic devices was fabricated and its deposit uniformity and profile were investigated. The plating cell was composed of a polypropylene bath, an electrolyte ejection nozzle which is connected to a circulation pump. In deposit uniformity evaluation, thicker deposit was found on the bottom and sides of substrate, indicating the spatial variation of deposit thickness was governed by the tertiary current distribution which is related to $Cu^{2+}$ transport. The surface morphology of Cu deposit inside photo-resist pattern was controlled by organic additives in the electrolyte as it led to the flatter top surface compared to convex surface which was observed in the deposit grown without organic additives.

Analysis of temperature distribution of wafers inside LPCVD chamber for improvement of thickness uniformity (두께 균일도 향상을 위한 LPCVD 챔버 내 웨이퍼 온도 분포 분석)

  • Kang, Seung-Hwan;Kim, Byeong Hoon;Kong, Byung Hwan;Lee, Jae Won;Ko, Han Seo
    • Journal of the Korean Society of Visualization
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    • v.14 no.2
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    • pp.25-30
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    • 2016
  • The wafer temperature and its uniformity inside the LPCVD chamber were analyzed. The temperature uniformity at the end of the wafer load depends on the heat-insulating cap. The finite difference method was used to investigate the radiation and conduction heat transfer mechanisms, and the temperature field and heat diffusion in the LPCVD chamber was visualized. It was found that the temperature uniformity of the wafers could be controlled by the size and distance of the heat-insulating cap.

Development of White LED Lamp Having High Color Uniformity With Transfer Molding Technology (트랜스퍼 몰딩 방식을 이용한 고 색 균일성 특성을 가지는 백색 LED 램프)

  • Yu, Soon-Jae;Kim, Do-Hyung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.1
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    • pp.38-41
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    • 2010
  • Compared to conventional molding technology, the color uniformity of light direction emitted from LED is improved with PCB type lead frame technology in which metal thin film is used and transfer molding technology which makes the density of phosphor uniform by manufacturing high density LED lamp. The light efficiency and the color uniformity of the LED are improved by molding the phosphor layer outside of chip and controlling the thickness of the phosphor layer. CIE x,y difference of LED in major axis is also improved uniformly from 0 to 90 degrees.

Experimental Analysis and Optimization of Experimental Analysis and Optimization of $CF_4/O_2$ Plasma Etching Process Plasma Etching Process (실험계획법에 의한 $CF_4/O_2$ 플라즈마 에칭공정의 최적화에 관한 연구)

  • Choi, Man-Sung;Kim, Kwang-Sun
    • Journal of the Semiconductor & Display Technology
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    • v.8 no.4
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    • pp.1-5
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    • 2009
  • This investigation is applied Taguchi method and the analysis of variance(ANOVA) to the reactive ion etching(RIE) characteristics of $SiO_2$ film coated on a wafer with Experimental Analysis and Optimization of $CF_4/O_2$ Plasma Etching Process mixture. Plans of experiments via nine experimental runs are based on the orthogonal arrays. A $L_9$ orthogonal array was selected with factors and three levels. The three factors included etching time, RF power, gas mixture ratio. The etching rate of the film were measured as a function of those factors. In this study, the etching thickness mean and uniformity of thickness of the RIE are adopted as the quality targets of the RIE etching process. The partial factorial design of the Taguchi method provides an economical and systematic method for determining the applicable process parameters. The RIE are found to be the most significant factors in both the thickness mean and the uniformity of thickness for a RIE etching process.

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Verified Deep Learning-based Model Research for Improved Uniformity of Sputtered Metal Thin Films (스퍼터 금속 박막 균일도 예측을 위한 딥러닝 기반 모델 검증 연구)

  • Eun Ji Lee;Young Joon Yoo;Chang Woo Byun;Jin Pyung Kim
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.1
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    • pp.113-117
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    • 2023
  • As sputter equipment becomes more complex, it becomes increasingly difficult to understand the parameters that affect the thickness uniformity of thin metal film deposited by sputter. To address this issue, we verified a deep learning model that can predict complex relationships. Specifically, we trained the model to predict the height of 36 magnets based on the thickness of the material, using Support Vector Machine (SVM), Multilayer Perceptron (MLP), 1D-Convolutional Neural Network (1D-CNN), and 2D-Convolutional Neural Network (2D-CNN) algorithms. After evaluating each model, we found that the MLP model exhibited the best performance, especially when the dataset was constructed regardless of the thin film material. In conclusion, our study suggests that it is possible to predict the sputter equipment source using film thickness data through a deep learning model, which makes it easier to understand the relationship between film thickness and sputter equipment.

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Chemical Mechanical Polishing Characteristics of CdTe Thin Films for Application to Large-area Thin Film Solar Cell (대면적 박막 태양전지 적용을 위한 CdTe 박막의 화학적기계적연마 공정 특성)

  • Yang, Jung-Tae;Shin, Sang-Hun;Lee, Woo-Sun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.58 no.6
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    • pp.1146-1150
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    • 2009
  • Cadmium telluride (CdTe) is one of the most attractive photovoltaic materials due to its low cost, high efficiency and stable performance in physical, optical and electronic properties. Few researches on the influences of uniform surface on the photovoltaic characteristics in large-area CdTe solar cell were not reported. As the preceding study of the effects of thickness-uniformity on the photovoltaic characteristics for the large-area CdTe thin film solar cell, chemical mechanical polishing (CMP) process was investigated for an enhancement of thickness-uniformity. Removal rate of CdTe thin film was 3160 nm/min of the maximum value at the 200 $gf/cm^2$ of down force (pressure) and 60 rpm of table speed (velocity). The removal rate of CdTe thin film was more affected by the down force than the table speed which is the two main factors directly influencing on the removal rate in CMP process. RMS roughness and peak-to-valley roughness of CdTe thin film after CMP process were improved to 96.68% and 85.55%, respectively. The optimum process condition was estimated by 100 $gf/cm^2$ of down force and 60 rpm of table speed with the consideration of good removal uniformity about 5.0% as well as excellent surface roughness for the large-area CdTe solar cell.

Development and Application of Rapid Thermal Process System (급속 열처리 시스템의 개발 및 응용)

  • 김윤태;정기로;김호영;김현태;유형준
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.25 no.9
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    • pp.1051-1059
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    • 1988
  • In this study, we developed a proto-type RTP equipment by using tungsten halogen lamps. The system has been designed utilizing the result of the numerical analysis of the reactor. In order to analyze the system performance, experiments for activation of implanted atoms and oxidation process were performed. As a result, we obtained 2-3% uniformity in sheet resistance and 2-4% uniformity in oxide thickness, although after a long time process at high temperatures slip lines and warpage of the wafer have been observed.

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