• Journal of the Korean Society of Industry Convergence
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• v.23 no.6_2
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• pp.1051-1058
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• 2020

The chemical mechanical planarization (CMP) is a process of physically and chemically polishing the semiconductor substrate. The planarization quality of a substrate can be evaluated by the within wafer non-uniformity (WIWNU). In order to improve WIWNU, it is important to manage the pad profile. In this study, a device capable of non-contact measurement of the pad thickness profile was developed. From the measured pad profile, the profile of the pad surface and the groove was extracted using the envelope function, and the pad thickness profile was derived using the difference between each profile. Thickness profiles of various CMP pads were measured using the developed PMS and envelope function. In the case of IC series pads, regardless of the pad wear amount, the envelopes closely follow the pad surface and grooves, making it easy to calculate the pad thickness profile. In the case of the H80 series pad, the pad thickness profile was easy to derive because the pad with a small wear amount did not reveal deep pores on the pad surface. However, the pad with a large wear amount make errors in the lower envelope profile, because there are pores deeper than the grooves. By removing these deep pores through filtering, the pad flatness could be clearly confirmed. Through the developed PMS and the pad thickness profile calculation method using the envelope function, the pad life, the amount of wear and the pad flatness can be easily derived and used for various pad analysis.

• Journal of ILASS-Korea
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• v.12 no.2
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• pp.79-85
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• 2007

In this study, the effect of jet velocity profile on the thickness and velocity of the liquid sheet formed by two impinging low speed jets was investigated. To predict the distribution of thickness and velocity of liquid sheet theoretically, the jet velocity profile which was measured experimentally was adopted in addition to the constant jet velocity as well as Poiseuille's parabolic profile. For three cases, the distribution of thickness and velocity of liquid sheet was analytically predicted by solving conservation equations including stagnation point. The predicted results were compared with previous experimental results. The jet velocity profile definitely affected the resulting characteristics of liquid sheet. The distribution of thickness and velocity of liquid sheet was more close to the measured results compared with that which was predicted by the assumption of constant jet velocity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.565-568
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• 2005

We describe a new scheme of dispersive white-light interferometer that is capable of measuring the thickness profile of thin-film layers, for which not only the top surface height profile but also the film thickness of the target surface should be measured at the same time. The interferometer is found useful particularly for in-situ inspection of micro-engineered surfaces such as liquid crystal displays, which requires for high-speed implementation of 3-D surface metrology.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.487-490
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• 2004

In order to simulate OLED evaporation process, modeling of directional distribution of the vaporized organic materials, film thickness distribution profile and pattern-mask shadow effect are required In accordance with many literatures; all of them except shadow effect modeling are studied and developed. In this paper, modeling algorithm of evaporation shadow is presented for process simulation of full-color OLED evaporating system. In OLED evaporating process the offset position of the point cell-source against the substrate rotation axis and the usage of the patterned mask are the principal causes for evaporation shadow. For geometric simulation of shadow using z-map, the film thickness profile, which is condensed on a glass substrate, is converted to the z-map data. In practical evaporation process, the glass substrate is rotated. This physical fact is solved and modeled mathematically for z-map simulation. After simulating the evaporation process, the z-map data can present the shadow-effected film thickness profile. Z-map is an efficient method in that the cross-sectional presentations of the film thickness profile and thickness distribution evaluation are easily and rapidly achieved.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1444-1447
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• 2004

For the OLED evaporation process, thin film thickness uniformity is of great practical importance. In order to achieve the better thickness uniformity, geometric simulation of film thickness distribution profile is required. In this paper, a geometric modeling algorithm is introduced for process simulation of full-color OLED evaporating system. The physical fact of the evaporation process is modeled mathematically. Based on the developed method, the uniformity of the organic layer thickness can be successfully controlled.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.11
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• pp.1417-1423
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• 2004

