• Title/Summary/Keyword: TIO

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Deposition of PbTio3 thin films by reactive sputtering

  • Ahn, Y.S.;Lee, D.S.;Ahn, E.J.;Yoon, E.
    • Journal of Korean Vacuum Science & Technology
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    • v.3 no.2
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    • pp.126-129
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    • 1999
  • PbTio3 is a promising material with perovskite structure for pyroelectric sensor applications with its superior pyroelectric properties, low dielectric constants, and low piezoelectric constants. Growth of pyroelectric thin films in general, needs relatively higher temperatures than those of conventional Si semiconductor processing However, low growth temperature is advantageous for the device integration. We report the low temperature (350$^{\circ}C$) growth of PbTio3 thin films by 3-gun DC magnetron reactive sputtering. The effects of substrate temperature, Pb-flux, and total pressure on crystalinity and preferred orientation of PbTio3 thin films are reported.

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Characterizations of Characterizations of Tio2 thin films with atmosphere control of the RF magnetron sputtering (RF magnetron sputter의 분위기에 따른 Tio2 박막의 특성)

  • Park, Ju-Hoon;Kim, Bong-Soo;Kim, Byung-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.21 no.2
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    • pp.65-69
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    • 2011
  • The $Tio_2$ films were prepared on glass, silicon and quartz substrate at different temperature by radio frequency reactive magnetron sputtering under different flow ratios of Ar and O2 gases. The films were characterized by X-ray diffractometer (XRD), scanning electron microscope (SEM), atomic force microscope (AFM) and UV-VIS spectrophotometer. Only the anatase phase was observed in films and their diffaction peaks increased with temprature of substrate. The size of crystallites decreased with higher concentration of oxygen. Refractive index and optical absorption of thin films decreased with higher concentration of oxygen. The thin films which have good transmittance spectra and smooth surface, deposited in the sputtering ambient with 10 % of $O_2$ at the temperature from $400{\circ}C$ to $300{\circ}C$.

Study of Degradation of Bisphenol A with $TiO_2$ Powder in CPC System (CPC (Compound Parabolic Collector) 내 이산화티탄을 이용한 비스페놀 A (Bisphenol A)의 분해에 관한 연구)

  • Hwang, An-Na;Park, Myung-Hee;Lim, Beom-Guk;Khim, Jee-Hyeong
    • Journal of the Korean Society of Hazard Mitigation
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    • v.11 no.1
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    • pp.107-112
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    • 2011
  • In this study, photocatalytic degradation and mineralization of bisphenol A (BPA), which has been listed as one of endocrine disruptors, were carried out in the CPC system using $Tio_2$ slurry and UVA irradiation. The degradation efficiency has been investigated under the controlled parameters including initial concentration (5, 10, 20 mg/L), dosage of $Tio_2$ (0.1, 0.5, 1.0 g/L), UVA power (0, 80, 120 W) and temperature (0, 20, 30). At 10mg/L of initial concentration, BPA was degraded above 80% after 10min, BPA were degraded 97% and 49% at 20 mg/L and 30 mg/L, respectively. At $Tio_2$ dosage was 0.1 and 0.5 g/L, the degradations of BPA showed similar trend and were about 70% after 1 hr, and the degradation of BPA was above 80% after 30 min at 1 g/L of $Tio_2$ dosage. The increase of degradation seem to be due to the increase in the total surface area, namely number of active sites, available for the photocatalytic reaction as the dosage of photocatalyst increased. When the UVA power was 120 W, BPA was degraded rapidly above 60% after 10min of reaction time. To investigate the effect of temperature, carried out experiment controlled temperature, there were no significant differences depending on the temperature. After 1hr, the degradation of BPA were 46%, 67%, and 69% at 10, 20 and $30^{\circ}C$.

Effect of Rapid Thermal Annealing on the Ti doped In2O3 Films Grown by Linear Facing Target Sputtering

  • Seo, Ki-Won;Kim, Han-Ki
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.342.1-342.1
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    • 2014
  • The electrical, optical and structural properties of Ti doped $In_2O_3$ (TIO) ohmic contacts to p-type GaN were investigated using linear facing target sputtering (LFTS) system. Sheet resistance and resistivity of TIO films are decreased with increasing rapid thermal annealing (RTA) temperature. Although the $400^{\circ}C$ and $500^{\circ}C$ annealed samples showed rectifying behavior, the $600^{\circ}C$ and $700^{\circ}C$ annealed samples showed linear I-V characteristics indicative of the formation of an ohmic contact between TIO and p-GaN. The annealing of the contact at $700^{\circ}C$ resulted in the lowest specific contact resistivity of $9.5{\times}10^{-4}{\Omega}cm^2$. Based on XPS depth profiling and synchrotron X-ray scattering analysis, we suggested a possible mechanism to explain the annealing dependence of the properties of TIO layer on rapid thermal annealing temperature.

