• Title/Summary/Keyword: TEM image

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Effect of RF Etch Conditions on Metal Contact Resistance (금속 접촉 저항에 대한 RF 식각 조건의 영향)

  • Kim, Do-U;Jeong, Cheol-Mo;Gu, Gyeong-Wan;Wang, Jin-Seok
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.4
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    • pp.147-151
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    • 2002
  • The resistances of metal2 contact to metall and poly Si are checked by various RF etch conditions in terms of pre-cleaning. The changes of resistance are evaluated by statistical analysis method(SAS) for the AC bias power, coil power and RF target. The contact area on poly Si is shown by TEM image and the distributions of contact resistance according to ar etch target and RTP are investigated. The RTP groups have larger variations than normal RF etch targets. When the RF etch target becomes lower and coil power becomes higher, the resistances of metal2 contact to metals and poly Si have lower contact resistance. But the condition of AC bias power did not satisfied low meta12 contacts resistance for metall and poly Si simultaneously. The R-square of ststistical analysis was 0.98 for resistances of meta12 contact to poly Si and 0.87 for resistances of meta12 contact to metall.

Synthesis and Catalytic Applications of Ruthenium(0) Nanoparticles in Click Chemistry

  • Kumar, Avvaru Praveen;Baek, Min-Wook;Sridhar, Chirumarry;Kumar, Begari Prem;Lee, Yong-Ill
    • Bulletin of the Korean Chemical Society
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    • v.35 no.4
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    • pp.1144-1148
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    • 2014
  • Here we report a facile synthesis of ruthenium (Ru) Nanoparticles (NPs) by chemical co-precipitation method. The calcination of ruthenium hydroxide samples at $500^{\circ}C$ under hydrogen atmosphere lead to the formation of $Ru^0$ NPs. The size and aggregation of Ru NPs depends on the pH of the medium, and type of surfactant and its concentration. The X-ray diffraction (XRD), scanning electron microscope (SEM) and transmission electron microscope image (TEM) analyses of particles indicated the formation of $Ru^0$ NPs, and have 10 to 20 nm sizes. As-synthesized $Ru^0$ NPs are characterized and investigated their catalytic ability in click chemistry (azidealkyne cycloaddition reactions), showing good results in terms of reactivity. Interestingly, small structural differences in triazines influence the catalytic activity of $Ru^0$ nanocatalysts. Click chemistry has recently emerged to become one of the most powerful tools in drug discovery, chemical biology, proteomics, medical sciences and nanotechnology/nanomedicine. In addition, preliminary tests of recycling showed good results with neither loss of activity or significant precipitation.

A Novel Bottom-Gate Poly-Si Thin Film Transistors with High ON/OFF Current Ratio (ON/OFF 전류비를 향상시킨 새로운 bottom-gate 구조의 다결정 실리콘 박막 트랜지스터)

  • Jeon, Jae-Hong;Choe, Gwon-Yeong;Park, Gi-Chan;Han, Min-Gu
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.5
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    • pp.315-318
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    • 1999
  • We have proposed and fabricated the new bottom-gated polycrystalline silicon (poly-Si) thin film transistor (TFT) with a partial amorphous-Si region by employing the selective laser annealing. The channel layer of the proposed TFTs is composed of poly-Si region in the center and a-Si region in the edge. The TEM image shows that the local a-Si region is successfully fabricated by the effective cut out of the incident laser light in the upper a-Si layer. Our experimental results show that the ON/OFF current ratio is increased significantly by more than three orders in the new poly-Si TFT compared with conventional poly-Si TFT. The leakage current is decreased significantly due to the highly resistive a-Si re TFTs while the ON-series resistance of the local a-Si is reduced significantly due to the considerable inducement of electron carriers by the positive gate bias, so that the ON-current is not decreased much.

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Preparation and Characterization of Surface Capped CdSe Nanoparticles from an Aqueous Solution (수용액으로부터 표면 수식된 CdSe 나노 입자의 제조 및 특성)

