• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.193-198
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• 2007

The NiSi is very promising candidate for the metallization in 60nm CMOS process such as FUSI(fully silicided) gate and source/drain contact because it exhibits non-size dependent resistance, low silicon consumption and mid-gap workfunction. Ni film was first deposited by using ALD (atomic layer deposition) technique with Bis-Ni precursor and $H_2$ reactant gas at $220^{\circ}C$ with deposition rate of $1.25{\AA}/cycle$. The as-deposited Ni film exhibited a sheet resistance of $5{\Omega}/{\square}$. RTP (repaid thermal process) was then performed by varying temperature from $400^{\circ}C$ to $900^{\circ}C$ in $N_2$ ambient for the formation of NiSi. The process window temperature for the formation of low-resistance NiSi was estimated from $600^{\circ}C$ to $800^{\circ}C$ and from $700^{\circ}C$ to $800^{\circ}C$ with and without Ti capping layer. The respective sheet resistance of the films was changed to $2.5{\Omega}/{\square}$ and $3{\Omega}/{\square}$ after silicidation. This is because Ti capping layer increases reaction between Ni and Si and suppresses the oxidation and impurity incorporation into Ni film during silicidation process. The NiSi films were treated by additional thermal stress in a resistively heated furnace for test of thermal stability, showing that the film heat-treated at $800^{\circ}C$ was more stable than that at $700^{\circ}C$ due to better crystallinity.

• 동력기계공학회지
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• 제2권2호
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• pp.35-40
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• 1998

In this study, the author investigated the effects of strengthening treatments on the mechanical properties of plasma sprayed Ni-base self fluxing alloy. Strengthening treatments for sprayed specimens were carried out in 4 different temperature conditions in vacuum furnace. The mechanical properties, such as microhardness, thermal shock resistance and erosion resistance were tested for the sprayed specimens after strengthening treatments. And it was proved that the mechanical properties of coating layer were much improved by strengthening treatments.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.1069-1072
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• 2003

Germane-sillicide phase formation on S $i_{0.25}$G $e_{0.75}$ with Ni 100$\square$, Co 10$\square$/Ni 100$\square$ and Ni 50$\square$/Co 10$\square$/Ni 50$\square$ layer was studied by sheet resistance and Field Emission Scanning Electron Microscopy(FESEM). Thermal stability of nickel germane-silicide is found to be improved by sputtering Ni/Co/Ni on the SiGe. After annealing at 600, 650, $700^{\circ}C$, 30min., the nickel germane-silicide formed by Ni 50$\square$/Co 10$\square$/Ni 50$\square$ layer achieved a sheet resistance less than 17ohms/sq.(almost the same to the value before furnace annealing for 30min.) , while the process of the other two ways result in high sheet resistance and even sheet resistance fail due to Ge segregation.ion.

• 한국표면공학회지
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• 제46권6호
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• pp.235-241
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• 2013

In this study, the effects of alloying elements and thermal aging on the contact resistance of electroplated gold alloy layers were investigated by surface analysis using X-ray photoelectron spectroscopy (XPS). The contact resistance of Au-Ag alloy was lower than that of Au-Ni or Au-Co alloy after thermal aging. The XPS results show that nickel and oxygen present as nickel oxides such as NiO and $Ni_2O_3$ on the surface of gold layers after thermal aging. The increase in the contact resistance after thermal aging is attributable to the nickel oxide layer formed on the surface of the gold layers. The content of nickel diffused from the underlayer during the thermal aging was high in the order of Au-Co, Au-Ni and Au-Ag alloy because the area of grain boundary was large in the order of Au-Ag, Au-Ni and Au-Co alloy.

• 설비공학논문집
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• 제13권4호
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• pp.271-287
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• 2001

This paper has been made to investigate the thermal performance characteristics for the several types of layered aluminum heat sinks with offset-strip fin. Heat sinks with different fin height, fin length, number of fin layer and slanted fin are prepared and tested for natural convection as well as forced convection. The experimental results for layered heat sink(LHS) are compared to those for advanced pin fin heat sink (PHS) so that the appropriate heat sink can be designed or chosen according to the heating conditions. The overall heat transfer performances for LHS are almost comparable to those of PHS under natural convection, and become 1.2∼1.5 times as high as those of PHS under forced convection situation. This study shows that fin height and number of fin layer re important parameters, which have a serious influence on thermal performance for layered heat sinks.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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• pp.122.1-122.1
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• 2011

