• Title/Summary/Keyword: Thickness distribution

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Optimization of Current Distributions of Electroplating on Patterned Substrates with the Auxiliary Electrode (보조 전극을 이용한 패턴된 전극에서의 전류 밀도 분포의 최적화)

  • 김남석;모화동;강탁
    • Journal of the Korean institute of surface engineering
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    • v.28 no.3
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    • pp.164-173
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    • 1995
  • Based on the potential-theory model for secondary current distribution, we could predict the thickness distributions of electroplating on patterned substrates with the different size of the auxiliary electrode. The substrates contain lithographic patterns at each sample geometry. Each sample geometry had different current distribution at the same condition except the size of the auxiliary electrodes. The size effect of the auxiliary electrode on thickness distribution of electrodeposition on patterned electrode was investigated in a series of experiments. Copper was galvanostatically deposited from an acid-sulfate solution in a reciprocating paddle cell. The thickness distributions of the workpiece scale measured by profilometry across the specimen were in good agreement with the current distribution predicted by boundary element method.

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Study on Evaporating Process Modeling for Estimation of Thin-film Thickness Distribution (박막두께 예측을 위한 증착 공정 모델링에 관한 연구)

  • Lee Eung-Ki;Lee Dong-Eun;Lee Sook-Han
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.05a
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    • pp.156-159
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    • 2006
  • In order to design an evaporation system, geometric simulation of film thickness distribution profile is required. In this paper, a geometric modeling algorithm is introduced for process simulation of the evaporating process. The physical fact of the evaporating process is modeled mathematically. Based on the developed method, the thickness of the thin-film layer can be successfully controlled.

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A Study of the Thickness Characteristics of the Liquid Sheet Formed by an Impinging Jet onto a Plate (평판 충돌 제트로 생성되는 액막의 두께 분포 특성 연구)

  • Kim, M.S.;Oh, J.H.;Jeong, H.M.;Kang, B.S.
    • Journal of ILASS-Korea
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    • v.27 no.2
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    • pp.77-83
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    • 2022
  • In this study, the thickness of the liquid sheet formed by a low speed impinging jet onto a flat plate was measured by the direct contact method. The spatial distribution characteristics of the sheet thickness in the radial and circumferential directions, and the effects of jet velocity and liquid viscosity were analyzed. The measurement results were compared with the theoretical predictions. The wavy surface was observed in the case of low viscosity water, but not in the high viscosity aqueous glycerol solutions. The sheet thickness increased as the circumferential angle increased or the distance from the impinging point increased, but the thickness decreased as the circumferential angle increased around the impinging point. As the jet speed increased, the sheet thickness decreased, and the sheet thickness increased as the liquid viscosity increased. Comparison with the theoretical predictions showed that the measurement results agreed well in the case of low viscosity water or high viscosity liquids around the impinging point. The distribution characteristics of the sheet thickness can provide useful means for prediction of spray characteristics in splash plate injectors.

Theoretical prediction on thickness distribution of cement paste among neighboring aggregates in concrete

  • Chen, Huisu;Sluys, Lambertus Johannes;Stroeven, Piet;Sun, Wei
    • Computers and Concrete
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    • v.8 no.2
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    • pp.163-176
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    • 2011
  • By virtue of chord-length density function from the field of statistical physics, this paper introduced a quantitative approach to estimate the distribution of cement paste thickness between aggregates in concrete. Dynamics mixing method based on molecular dynamics was employed to generate one model structure, then image analysis algorithm was used to obtain the distribution of thickness of cement paste in model structure for the purpose of verification. By comparison of probability density curves and cumulative probability curves of the cement paste thickness among neighboring aggregates, it is found that the theoretical results are consistent with the simulation. Furthermore, for the model mortar and concrete mixtures with practical volume fraction of Fuller-type aggregate, this analytical formula was employed to predict the influence of aggregate volume fraction and aggregate fineness. And evolution of its mean values were also investigated with the variation of volume fraction of aggregate as well as the fineness of aggregates in model mortars and concretes.