  • Kim, Shin-Ho;Lee, Yoon-Bok;Kim, Yong-Jin;Kim, Yang-Do;Kim, In-Bae
    • Korean Journal of Materials Research
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    • v.16 no.11
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    • pp.663-667
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    • 2006
  • CTAB(cetyltrimethylammonium bromide)-capped CdSe nanoparticles were prepared by using a 4 : 1(v/v) distilled water-isopropyl alcohol mixture. The cadmium chloride and sodium selenosulfate were used as the cadmium and selenium source. By the analysis of XRD and XPS, the resultant particle was confirmed to be cubic CdSe phase. TEM image showed CdSe nanoparticles with empty core. The CTAB-capped sample showed an maximum absorption at 418nm, blue-shifting compared with bulk CdSe, which indicated stronger quantum confinement effect compared with uncapped sample. From FT-IR analysis, it was found that the presence of the new peaks in the $850{\sim}1250cm^{-1}$ range indicated the existence of chemical bonding between CTAB and surface of CdSe nanoparticles. Also TG analysis indicated that there were two weight-loss steps for the CTAB-capped CdSe nanoparticles. It was suggested that CTAB played a significant role in protecting CdSe nanoparticles.

The Effects of Additional Gases(C,H,O) on Adhesive strength Ti$_{x}$N Films Prepared by the DC Magetron Suttering Method (DC Magetron Suttering법으로 제작한 Ti$_{x}$N 박막의 밀착력에 미치는 첨가원소(C,H,O))

  • 김학동;조성식
    • Journal of the Korean institute of surface engineering
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    • v.31 no.3
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    • pp.142-150
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    • 1998
  • Stainless steel is being used widely for various purposes due to its good corrosion resistance. There has been much research to produce colored stainless steel by several methods such as anodizing and ion plating. In this experiment, we coated TiN(C,O,H)films SUS304 substraate with the DC magnetron spttering system made by Leybold Heraeus and studied the interlater structure and abhesive strength of the films as a function of additional gases, acetylene, hydrogen and oxygen. When the acetylene gas was added into the chamber, the specimen with the interlayer phase had good adhesion due to the toughness of the $\gamma'-Fe_4N$ plase induced from a solid solution of carbon atoms, while low adhesion appeared on the specimen of the non interlayer phase. The formation of the interlayer phase($\gamma'-Fe_4N$) was due to hydrogen embrittlement and internal stress induced by $\gamma'-Fe_4N$ formation in the interlayer. We could fine the interlayer phase ($\gamma'-Fe_4N$) at the interface between the film and the substrate of the TEM image when $\gamma'-Fe_4N$ was detected by the X-ray duffraction metheod.

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270-W 15-kHz MOPA System Based on Side-pumped Rod-type Nd:YAG Gain Modules

  • Cha, Yong-Ho;Yang, Myoung-Yerl;Ko, Kwang-Hoon;Lim, Gwon;Han, Jae-Min;Park, Hyun-Min;Kim, Taek-Soo;Roh, Si-Pyo;Jeong, Do-Young
    • Journal of the Optical Society of Korea
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    • v.12 no.4
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    • pp.298-302
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    • 2008
  • We have developed a 270-W 15-kHz MOPA system based on side-pumped rod-type Nd:YAG gain modules. The master oscillator is a 3-W 15-kHz $TEM_{00}$ $Nd:YVO_4$ laser with a pulse duration of 30 ns. To preserve the high beam quality during the amplification, we use image relay and polarization rotation which can simultaneously compensate for thermal lensing and thermal birefringence generated in the rod-type gain modules. After the amplification to 270 W with six rod-type gain modules, the beam quality factor ($M^2$) of the amplified laser beam is 5-10, and the pulse duration is maintained at 30 ns.

Influence of Zr Addition on TiB2 Modification and Grain Size in Aluminium Alloys (알루미늄 합금에서 Zr첨가가 TiB2의 변형과 결정립크기에 미치는 영향)

  • Kang, Won-Duck;Park, Hyun Gyoon
    • Korean Journal of Metals and Materials
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    • v.49 no.8
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    • pp.619-627
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    • 2011
  • The poisoning effect of Zr in aluminum alloys was investigated by analyzing the filtered cakes of aluminum alloy melt taken with the $Prefil^{(R)}$ footprinter through a variety of analytic instruments, SEM/EDX, Auger, and TEM. Experimental results indicated that the morphology and chemical composition of the aluminum alloys were not modified with the addition of Zr, which is to previous belief that Zr poisoning is caused by modification of $(Ti_{1-x}Zr_x)Al_3$. On the other hand, $TiAl_3$ surroundig $TiB_2$ particles was modified and its lattice parameter was more mismatched by increasing Zr content, leading to less nucleation rate. This is also supported by the observation that the poisoning effect is reduced when Ti is added, resulting in a lower content ratio of Zr to Ti. These results suggest that extra Ti should be added to eliminate the poisoning effect of Zr in aluminum alloys containing Zr.

