• 제목/요약/키워드: Thermal-structure Stability

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티타니움 실리사이드 박막의 열안정성에 미치는 기판 실리콘막의 영향 (Effect of Underlying Poly-Silicon on the Thermal Staability of the Ti-silicide Film)

  • 김영욱;이내인;고종우;김일권;안성태;이종식;송세안
    • 한국재료학회지
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    • 제3권2호
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    • pp.158-165
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    • 1993
  • 실리콘박막의 상부에 고상반응에 의해 형성된 TiS$i_2$ 박막의 응집 거동에 미치는 기판 실리콘의 영향을 조사했다. 폴리실리콘과 어몰퍼스실리콘을 증착상태 또는 어닐링한 상태엣 TiS$i_2$를 형성시키고 90$0^{\circ}C$열처리에 따른 TiS$i_2$의 면저항값의 변화를 조사하고 XRD, SEM 및 TEM에 의한 실리콘의 조직관찰을 행했다. TiS$i_2$응집은 어몰퍼스실리콘 위의 경우가 더욱 심했다. 폴리실리콘을 어닐링하면 TiS$i_2$의 응집은 억제되며 고온에서 어닐링할수록 그 효과가 현저했다. 이는 폴리실리콘의 입도 변화보다는 증착시 존재하는 결함들이 열처리에 의해 감소된 때문이다. 폴리실리콘의 경우는 어닐링 전후에 상관없이 (110)집합조직인 주상정 조직을 갖고 있다. 어몰퍼스실리콘을 결정화시킨 경우는 (111)집합조직를 갖는 등축정 조직을 나타내었다. 실리콘의 표면에너지가 낮은 (111)면이TiS$i_2$ 막의 하부 폴리실리콘에 많이 존재할수록 응집은 촉진된다.

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열잠재성 촉매 개시제를 이용한 2관능성/3관능성 에폭시 블렌드계의 경화거동 및 열안정성 (Cure Behavior and Thermal Stability of Difunctional/Trifunctional Epoxy Blend System Initiated by Thermal Latent Catalyst)

  • 박수진;김택진;이재락
    • 공업화학
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    • 제10권7호
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    • pp.1046-1051
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    • 1999
  • 잠재성 양이온 개시제인 N-benzylpyrazinium hexafluoroantimonate (BPH)가 1 wt % 첨가된 diglycidylether of bisphenol A(DGEBA)/trimethylolpropane triglycidylether(TMP) 에폭시 블렌드의 혼합 조성비에 따른 경화거동과 열안정성에 대해 각각 DSC와 TGA를 통해 조사하였다. 블렌드계의 잠재 특성은 동적 DSC를 이용하여 온도의 증가에 따른 전환율을 구하여 측정하였다. 동적 DSC에 의한 경화 반응의 열분석 결과 경화 반응 초기에는 DGEBA 수지내의 수산기와 BPH, 그리고 에폭사이드와 BPH 사이의 반응에 의해 저온쪽에 약한 피크를 나타내며 고온쪽에는 3차원 가교 구조를 이루는 성장 과정에서의 발열 피크를 나타냄을 알 수 있었다. 경화 반응 기구의 등온 열분석 결과 경화 반응 속도는 TMP 단일 조성에서보다 DGEBA의 함량에 따라 증가하였다. 경화된 에폭시 수지의 열안정성은 DGEBA 함량이 증가할수록 증가하였는데 이는 DGEBA의 안정한 방향족 구조, 수산기의 존재 그리고 높은 분자량의 영향 등으로 설명할 수 있다.

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Blistering Induced Degradation of Thermal Stability Al2O3 Passivation Layer in Crystal Si Solar Cells

  • Li, Meng;Shin, Hong-Sik;Jeong, Kwang-Seok;Oh, Sung-Kwen;Lee, Horyeong;Han, Kyumin;Lee, Ga-Won;Lee, Hi-Deok
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제14권1호
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    • pp.53-60
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    • 2014
  • Different kinds of post-deposition annealing (PDA) by a rapid thermal process (RTP) are used to enhance the field-effect passivation of $Al_2O_3$ film in crystal Si solar cells. To characterize the effects of PDA on $Al_2O_3$ and the interface, metal-insulator semiconductor (MIS) devices were fabricated. The effects of PDA were characterized as functions of RTP temperature from $400{\sim}700^{\circ}C$ and RTP time from 30~120 s. A high temperature PDA can retard the passivation of thin $Al_2O_3$ film in c-Si solar cells. PDA by RTP at $400^{\circ}C$ results in better passivation than a PDA at $400^{\circ}C$ in forming gas ($H_2$ 4% in $N_2$) for 30 minutes. A high thermal budget causes blistering on $Al_2O_3$ film, which degrades its thermal stability and effective lifetime. It is related to the film structure, deposition temperature, thickness of the film, and annealing temperature. RTP shows the possibility of being applied to the PDA of $Al_2O_3$ film. Optimal PDA conditions should be studied for specific $Al_2O_3$ films, considering blistering.

