• Title/Summary/Keyword: TEM Journal

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Effects of Cobalt Ohmic Layer on Contact Resistance (코발트 오믹층의 적용에 의한 콘택저항 변화)

  • 정성희;송오성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.5
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    • pp.390-396
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    • 2003
  • As the design rule of device continued to shrink, the contact resistance in small contact size became important. Although the conventional TiN/Ti structure as a ohmic layer has been widely used, we propose a new TiN/Co film structure. We characterized a contact resistance by using a chain pattern and a KELVIN pattern, and a leakage current determined by current-voltage measurements. Moreover, the microstructure of TiN/ Ti/ silicide/n$\^$+/ contact was investigated by a cross-sectional transmission electron microscope (TEM). The contact resistance by the Co ohmic layer showed the decrease of 26 % compared to that of a Ti ohmic layer in the chain resistance, and 50 % in KELYIN resistance, respectively. A Co ohmic layer shows enough ohmic behaviors comparable to the Ti ohmic layer, while higher leakage currents in wide area pattern than Ti ohmic layer. We confirmed that an uniform silicide thickness and a good interface roughness were able to be achieved in a CoSi$_2$ Process formed on a n$\^$+/ silicon junction from TEM images.

Synthesis and Analysis of Zn Nanopowders by Wire Explosion In Liquids (액중 전기폭발법을 이용한 아연 나노분말 제조 및 분석)

  • Cho, Chu-Hyun;Kim, Doo-Hun;Choi, Si-Young;Kang, Chung-Il;Moon, Gap-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.10
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    • pp.824-829
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    • 2012
  • Zn wires have been electrically exploded in methanol or distilled water using the pulsed power technologies. The nanopowders produced by the explosions have been observed by using SEM and TEM, and analyzed its phase by using EDS and XRD. The nanopowders produced in distilled water showed ZnO phase only. On the other hands, the nanopowder produced in methanol showed mixed phases with Zn and ZnO. The HR-TEM images of the nanopowders produced in methanol showed that the some particles have been coated with carbon like materials. It is considered that the carbon coatings could be depended on the positions of the particles during the plasma state formed by explosion.

Synthesis of Platinum Nanoparticles by Liquid Phase Reduction (액상환원공정을 이용한 백금 나노 입자의 합성)

  • Lee, Jin-Ho;Kim, Se-Hoon;Kim, Jin-Woo;Lee, Min-Ha;Kim, Young-Do
    • Journal of Powder Materials
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    • v.19 no.1
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    • pp.60-66
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    • 2012
  • In this study, Platinum(Pt) nanoparticles were synthesized by using polyol process which is one of the liquid phase reduction methods. Dihydrogen hexachloroplatinate (IV) hexahydrate $(H_2PtCl_6{\cdot}6H_2O)$, as a precursor, was dissolved in ethylene glycol and silver nitrate ($AgNO_3$) was added as metal salt for shape control of Pt particle. Also, polyvinylpyrrolidone (PVP), as capping agent, was added to reduce the size of particle and to separate the particles. The size of Pt nanoparticles was evaluated particle size analyzer (PSA). The size and morphology of Pt nanoparticles were observed by transmission electron microscopy (TEM) and high resolution TEM (HRTEM). Synthesized Pt nanoparticles were studied with varying time and temperature of polyol process. Pt nanoparticles have been successfully synthesized with controlled sizes in the range 5-10 and 20-40 nm with cube and multiple-cube shapes.

Characterization of Mechanical Properties in the Heat Affected Zones of Alloy 82/182 Dissimilar Metal Weld Joint (Alloy 82/182 이종금속 용접부 열영향부의 계계적물성치 파악)

  • Kim, Jin-Weon;Kim, Jong-Sung;Lee, Kyoung-Soo
    • Journal of the Korean Society of Safety
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    • v.23 no.6
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    • pp.28-33
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    • 2008
  • This paper presents the characteristics of mechanical properties within the heat affected zones(HAZs) of dissimilar metal weld joint between SA508 Gr.1a and F3l6 stainless steel(SS) with Alloy 82/182 filler metal. Tensile tests were performed using small-size specimens taken from the heat affected regions close to both fusion lines of weld, and the micro-structures were examined using optical microscope(OM) and transmission microscope(TEM). The results showed that significant gradients of the yield stress(YS), ultimate tensile stress(UTS), and elongations were observed within the HAZ of SA508 Gr.1a. This was attributed to the different microstructures within the HAZ developed during the welding process. In the HAZ of F316 SS, however, the welding effect dominated the YS and elongation rather than UTS. TEM micrographs demonstrated these characteristics of the HAZ of F316 SS was associated with a dislocation-induced strain hardening.

Optical Nonlinearity in Laser Heated Si (온도변화에 따른 Si의 비선형 광학적 성질)

  • 이상훈;이범구
    • Korean Journal of Optics and Photonics
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    • v.1 no.2
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    • pp.135-141
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    • 1990
  • Optical nonlinearity of laser heated Si with thickness of 160$\mu$m is investigated by pump-probe method. Si is heated by pdsed Nd:YAG laser of $TEM_{00}$-mode with pulse duration of 180$\mu$sec. Temperature change is monitored by observing transmittance change of probe light whose wavelength lies near band gap of Si. It is found that temperature rise is linearly proportional to incident laser intensity and the maximum temperat~re increment is measured to be $16^{\circ}C$ for the maximum incident intensity of 25KW/$\textrm{cm}^2$. From these results, the third order nonlinear susceptibility .d3) at the wavelength of 1.06$\mu$mis estimated to be $6.6\times10^{-5}$esu due to laser heating.

