Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Study on Evaporating Process Modeling for Estimation of Thin-film Thickness Distribution

박막두께 예측을 위한 증착 공정 모델링에 관한 연구

  • 이응기 (공주대학교 기계자동차공학부) ;
  • 이동은 (공주대학교 대학원 기계공학과) ;
  • 김숙한 (공주대학교 대학원 기계공학과)
  • Published : 2006.05.01
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Abstract

In order to design an evaporation system, geometric simulation of film thickness distribution profile is required. In this paper, a geometric modeling algorithm is introduced for process simulation of the evaporating process. The physical fact of the evaporating process is modeled mathematically. Based on the developed method, the thickness of the thin-film layer can be successfully controlled.

Keywords