Bi-Te Core/Shell Nanowires Synthesis Based on On-Film Formation of Nanowires Method for Thermoelectric Applications (압축응력에 의한 박막 위 나노선 성장법을 이용한 Bi-Te 코어/쉘 열전 나노선 합성)

  • Kang, Joohoon;Ham, Jinhee;Roh, Jong Wook;Noh, Jin-Seo;Lee, Wooyoung
    • Korean Journal of Metals and Materials
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    • v.48 no.5
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    • pp.445-448
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    • 2010
  • For an enhanced thermoelectric performance, one-dimensional heterostructure nanowires were created that consisted of aBi core and Te shell. The structure was fabricated by depositing Te in-situ onto a Bi nanowire grown by our unique OFF-ON (on-film formation of nanowires) method. After examining a cross-sectional TEM image, it was found that diffusive interface was formed between Bi and Te. Selected area electron diffraction revealed that the crystallinity of the Te shell was some what lower compared to the highly single-crystalline Bi core. The Bi-Te core/shell nanowires can be a smart structure that suppresses phonon transport by several scattering mechanisms, making the OFF-ON method the simplest way to realize that structure.

Silver Nanoparticles Enhanced Chemiluminescence of Luminol-KIO4 System for the Determination of Mandelic Acid (Mandelic Acid 정량을 위한 은 나노입자에 의해 증가된 화학발광분석법)

  • Alam, MD R-Mahmnur;Kamruzzaman, Mohammad;Kim, So Yeon;Jo, Hae Jin;Lee, Sang Hak;Kim, Young Ho;Choi, Jong Ha
    • Applied Chemistry
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    • v.15 no.1
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    • pp.21-24
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    • 2011
  • A sensitive silver nanoparticles (Ag NPs) enhanced chemiluminescence (CL) method is reported for the determination of mandelic acid (MA). This method is based on the luminol-KIO4 system catalyzed by Ag NPs to produce CL spectra. Prepared Ag NPs were characterized by UV-visible spectra and TEM image. Under optimal condition, CL spectra of the system were responded linearly with the concentration of MA in the range of 2.5×10-9 to 2.0×10-8 mol L-1 (r=0.9989) with a detection limit of 1.2×10-10 mol L-1. The relative standard deviation of 1.0×10-7 mol L-1 MA was found 1.45 (n=9).

Applications of the Scanning Electron Microscope (주사형(走査型) 전자현미경(電子顯微鏡)의 응용분야(應用分野))

  • Kim, Yong-Nak
    • Applied Microscopy
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    • v.2 no.1
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    • pp.39-46
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    • 1972
  • There are many kinds of microscopes suitable for general studies; optical microscopes(OM), conventional transmission electron microscopes (TEM), and scanning electron microscopes(SEM). The optical microscopes and the conventional transmission electron microscopes are very familiar. The images of these microscopes are directly formed on an image plane with one or more image forming lenses. On the other hand, the image of the scanning electron microscope is formed on a fluorescent screen of a cathode ray tube using a scanning system similar to television technique. In this paper, the features and some applications of the scanning electron microscope will be discussed briefly. The recently available scanning electron microscope, combining a resolution of about $200{\AA}$ with great depth of field, is favorable when compared to the replica technique. It avoids the problem of specimen damage and the introduction of artifacts. In addition, it permits the examination of many samples that can not be replicated, and provides a broader range of information. The scanning electron microscope has found application in diverse fields of study including biology, chemistry, materials science, semiconductor technology, and many others. In scanning electron microscopy, the secondary electron method. the backscattererd electron method, and the electromotive force method are most widely used, and the transmitted electron method will become more useful. Change-over of magnification can be easily done by controlling the scanning width of the electron probe. It is possible. to continuously vary the magnification over the range from 100 times to 1.00,000 times without readjustment of focusing. Conclusion: With the development of a scanning. electron microscope, it is now possible to observe almost all-information produced through interactions between substances and electrons in the form of image. When the probe is properly focused on the specimen, changing magnification of specimen orientation does not require any change in focus. This is quite different from the conventional transmission electron microscope. It is worthwhile to note that the typical probe currents of $10^{-10}$ to $10^{-12}\;{\AA}$ are for below the $10^{-5}$ to $10^{-7}\;{\AA}$ of a conventional. transmission microscope. This reduces specimen contamination and specimen damage due to heatings. Outstanding features of the scanning electron microscope include the 'stereoscopic observation of a bulky or fiber specimen in high resolution' and 'observation of potential distribution and electromotive force in semiconductor devices'.

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