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Joint properties and Interface Analysis of Friction Stir Welded Dissimilar Materials between Austenite Stainless Steel and 6013 Al Alloy (마찰교반접합한 오스테나이트계 스테인리스강과 6013알루미늄 합금 이종 접합부의 접합 특성 및 계면 성질)

  • Lee, Won-Bae;Biallas, gehard;Schmuecker, Martin;Jung, Seung-Boo
    • Journal of Welding and Joining
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    • v.23 no.5
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    • pp.61-68
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    • 2005
  • Dissimilar joining of Al 6013-T4 alloys and austenite stainless steel was carried out using friction stir welding technique. Microstructures near the weld zone and mechanical properties of the joint have been investigated. Microstructures in the stainless steel side were composed of the heat affected zone and the plastically deformed zone, while those in the Al alloy side were composed of the recrystallized zone including stainless steel particles, the thermo-mechanically affected zone and the heat affected zone. TEM micrographs revealed that the interface region was composed of the mixed layers of elongated stainless steel and ultra-fine grained Al alloy with lamella structure and intermetallic compound layer. Thickness of the intermetallic layer was approximately 300nm and was identified as the A14Fe with hexagonal close packed structure. Mechanical properties, such as tensile and fatigue strengths were lower than those of 6013 Al alloy base metal, because tool inserting location was deviated to Al alloy from the butt line, which resulted in the lack of the stirring.

Annealing Characteristics of Oxygen Free Copper Severely Deformed by Accumulative Roll-Bonding Process (ARB법에 의해 강소성가공된 무산소동의 어닐링 특성)

  • Lee Seong-Hee;Cho Jun;Lee Chung-Hyo;Han Seung-Zun;Lim Cha-Yong
    • Korean Journal of Materials Research
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    • v.15 no.9
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    • pp.555-559
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    • 2005
  • An oxygen free copper severely-deformed by eight cycles (an equivalent strain of $\~6.4$) of accumulative roll-bonding (ARB) was annealed at various temperatures ranging from 100 to $300^{\circ}C$. The annealed copper was characterized by transmission electron microscopy (TEM) and tensile & hardness test. TEM observation revealed that the ultrafine grains developed by the ARB still remained up to $150^{\circ}C$, however above $200^{\circ}C$ they were replaced by equiaxed and coarse grains due to an occurrence of the static recrystallization. Tensile strength and hardness of the copper decreased slightly with the annealing temperature up to $150^{\circ}C$, however they dropped largely above $200^{\circ}C$. Annealing characteristics of the copper were compared with those of a commercially pure aluminum processed by ARB and subsequently annealed.

Crystal Structure and Morphology of Nitride Precipitates in TiAl (TiAl에 석출한 질화물의 결정구조와 형태)

  • Han, Chang-Suk;Koo, Kyung-Wan
    • Korean Journal of Materials Research
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    • v.18 no.1
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    • pp.51-56
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    • 2008
  • The crystal structures and morphologies of precipitates in $L1_0$-ordered TiAl intermetallics containing nitrogen were investigated by transmission electron microscopy (TEM). Under aging at an approximate temperature of 1073 K after quenching from 1423 K, TiAl hardens appreciably due to the nitride precipitation. TEM observations revealed that needle-like precipitates, which lie only in one direction parallel to the [001] axis of the $L1_0$-TiAl matrix, appear in the matrix preferentially at the dislocations. Selected area electron diffraction (SAED) pattern analyses showed that the needle-shaped precipitate is perovskite-type $Ti_3AlN$ (P-phase). The orientation relationship between the P-phase and the $L1_0$-TiAl matrix was found to be $(001)_P//(001)_{TiAl}\;and\;[010]_P//[010]_{TiAl}$. By aging at higher temperatures or for longer periods at 1073 K, plate-like precipitates of $Ti_2AlN$ (H-phase) with a hexagonal structure formed on the {111} planes of the $L1_0$-TiAl matrix. The orientation relationship between the $Ti_2AlN$ and the $L1_0$-TiAl matrix is $(0001)_H//(111)_{TiAl}\;and\;_H//_{TiAl}$.

Fabrication of piezoelectric PZT thick film by aerosol deposition method (에어로졸 증착법에 의한 압전 PZT 후막의 제조)

  • Kim, Ki-Hoon;Bang, Kook-Soo;Park, Chan
    • Journal of Ocean Engineering and Technology
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    • v.27 no.6
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    • pp.95-99
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    • 2013
  • Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.

Development of Sustainable Releasing Micro Formulation System using γ-Irradiation Technique to Control Phytophthora Blight Disease

  • Park, Hae-Jun;Kim, Hwa-Jung;Kim, Dong Ho
    • Journal of Radiation Industry
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    • v.5 no.4
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    • pp.305-311
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    • 2011
  • We introduced a novel sustainable slow-releasing agrochemical formulation, a biopolymer bound to silica, for controlling plant diseases. The formulation was obtained through the following process. Curdlan, sodium silicate ($Na_2SiO_3$) and isopropyl alcohol were dissolved in DDW (Deionized-distilled water). The resultant solution was then irradiated using a $^{60}Co$ ${\gamma}$-irradiator (150 TBq of capacity; ACEL, Canada) at KAERI. The resultant solution was treated with phosphorous acid ($H_3PO_3$). Finally, we obtained a novel biopolymer-silica microsized formulation containing phosphorous acid ($H_3PO_3$) from the solution. The morphology of the complex was characterized using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). SEM and TEM images revealed that the curdlan-silica formulation has a particle size ranging from 1 to $3{\mu}m$ with high stability. We also detected that $H_3PO_3$ was distributed within the formulation through energy dispersive X-ray spectroscopy (EDX) analysis. $H_3PO_3$ was sustain-released from the formulation in water. Based on our results, it seems effectively that one or two applications of the formulation during a cropping season will assist in controlling various plant diseases.