• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.658-662
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• 2000

In order to achieve systematical method for improving motion accuracy of hydrostatic table, an algorithm using finite element method is proposed in this paper. Quantification of averaging effect of oil film on motion error is performed theoretically by analysis on the relationship between spacial frequency of rail form error and motion error of table. Influences of film stiffness and pocket size on the motion error of table are also analyzed theoretically Validity of the algorithm is verified experimentally from the test on the motion error of table with three types of rail which have different form profile. Experimental results show that the algorithm is very effective to analyze theoretically the motion error of hydrostatic table.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.137-144
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• 2000

In order to achieve systematical method for improving motion accuracy of hydrostatic table, an algorithm using finite element method is proposed in this paper. Quantification of averaging effect of oil film on motion error is performed theoretically by analysis on the relationship between spacial frequency of rail form error and motion error of table. Influences of film stiffness and pocket size on the motion error of table are also analyzed theoretically. Validity of the algorithm is verified experimentally from the test on the motion error of table with three types of rail which have different form profile. Experimental results show that the algorithm is very effective to analyze theoretically the motion error of hydrostatic table.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.5
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.5
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• pp.64-71
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• 2002

A new model utilizing a transfer function was proposed in the previous paper fur analizing motion errors of hydrostatic tables. Validity of the proposed method was theoretically verified as the calculated motion errors were compared with the results by conventional multi pad method. In this paper, relationship between form error of rail and motion errors of hydrostatic table is analized theoretically in order to comprehand so-called ‘averaging effect of oil film’. Experiments on the motion errors of hydrostatic table is conducted with 3 different rails, and the results are compared with the results calculated by Transfer Function Method. The results show good agreement. From the results, it is verified that TFM is very effective to analize the motion errors of hydrostatic table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.454-458
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• 2001

A new model utilizing a transfer function was proposed in the previous paper for analizing motion errors of hydrostatic tables. Validity of the proposed method was theoretically verified as the calculated motion errors were compared with the results by conventional multi pad method. In this paper, relationship between form error of rail and motion errors of hydrostatic table is analized theoretically in order to comprehand so-called 'averaging effect of oil film'. Experiments on the motion errors of hydrostatic table is conducted with 3 different rails, and the results are compared with the results calculated by Transfer Function Method. The results show good agreement. From the results, it is verified that TFM is very effective to analize the motion errors of hydrostatic table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.425-428
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• 1997

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective lapping work to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13pm of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07pm of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by the unskilled person after he experienced a little of preliminary machining. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.380-384
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• 1997

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. Reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, correctwe machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysls method proposed in the previous paper. These processes can be rtcrated if the analized motion errors are worse than target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail after corrective machining are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm IS effective to acquire the corrective machming information to improve the accuracy of hydrostatic table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.250-256
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clarance of table is actively controlled corresponding to the amount of error with the nariable capillary,anmed as ACC. In previous paper,through the basic test, it was confirmed that by the use of ACC,the error motion within 2.7 .mu.m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the freqency bandwidth of 5.5Hz structurally. In this paper,we performed practital compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy,iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error,the linear and angular motion error are improved upto 0.25 .mu.m and 0.4arcsec,which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.