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Influence of Deposition Rate on the Optoelectrical Properties of TIO Thin Films (증착율 변화에 따른 TIO 박막의 전기적, 광학적 특성 변화)

  • Moon, Hyun-Joo;Kim, Daeil
    • Journal of the Korean Society for Heat Treatment
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    • v.29 no.2
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    • pp.62-65
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    • 2016
  • TIO thin films were deposited on the poly-carbonate substrates with RF magnetron sputtering under different sputtering power condition to investigate the influence of deposition rate on the electrical and optical properties of the films. Although, all films have the similar carrier concentration, the films prepared at a lower deposition rate of 4 nm/min show a higher mobility of $5.96cm^2\;V^{-1}S^{-1}$ due to the low surface roughness. In addition, optical transmittance is also influenced by a deposition rate. Based on the figure of merit, it can be concluded that the lower deposition rate effectively enhances the opto-electrical performance of IGZO films for use as transparent conducting oxides in flexible display applications.

Influence of Rapid Thermal Annealing on the Opto-Electrical Performance of Ti-doped Indium Oxide Thin Films

  • Choe, Su-Hyeon;Kim, Daeil
    • Journal of the Korean institute of surface engineering
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    • v.52 no.6
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    • pp.306-309
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    • 2019
  • Titanium (Ti) doped indium oxide (In2O3) films were deposited on glass substrates by RF magnetron sputtering and the films were rapid thermal annealed at 100, 200, and 300℃, respectively to investigate the influence of the rapid annealing on the opto-electrical performance of the films. The grain size of In2O3 (222) plane increased with annealing temperatures and their electrical resistivity decreased to as low as 8.86×10-4 Ωcm at 300℃. The visible transmittance also improved from 77.1 to 79.5% when the annealing temperature increased. The optical band gap of the TIO films shifted from 4.010 to 4.087 eV with increases in annealing temperature from room temperature to 300℃. The figure of merit shows that the TIO films annealed at 300℃ had better optical and electrical performance than the other films prepared using lower-temperature or no annealing.

Direct Switch from Tiotropium to Indacaterol/Glycopyrronium in Chronic Obstructive Pulmonary Disease Patients in Korea

  • Lee, Sang Haak;Rhee, Chin Kook;Yoo, Kwangha;Park, Jeong Woong;Yong, Suk Joong;Kim, Jusang;Lee, Taehoon;Lim, Seong Yong;Lee, Ji-Hyun;Park, Hye Yun;Moon, Minyoung;Jung, Ki-Suck
    • Tuberculosis and Respiratory Diseases
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    • v.84 no.2
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    • pp.96-104
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    • 2021
  • Background: Many chronic obstructive pulmonary disease (COPD) patients receiving monotherapy continue to experience symptoms, exacerbations and poor quality of life. This study aimed to assess the efficacy and safety of direct switch from once-daily tiotropium (TIO) 18 ㎍ to indacaterol/glycopyrronium (IND/GLY) 110/50 ㎍ once daily in COPD patients in Korea. Methods: This was a randomized, open-label, parallel group, 12-week trial in mild-to-moderate COPD patients who received TIO 18 ㎍ once daily for ≥12 weeks prior to study initiation. Patients aged ≥40 years, with predicted post-bronchodilator forced expiratory volume in 1 second (FEV1) ≥50%, post-bronchodilator FEV1/forced vital capacity <0.7 and smoking history of ≥10 pack-years were included. Eligible patients were randomized in a 1:1 ratio to either IND/GLY or TIO. The primary objective was to demonstrate superiority of IND/GLY over TIO in pre-dose trough FEV1 at week 12. Secondary endpoints included transition dyspnea index (TDI) focal score, COPD assessment test (CAT) total score, and rescue medication use following the 12-week treatment, and safety assessment. Results: Of the 442 patients screened, 379 were randomized and 347 completed the study. IND/GLY demonstrated superiority in pre-dose trough FEV1 versus TIO at week 12 (least squares mean treatment difference [Δ], 50 mL; p=0.013). Also, numerical improvements were observed with IND/GLY in the TDI focal score (Δ, 0.31), CAT total score (Δ, -0.81), and rescue medication use (Δ, -0.09 puffs/day). Both treatments were well tolerated by patients. Conclusion: A direct switch from TIO to IND/GLY provided improvements in lung function and other patient-reported outcomes with an acceptable safety profile in patients with mild-to-moderate airflow limitation.

