• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.1169-1170
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• 2011

• 센서학회지
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• 제31권5호
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• pp.348-352
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• 2022

Hydrogen gas (H₂) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H₂ gas sensor with high performance. In this paper, we confirmed that H₂ gas detection ability of SnO₂ based H₂ gas sensor along with thermal treatment effect of SnO₂. Proposed SnO₂ based H₂ gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO₂ thin films are thermally treated in various thermal treatement temperature in range of 500-900 ℃ and their H₂ gas detection ability is estimatied by measuring output current of H₂ gas sensor. Based on experimental results, fabricated H₂ gas sensor with SnO₂ thin film which is thermally treated at 700 ℃ has a superior H₂ gas detection ability, and it can be expected to utilize at the practical applications.

• 센서학회지
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• 제15권1호
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• pp.65-70
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• 2006

Characteristics of thin-film NTC thermal sensors fabricated by micromachining technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/$SiO_{X}$/(100)Si. NTC film of $Mn_{1.5}CoNi_{0.5}O_{4}$ with 0.5 mm in thickness was deposited on $SiO_{X}$ layer (1.2 mm) by PLD (pulsed laser deposition) and annealed at 873-1073 K in air for 1 hour. Au(200 nm)/Ti(100 nm) electrode was coated on NTC film by dc sputtering. By the results of microstructure, X-ray and NTC analysis, post-annealed NTC films at 973 K for 1 hour showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65 mm. Sensors with thin sensing membrane showed the good detecting characteristics.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2482-2487
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• 2007

Numerical simulations are conducted for the analysis of a thermal mass air flow sensor with periodic heating pulses on silicon-nitride ($Si_3N_4$) thin membrane structure. This study aims to find the locations of temperature sensors on the thin membrane and the heating pulse conditions, that the higher sensitivity can be achieved, for the development of a MEMS fabricated mass air flow sensor which is driven in periodic heating pulse. The simulations, thus, focus on the membrane temperature profile according to variation of the flow velocity, heating duration time and imposed power. The flow velocity of the simulations is ranging from 3 m/s to 35 m/s, heating duration time from 1 ms to 3 ms and imposed power from 50 mW to 90 mW. The corresponding Reynolds numbers vary from 1000 to 10000.

• 센서학회지
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• 제6권3호
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• pp.237-244
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• 1997

A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/$Si_{3}N_{4}$(800nm/150nm) diaphragm. The proposed planar-type microsensor could be fabricated by simple silicon process using only 3 masks for photolithography process compared with 5 or 6 masks of the typical micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of the fabricated microheater. Although there are some discrepancy between the simulation result and the result from the fabricated microheater, the thermal simulation by FEM was proved to be an useful method to evaluate the thermal properties of microheater. The sensing characteristics of the fabricated microsensor with the planar-type heater were investigated also.

• 센서학회지
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• 제27권1호
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• pp.40-46
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• 2018

In this paper, we focus on optimization of a boron ($^{11}B$)-implanted n type Si epi substrate for obtaining near-zero temperature coefficient of resistance (TCR) at temperature range from 25 to $125^{\circ}C$. The $^{11}B$-implantation on the N type-Si epi substrate formed isolation from the rest of the N-type Si by the depletion region of a PN junction. The TCR increased as the temperature of rapid thermal anneal (RTA) was increased at the temperature range from $900^{\circ}C$ to $1000^{\circ}C$ for the $p^+$ contact with implantation at dose of $1E16/cm^2$, but sheet resistance of this film was decreased. After the optimization of anneal process condition, the TCR of $1126.7{\pm}30.3$ (ppm/K) was obtained for the $p^-$ resistor-COB package chips contained $p^+$ contact with the implantation of $5E14/cm^2$. This shows the potential of the $^{11}B$-implanted n type Si epi substrate as a resistor for pressure sensor in thermal stable environment applications..

• 센서학회지
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• 제17권4호
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• pp.261-266
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• 2008

In this paper, we present thermal characteristics of high-temperature measurement sensor using fiber Bragg grating(FBG), including peak reflectivity, FWHM bandwidth and various normalized refractive index change along temperature variation. The temperature stability of FBG temperature sensor can be changed by varying the refractive index change and grating length. The proposed FBG temperature sensor can measure up to about $600^{\circ}C$ and 1000 hours of heating time.

• 한국정보과학회:학술대회논문집
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• 한국정보과학회 2012년도 한국컴퓨터종합학술대회논문집 Vol.39 No.1(D)
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• pp.369-371
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• 2012

Wireless sensor networks have taken immense interest in healthcare systems in recent years. One example of it is in an in vivo sensor that is deployed in critical and sensitive healthcare applications like artificial retina, cardiac pacemaker, drug delivery, blood pressure, internal heat calculation, glucosemonitoring etc. In vivo sensor nodes exhibit temperature that may be very dangerous for human tissues. However, existing in vivo thermal aware routing approaches suffer from hotspot creation, delay, and computational complexity. These limitations motivate us toward an in vivo virtual backbone, a small subset of nodes, connected to all other nodes and involved in routing of all nodes, -based solution. A virtual backbone is lightweight and its fault-tolerant version allows in vivo sensor nodes to disconnect hotspot paths and to use alternative paths. We have formulated the problem as m-connected k-dominating set problem with minimum temperature cost in in vivo sensor network. This is a combinatorial optimization problem and we have been motivated to use evolutionary approach to solve the problem.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2014년도 추계학술대회
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• pp.857-860
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• 2014

본 논문에서는 서모파일 어레이 센서를 이용한 무선 인체 감지 시스템을 제안한다. 제안한 시스템은 천정에 센서를 부착하여 온도 분포라고 불리는 공간의 온도를 측정한다. 시스템은 $4{\times}4$ 픽셀의 온도 분포를 측정하여 인체의 움직임을 추출할 수 있도록 분석된다. 실험 결과에서 제안한 시스템은 인체 움직임을 성공적으로 감지하였다.

• 한국안전학회지
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• 제36권5호
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• pp.71-78
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• 2021

There are regularly planned overhaul periods in thermal power plants, which involve the maintenance of the boiler of the power plants. However, thermal power plants workers are always exposed to risk during overhaul periods owing to the narrow space and significant dust inside the boiler. Therefore, it is essential to develop a safety monitoring system that is suitable for operating in this type of environment. In this study, we developed not only a worker three-dimensional (3D)-location monitoring system that can monitor and record the entry/exit of workers, their 3D-location, and fall accidents but also a method to secure the working environment and operation efficiency. This system comprises of a worker tag, which was equipped with an inertial measurement unit, a barometric pressure sensor, and a Bluetooth low energy (BLE), and the tags were given to each worker. In addition, the location of workers inside the boiler was measured using a pedestrian dead reckoning (PDR) method and BLE beacons. The location data of the workers tag were transmitted to the integrated database (DB) server through a gateway, and to the administrator monitoring system. The performance of the system was demonstrated inside an actual thermal power plant boiler, and the accuracy and reliability of the system were verified through a number of repeated tests. These results provide insights on designing a new system for monitoring enclosed spaces.