Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2014.02a
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- Pages.342.1-342.1
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- 2014
Effect of Rapid Thermal Annealing on the Ti doped In2O3 Films Grown by Linear Facing Target Sputtering
- Seo, Ki-Won (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University) ;
- Kim, Han-Ki (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University)
- Published : 2014.02.10
Abstract
The electrical, optical and structural properties of Ti doped