Phosphorus is known to pile-up at the silicon surface when it is thermally oxidized. A thin layer, about 40nm thick from the silicon surface, is created containing more phosphorus than the bulk of the emitter. This layer has a gaussian profile with the peak at the surface of the silicon. In this study the pile-up effect was studied if this layer can act as a front surface field for solar cells. The effect was also tested if its high dose of phosphorus at the silicon surface can lower the contact resistance with the front metal contact. P-type wafers were first doped with phosphorus to create an n-type emitter. The doping was done using either a furnace or ion implantation. The wafers were then oxidized using dry thermal oxidation. The effect of the pile-up as a front surface field was checked by measuring the minority carrier lifetime using a QSSPC. The contact resistance of the wafers were also measured to see if the pile-up effect can lower the series resistance.

• 한국표면공학회지
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• 제32권1호
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• pp.49-60
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• 1999

The protective oxide scales and coatings formed on high temperature materials must be preserved in high temperature atmosphere. And the thermal stresses induced by thermal cycling and the growth stresses by the formation of oxide scales can cause the loss of adherence and spalling of the oxide scales and coated layers. Among the coating processes Al diffusion coating is favored due to thermochemical stability and superior adherence in an hostile atmosphere. In this study, protective oxide forming element, Al was coated on Ni, Inconel 600 and 690 by diffusion coating process varying coating temperature and time. And the surface stability and adherence of oxide scales formed on those Al diffusion coated materials were evaluated by thermal cycling test. Al diffusion coated specimens showed superior cyclic oxidation resistance compared to bare ones and specimens coated for longer period had better cyclic oxidation resistance, due to the abundant amount of Al in the coated layer. Meanwhile Al diffusion coated Inconel 600 and 690 showed improved cyclic oxidation resistance by the effect of Al in the coated layer and Cr in the substrate. Comparing both Al diffusion coated Inconel 600 and 690, Al diffusion coated Inconel 690 maintained better adhesion between coated layer and substrate by virtue of the bridging effect resulting from the segregation of Cr in the interdiffusion zone.

• 대한기계학회논문집A
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• 제38권5호
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• pp.559-566
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• 2014

제철공장의 소결대차 스틸바의 내열성, 내마모성, 내부식성 등의 성질을 향상시키기 위하여 용사코팅을 적용한 연구가 진행되었다. 약 $700^{\circ}C$의 고온환경에서 내열, 내마모, 부식 등에 노출되어 있는 스틸의 표면에 $Al_2O_3$, $Cr_2O_3$, WC 코팅을 적용하여 국부적으로 고온내마모성, 내식성, 내열성, 내열충격성 등을 향상시킴으로써 기존 제강공정에서 사용되는 스틸바의 수명을 향상시켰다. 스틸바에 적용한 금속용사 코팅층에 대하여 고온내마모시험, 열충격시험, 내부식시험을 수행하였다. 코팅층의 물리적, 화학적, 기계적 특성이 코팅이 안된 재료에 비해 매우 우수하였다.

• 한국표면공학회지
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• 제27권1호
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• pp.12-18
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• 1994

The plasma spray process was used to deposit coatings of $ZrO_2$-8wt%Y2O3 powders on mild steel sub-strate, and the characteristics of as-deposited and heat treated coatings have been investigated. Particulary, the variations of porosity, wear resistance, thermal barrier and thermal shock resistance in $ZrO_2$-8wt% $Y_2O_3$coatings after heat treatment under vacuum circumstance have been investigated. The porosity of the coating layer was increased with increased spray distance. In the case of the arc current of 450A and at the spray distance of 50mm, it was obtained the lowest amount of porosity. After heat treatment, the amount of porosity was found to be decreased, and the wear resistance, microhardness and thermal shock resistance were im-proved. However, the thermal barrier was decreased.

• 한국군사과학기술학회지
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• 제23권5호
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• pp.475-484
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• 2020

Individual curing process of each layer in two resin composites can be caused the separation between two layers. In this study, co-curing process for two resin composites is suggested to improve the inter-layer bonding. Glass fiber reinforced composites with phenolic and epoxy resins were manufactured by co-curing process, and several types of glass/phenolic composites were considered to confirm the application on two resin composites. Experiments for smoke resistance, scratch resistance and flexural strength were carried out to verify requirements corresponding to thermal and mechanical environments. It was validated that two resin composites with phenolic resin impregnated prepreg exhibits good thermal and mechanical characteristics, and it can serve as highly effective composite structures in aerospace and many industry areas.