재생냉각형 가스발생기 챔버 구조해석 (Structural Analysis of Gas Generator Regenerative Cooling Chamber)

  • 류철성;김홍집;최환석
    • 대한기계학회논문집A
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    • 제31권10호
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    • pp.1046-1052
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    • 2007
  • Elastic-plastic structural analysis for regenerative cooling chamber of gas generator was performed. Uniaxial tension test was conducted for STS316L at room and high temperature conditions to get the material data necessary for the structural analysis of the chamber which was operated under thermal load and high internal pressure. Physical properties including thermal conductivity, specific heat and thermal expansion were also measured. The structural analysis for four different types of regenerative cooling chamber of gas generator revealed that increased cooling performance decreased the thermal load and strain of the cooling channel structure. The results propose that in order for the regenerative cooling gas generator chamber to have high structural stability with endurance to high mechanical and thermal loads, it is important for the chamber to be designed to have high cooling performance.

Ir과 Co를 첨가한 니켈모노실리사이드의 고온 안정화 연구 (The Enhancement of Thermal Stability of Nickel Monosilicide by Ir and Co Insertion)

  • 윤기정;송오성
    • 한국산학기술학회논문지
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    • 제7권6호
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    • pp.1056-1063
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    • 2006
  • 10 nm-Ni/l nm-Ir(poly)Si과 10 nm-$Ni_{50}Co_{50}$/(poly)Si 구조의 박막을 열증착기로 준비하고 쾌속열처리기로 40초간 $300{\sim}1200^{\circ}C$ 온도 범위에서 실리사이드화 시켰다. 이들의 실리사이드 온도에 따른 면저항, 미세구조와 두께, 생성상, 화학조성과 표면조도의 변화를 사점면저항 측정기와 이온빔현미경, X선 회절기, 오제이 분석기, 주사탐침현미경을 써서 확인하였다. Ir과 Co의 혼입에 따라 기존의 $700^{\circ}C$에 한정된 NiSi에 비해 단결정, 다결정 실리콘 기판에서의 저저항 안정 구간이 각각 $1000^{\circ}C$, $850^{\circ}C$로 향상되었다. 이때의 실리사이드층의 두께도 20$\sim$50 nm로 나노급 공정에 적합하였다. Ir과 Co의 첨가는 단결정 기판에서의 니켈실리사이드의 고저항 $NiSi_2$로의 변태를 방지하였고, 다결정 기판에서 고온에서의 고저항은 고저항 상의 출현과 실리콘층과의 혼합과 도치현상이 발생한 것이 이유였다. Ir의 첨가는 특히 최종 실리사이드 표면온도를 3 nm 이내로 유지시키는 장점이 있었다 Ir과 Co를 첨가한 니켈실리사이드는 기존의 니켈실리사이드의 열적 안정성을 향상시켰고 나노급 디바이스에 적합한 물성을 가짐을 확인하였다.

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Thermal Stability Improvement of the Ni Germano-silicide formed by a novel structure Ni/Co/TiN using 2-step RTP for Nano-Scale CMOS Technology

  • Huang Bin-Feng;Oh Soon-Young;Yun Jang-Gn;Kim Yong-Jin;Ji Hee-Hwan;Kim Yong-Goo;Cha Han-Seob;Heo Sang-Bum;Lee Jeong-Gun;Kim Yeong-Cheol;Lee Hi-Deok
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
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    • pp.371-374
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    • 2004
  • In this paper, Ni Germane-silicide formed on undoped $Si_{0.8}Ge_{0.2}$ as well as source/drain dopants doped $Si_{0.8}Ge_{0.2}$ was characterized by the four-point probe for sheet resistance. x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS) and field emission scanning electron microscope (FESEM). Low resistive NiSiGe is formed by one step RTP (Rapid thermal processing) with temperature range at $500{\~}700^{\circ}C$. To enhance the thermal stability of Ni Germane-silicide, Ni/Co/TiN structure with different Co concentration were studied in this work. Low sheet resistance was obtained by Ni/Co/TiN structure with high Co concentration using 2-step RTP and it almost keeps the same low sheet resistance even after furnace annealing at $650^{\circ}C$ for 30 min.