Study on the thickness precision of rolled sheets (압연판의 두께 정밀도에 관한 연구)

  • 김동원;윤상건
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.11 no.5
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    • pp.837-845
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    • 1987
  • In the research of the rolling of strip, producing the strip with a close tolerance of thickness over the rolling direction was a principal object. But it was solved by the contribution of two-dimensional theory of rolling and the development of automatic gauge control system. And new requirements for the study of flatness, crown of rolled strip and edge drop grow up recently. These phenomena are closely related with the thickness distribution along the lateral direction of rolled strip. To analyse the thickness distribution of rolled strip along the lateral direction, elastic deformation of rolls and plastic deformation of work material must be discussed simultaneously. In this report, an approximate three-dimensional analysis based on Tozawa's three dimensional approach was applied to 12 cases of different rolling conditions and the numerical results were investigated. Especially stresses were laid upon the investigation of optimal boundary position between the three-dimensional analysis region and the plane strain analysis region.

Formability of Thermoplastic Laminar Composite depending on the Types of- Fabric (Fabric 형태에 따른 열가소성수지 적층복합재료의 성형성)

  • Shin, Ick-Jae;Lee, Dong-Joo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.8
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    • pp.1338-1346
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    • 2003
  • Three-dimensional formability of the thermoplastic laminar composite was studied according to manufacturing conditions. Five different types of the plain weave fabric were used as reinforcement with PET matrix. The square blank was made by press consolidation technique and formed in the type hemisphere. B-factor defined as the ratio of width of yarn and distance between yarns was used as the factor of formability in the type of plain weave fabric. The formability of PET/Glass fabric laminar composite was estimated in terms of forming rate and B-factor with the thickness distribution, area ratio of blank, and intra-ply shear angle. The thickness distribution across hemisphere was strongly affected by the B-factor, forming rate and blank thickness. The area ratio of blank was increased with B-factor, forming rate and blank thickness. Also, it was found that the intra-ply shear angle depends on the B-factor and forming rate.

구름요소의 프로파일 설계에서의 EHL해석의 작용

  • 박태조;김경웅
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1991.06a
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    • pp.50-54
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    • 1991
  • This paper shows the effect of axial profile on the elastohydrodnamic lubrication (EHL) behavior of axially profiled cylindrical roller. For two different type of profiles which have nearly similar elastostatic pressure distribution, the EHL results show large differences. Especially the difference in film shape is larger than that of pressure distribution. Therefore, the magnitude of the minimum film thickness should be a major criteria to design the axial profile of the roller and a new design procedure is presented which take into account the minimum film thickness as well as the pressure distribution.

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Analysis for Potentail Distribution of Asymmetric Double Gate MOSFET Using Series Function (급수함수를 이용한 비대칭 이중게이트 MOSFET의 전위분포 분석)

  • Jung, Hakkee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.17 no.11
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    • pp.2621-2626
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    • 2013
  • This paper has presented the potential distribution for asymmetric double gate(DG) MOSFET, and sloved Poisson equation to obtain the analytical solution of potential distribution. The symmetric DGMOSFET where both the front and the back gates are tied together is three terminal device and has the same current controllability for front and back gates. Meanwhile the asymmetric DGMOSFET is four terminal device and can separately determine current controllability for front and back gates. To approximate with experimental values, we have used the Gaussian function as doping distribution in Poisson equation. The potential distribution has been observed for gate bias voltage and gate oxide thickness and channel doping concentration of the asymmetric DGMOSFET. As a results, we know potential distribution is greatly changed for gate bias voltage and gate oxide thickness, especially for gate to increase gate oxide thickness. Also the potential distribution for source is changed greater than one of drain with increasing of channel doping concentration.

Analysis for Potential Distribution of Asymmetric Double Gate MOSFET (비대칭 이중게이트 MOSFET의 전위분포 분석)

  • Jung, Hakkee;Lee, Jongin
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.10a
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    • pp.691-694
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    • 2013
  • This paper has presented the potential distribution for asymmetric double gate(DG) MOSFET, and sloved Poisson equation to obtain the analytical solution of potential distribution. The symmetric DGMOSFET where both the front and the back gates are tied together is three terminal device and has the same current controllability for front and back gates. Meanwhile the asymmetric DGMOSFET is four terminal device and can separately determine current controllability for front and back gates. To approximate with experimental values, we have used the Gaussian function as charge distribution in Poisson equation. The potential distribution has been observed for gate bias voltage and gate oxide thickness and channel doping concentration of the asymmetric DGMOSFET. As a results, we know potential distribution is greatly changed for gate bias voltage and gate oxide thickness, especially for gate to increase gate oxide thickness. Also the potential distribution for source is changed greater than one of drain with increasing of channel doping concentration.

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