Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지

Fabrication of low power micro-heater for micro-gas sensor II. Characteristics of micro-gas sensor

  • Chung, Wan-Young (Dept. of Electronic Engineering, Semyung Univ.) ;
  • Lee, Sang-Moon (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Kang, Bong-Hwi (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Jang, Dong-Kun (Semiconductor R&D Center, KEC) ;
  • Lee, Duk-Dong (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Yamazoe, Noboru (Dept. of Materials Science and Technology, Kyushu University)
  • Published : 1997.05.31
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Abstract

A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/$Si_{3}N_{4}$(800nm/150nm) diaphragm. The proposed planar-type microsensor could be fabricated by simple silicon process using only 3 masks for photolithography process compared with 5 or 6 masks of the typical micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of the fabricated microheater. Although there are some discrepancy between the simulation result and the result from the fabricated microheater, the thermal simulation by FEM was proved to be an useful method to evaluate the thermal properties of microheater. The sensing characteristics of the fabricated microsensor with the planar-type heater were investigated also.

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