The thickness of laminar flame and preheat zone was computed from equation with burning velocity and the temperature profile, which is obtained by using premix code of Chemkin program for ethanol-air mixture. The computations were carried out under the unburned gas pressure 0.5bar-30bar and temperature of 300k-700K at 1.0. A difference flame thickness showed between temperature profile and equation with burning velocity. The ratio of flame thickness derived from the equation was about 45∼65% of the temperature profile, and the thickness of preheat zone was about 67.1% of the flame thickness. The flame thickness was decreased by increasing the pressure and temperature, but the effect of pressure is more significant than the effect of temperature on the flame thickness. The flame thickness was predicted by using the following equation. X(mm) = $X_{st}$ (T/300)$^{-0}$.65/(P)$^{-0}$.68/ (0.5bar$\leq$P$\leq$30bar, 300K$\leq$T$\leq$700K)K)

• Tribology and Lubricants
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• v.29 no.6
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• pp.353-359
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• 2013

The rollers and/or races in cylindrical and tapered roller bearings should be profiled to relieve high edge stress concentrations caused by their finite lengths and misalignment. In this study, a numerical analysis was performed to investigate the elastohydrodynamic lubrication (EHL) of a Lundberg profile-type cylindrical roller. A finite difference method with fully nonuniform grids and the Newton-Raphson method were used to present detailed EHL pressure distributions and film shapes, as well as the variations in the minimum and central film thicknesses with the profile modification coefficient. In the Lundberg profile, the maximum pressure and minimum film thickness always occurred near the edges. Proper modification of the Lundberg profile considerably increased the minimum film thickness.

• Journal of the Optical Society of Korea
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• v.18 no.3
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• pp.236-243
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• 2014

Surface profiling and film thickness measurement play an important role for inspection. White light interferometry is widely used for engineering surfaces profiling, but its applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. The conventional bucket algorithm had given inaccurate surface profiles because of the phase error that occurs when a thin-film exists on the top of the surface. Recently, reflectometry and white light scanning interferometry were combined to measure the film thickness and surface profile. These techniques, however, have found that many local minima exist, so it is necessary to make proper initial guesses to reach the global minimum quickly. In this paper we propose combing reflectometry and white light scanning interferometry to measure the thin-film thickness and surface profile. The key idea is to divide the measurement into two states; reflectometry mode and interferometry mode to obtain the thickness and profile separately. Interferogram modeling, which considers transparent thin-film, was proposed to determine parameters such as height and thickness. With the proposed method, the ambiguity in determining the thickness and the surface has been eliminated. Standard thickness specimens were measured using the proposed method. Multi-layered film measurement results were compared with AFM measurement results. The comparison showed that surface profile and thin-film thickness can be measured successfully through the proposed method.

• Tribology and Lubricants
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• v.31 no.5
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• pp.205-212
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• 2015

In this research, effects of profile changes of stem section of the plunger on the lubrication characteristics of a fuel injection pump (FIP) were evaluated by hydrodynamic lubrication analysis. The clearance between plunger and barrel was divided into two regions, head and stem. The head was not involved in preventing a decrease of fuel oil pressure. So, research efforts were focused on both edges of the plunger’s stem. The two -dimensional Reynolds equation was used to evaluate lubrication characteristics with variations in viscosity, clearance and profile for a laminar, incompressible, unsteady-state flow. Moreover, the equilibrium equation of moment and forces in the vertical and horizontal directions were used to determine the motion of the plunger. The equations were discretized using the finite difference method. Lubrication characteristics of the FIP were investigated by comparing the dimensionless minimum film thickness, or film parameter, which is the ratio of minimum film thickness to surface roughness. Through numerical analyses, we showed that the profile of the lower edge of the stem had no effect on lubrication characteristics, but the profile of the upper edge had a significant influence on lubrication characteristics. In addition, changes in the profile were more effective in improving lubrication characteristics under low viscosity conditions.

• Korea-Australia Rheology Journal
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• v.16 no.4
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• pp.227-233
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• 2004

Simplified model of slide-fed curtain coating flow has been developed and tested in this study. It rests on the sheet profile equations for curtain thickness in curtain flow and its trajectory derived by the integral momentum balance approach of Higgins and Scriven (1979) and Kistler (1983). It also draws on the film profile equation of film thickness variation in flow down a slide. The equations have been solved in finite difference approximation by Newton iteration with continuation. The results show that how inertia (Rey­nolds number), surface tension (capillary number), inclination angle of the slide, and air pressure difference across the curtain affect sheet trajectory and thickness profile. It has been revealed that approximate models can be useful to easily analyze coating flow dynamics without complex computations, giving qualitative agreement with full theory and with experiment.