Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry |
Jo, Taeyong
(School of Mechanical and Aerospace Engineering, Seoul National University)
Kim, KwangRak (School of Mechanical and Aerospace Engineering, Seoul National University) Kim, SeongRyong (School of Mechanical and Aerospace Engineering, Seoul National University) Pahk, HeuiJae (School of Mechanical and Aerospace Engineering, Seoul National University) |
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