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Theoretical Investigation on the Structure, Detonation Performance and Pyrolysis Mechanism of 4,6,8-Trinitro-4,5,7,8-tetrahydro -6H-furazano[3,4-f]-1,3,5-triazepine

  • Li, Xiao-Hong;Zhang, Rui-Zhou;Zhang, Xian-Zhou
    • Bulletin of the Korean Chemical Society
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    • 제35권5호
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    • pp.1479-1484
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    • 2014
  • Based on the full optimized molecular geometric structures at B3LYP/cc-pvtz method, a new designed compound, 4,6,8-trinitro-4,5,7,8-tetrahydro-6H-furazano[3,4-f ]-1,3,5-triazepine was investigated in order to look for high energy density compounds (HEDCs). The analysis of the molecular structure indicates that the seven-membered ring adopts chair conformation and there exist intramolecular hydrogen bond interactions. IR spectrum and heat of formation (HOF) were predicted. The detonation velocity and pressure were evaluated by using Kamlet-Jacobs equations based on the theoretical density and condensed HOF. The bond dissociation energies and bond orders for the weakest bonds were analyzed to investigate the thermal stability of the title compound. The results show that $N_1-N_6$ bond is the trigger bond. The crystal structure obtained by molecular mechanics belongs to $Pna2_1$ space group, with lattice parameters Z = 4, a = 15.3023 ${\AA}$, b = 5.7882 ${\AA}$, c = 11.0471 ${\AA}$, ${\rho}=2.06gcm^{-3}$. In addition, the analysis of frontier molecular orbital shows the title compound has good stability and high chemical hardness.

Sn-complexes를 이용한 OLED의 발광 특성 향상에 관한 연구 (Improvement of Luminance Properties of Blue OLEO using $SnDP(HPB)_2$)

  • 김동은;최규채;권영수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 논문집 센서 박막재료연구회 및 광주 전남지부
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    • pp.121-122
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    • 2008
  • Blue emitting materials have been explored by various researchers. However, blue-emitting materials with high luminous efficiency, good color purity, and thermal stability are still much desired. In this study, we synthesized a new blue luminescent material, $SnDP(HPB)_2$ which is low molecular compound and thermal stability. The PL spectrum of $SnDP(HPB)_2$ was observed blue at the wavelength of 447nm. The ionization potential(IP) and the electron affinity(EA) of $SnDP(HPB)_2$ was measured to be 6.7 eV and 3.0 eV, respectively. The fundamental structure of the OLED was ITO/NPB/$SnDP(HPB)_2/Alq_3$/LiF/Al. As a Result, we obtained to enhance the performance of blue OLED.

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폴리올 에스테르 유도체에 대한 합성 윤활유의 제조 및 그의 특성 (Synthesis and Characteristics of Synthetic Lubricants for the Polyol ester derivatives)

  • 이재덕;정노희
    • 한국응용과학기술학회지
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    • 제26권2호
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    • pp.213-223
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    • 2009
  • Conventional additives were added to a newly synthesized base oil to create synthetic lubricants. Commercial polyol ester prepared in this laboratory were obtained as esterification of 1,1,1-trimethylol propane and respectively. This newly synthesized base oil had a variable chemical structure that could achieved the following properties; oxidation or thermal stability, low temperature fluidity, and higher flash points. When compared with commercial mineral lubricants, the synthetic lubricants show superior thermal and oxidation stability, and anti-wear properties.

위성체 유연 보 구조물의 열 안정성 해석 (Thermal Stability Analysis of Flexible Beam Spacecraft Appendage)

  • 윤일성;송오섭
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2001년도 춘계학술대회논문집
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    • pp.399-406
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    • 2001
  • Thermally induced vibration response of composite thin walled beams is investigated. The thin-walled beam model incorporates a number of nonclassical effects of transverse shear, primary and secondary warping, rotary inertia and anisotropy of constituent materials. Thermally induced vibration response characteristics of a composite thin walled beam exhibiting the circumferentially uniform system(CUS) configuration are exploited in connection with the structural bending-torsion coupling resulting from directional properties of fiber reinforced composite materials and from ply stacking sequence. A coupled thermal structure analysis that includes the effects of structural deformations on heating and temperature gradient is investigated.

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