Comparison for the Effects of Triple Therapy with Salmeterol/Fluticasone Propionate and Tiotropium Bromide versus Individual Components in Patients of Severe COPD Combined with Bronchial Hyperresponsiveness (기관지 과민성이 동반된 중증 만성 폐쇄성 폐질환 환자에 대한 Salmeterol/Fluticasone Propionate와 Tiotropium Bromide 병합 요법과 단독 요법 치료효과 비교)

  • Sohn, Ji Youn;Kim, So Ri;Park, Seoung Ju;Lee, Heung Bum;Lee, Yong Chul;Rhee, Yang Keun
    • Tuberculosis and Respiratory Diseases
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    • v.67 no.6
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    • pp.536-544
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    • 2009
  • Background: A combination of salmeterol and fluticasone propionate (SFC) and tiotropium bromide (TIO) is commonly prescribed for COPD patients but there is little data on their effectiveness, particularly in COPD patients with bronchial hyperresponsiveness. This study compared the spirometric improvement based on the change in $FEV_1$, $FEV_1$/FVC, and IC as well as the clinical outcomes of the therapeutic strategies with SFC and TIO versus the individual components in patients with severe COPD and bronchial hyperresponsiveness. Methods: This study examined the spirometric data and clinical outcomes of 214 patients with COPD and hyperresponsiveness, who were divided into three groups according to the therapeutic regimen (TIO only, SFC only, and a triple therapy regimen). Results: All regimen groups showed early improvement in the $FEV_1$ and IC (at 3- and 6 months after treatment). However, long-term beneficial effects were observed only in the SFC group (at 24 months after treatment). However, these beneficial effects decreased after a 36-month follow up. In all spirometric results, the 12-, 24-, and 36-months data showed a similar degree of improvement in the three groups. The triple therapy group showed higher St. George's Respiratory Questionnaire scores and lower acute exacerbations and hospitalization. Conclusion: SFC can be a more important component in the pharmacological treatment of severe COPD patients with hyperresponsiveness than TIO, particularly in the spirometric and clinical outcomes.

Two-wave mixing in Ce:$BaTIO_3$, Mgo:$LiNbO_3$ and :$LiNbO_3$ crystals (Ce:$BaTIO_3$, Mgo:$LiNbO_3$와 Fe:$LiNbO_3$ 결정에서의 이광파혼합 실험)

  • 주원제;박주형;곽장만;오차환;송석호;한양규;김필수
    • Korean Journal of Optics and Photonics
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    • v.9 no.6
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    • pp.423-427
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    • 1998
  • Two wave mixing experiments in $LiNbO_3$, $BaTiO_3$ are carried out, and the characteristics as optical information processing device are investigated. Examined crystals are commonly used ones, such as 0.03% mol Ce-doped $BaTiO_3$, 0.03% mol Fe-doped $LiNbO_3$, and 6% mol MgO-doped $LiNbO_3$. $Ar^+$ ion laser is used as the writing beam, and He-Ne Laser is used as the reading beam. The recording-decay and erasing characteristics of diffraction gratings, the time constants, and also the angular selectivities are measured for each crystals and compared.

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Strength properties of Cement Mortar by the Nano admixture of dry process and wet process (건식 및 습식 나노 혼화재를 사용한 시멘트 모르타르의 강도 특성)

  • Kim, Yeon-Hee;Choi, Eung-Kyoo;Park, Jong-Keun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.3
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    • pp.1452-1457
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    • 2011
  • Strength properties of cement mortar was carried out silica fume(SF) and Titanium Dioxide($TIO_2$) by nano admixture of dry process and wet process. Experimental parameters were Nano admixture as the dry process and wet process 5, 10, 15 or 20%. As a result, strength properties of cement mortar by silica fume(SF) and Titanium Dioxide($TIO_2$) were similar and in a comparative experiment of the dry process and wet process Nano admixture using wet process Nano admixture showed a greater strength properties.