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Optimization of Etching Profile in Deep-Reactive-Ion Etching for MEMS Processes of Sensors

  • Yang, Chung Mo;Kim, Hee Yeoun;Park, Jae Hong
    • Journal of Sensor Science and Technology
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    • v.24 no.1
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    • pp.10-14
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    • 2015
  • This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

EXISTENCE OF POLYNOMIAL INTEGRATING FACTORS

  • Stallworth, Daniel T.;Roush, Fred W.
    • Kyungpook Mathematical Journal
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    • v.28 no.2
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    • pp.185-196
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    • 1988
  • We study existence of polynomial integrating factors and solutions F(x, y)=c of first order nonlinear differential equations. We characterize the homogeneous case, and give algorithms for finding existence of and a basis for polynomial solutions of linear difference and differential equations and rational solutions or linear differential equations with polynomial coefficients. We relate singularities to nature of the solution. Solution of differential equations in closed form to some degree might be called more an art than a science: The investigator can try a number of methods and for a number of classes of equations these methods always work. In particular integrating factors are tricky to find. An analogous but simpler situation exists for integrating inclosed form, where for instance there exists a criterion for when an exponential integral can be found in closed form. In this paper we make a beginning in several directions on these problems, for 2 variable ordinary differential equations. The case of exact differentials reduces immediately to quadrature. The next step is perhaps that of a polynomial integrating factor, our main study. Here we are able to provide necessary conditions based on related homogeneous equations which probably suffice to decide existence in most cases. As part of our investigations we provide complete algorithms for existence of and finding a basis for polynomial solutions of linear differential and difference equations with polynomial coefficients, also rational solutions for such differential equations. Our goal would be a method for decidability of whether any differential equation Mdx+Mdy=0 with polynomial M, N has algebraic solutions(or an undecidability proof). We reduce the question of all solutions algebraic to singularities but have not yet found a definite procedure to find their type. We begin with general results on the set of all polynomial solutions and integrating factors. Consider a differential equation Mdx+Ndy where M, N are nonreal polynomials in x, y with no common factor. When does there exist an integrating factor u which is (i) polynomial (ii) rational? In case (i) the solution F(x, y)=c will be a polynomial. We assume all functions here are complex analytic polynomial in some open set.

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A New Sender-Side Public-Key Deniable Encryption Scheme with Fast Decryption

  • Barakat, Tamer Mohamed
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • v.8 no.9
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    • pp.3231-3249
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    • 2014
  • Deniable encryption, introduced in 1997 by Canetti, Dwork, Naor, and Ostrovsky, guarantees that the sender or the receiver of a secret message is able to "fake" the message encrypted in a specific ciphertext in the presence of a coercing adversary, without the adversary detecting that he was not given the real message. Sender - side deniable encryption scheme is considered to be one of the classification of deniable encryption technique which defined as resilient against coercing the sender. M. H. Ibrahim presented a sender - side deniable encryption scheme which based on public key and uncertainty of Jacobi Symbol [6]. This scheme has several problems; (1) it can't be able to derive the fake message $M_f$ that belongs to a valid message set, (2) it is not secure against Quadratic Residue Problem (QRP), and (3) the decryption process is very slow because it is based dramatically on square root computation until reach the message as a Quadratic Non Residue (QNR). The first problem is solved by J. Howlader and S. Basu's scheme [7]; they presented a sender side encryption scheme that allows the sender to present a fake message $M_f$ from a valid message set, but it still suffers from the last two mentioned problems. In this paper we present a new sender-side deniable public-key encryption scheme with fast decryption by which the sender is able to lie about the encrypted message to a coercer and hence escape coercion. While the receiver is able to decrypt for the true message, the sender has the ability to open a fake message of his choice to the coercer which, when verified, gives the same ciphertext as the true message. Compared with both Ibrahim's scheme and J. Howlader and S. Basu's scheme, our scheme enjoys nice two features which solved the mentioned problems: (1) It is semantically secure against Quadratic Residue Problem; (2) It is as fast, in the decryption process, as other schemes. Finally, applying the proposed deniable encryption, we originally give a coercion resistant internet voting model without physical assumptions.

Influence of Forward Head Posture on Electromyography Activity of Hyoid Muscles During Mouth Opening

  • Song, Jae-Ik;Kang, Sun-Young;Park, Joo-Hee;Cynn, Heon-Seock;Jeon, Hye-Seon
    • Physical Therapy Korea
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    • v.22 no.1
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    • pp.103-109
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    • 2015
  • Although the relationship between temporomandibular disorder and forward head posture (FHP) is controversial, it is generally accepted that altered head posture can affect mandible position and masticatory muscles activity. Because suprahyoid (SH) and infrahyoid (IH) muscles are stretched by increased passive tension in FHP, this study investigated their activity during mouth opening in FHP compared to neutral head posture (NHP). Twenty healthy subjects (10 males and 10 females) participated in this study. Head postures were evaluated with a cervical range of motion instrument. Electromyography (EMG) activity of bilateral SH and IH muscles was measured while an open mouth was maintained at each head posture. Paired t-test was used to identify significant differences in normalized EMG activity between head postures. Statistical significance was set at .01. Results showed the normalized EMG activity of SH and IH muscles were significantly lower in FHP compared to NHP. This finding indicates that FHP affects the EMG activity of hyoid muscles when they are stretched.

Experimental and Theoretical Study on Corrosion Inhibition of Mild Steel in Oilfield Formation Water Using Some Schiff Base Metal Complexes

  • Mahross, M.H.;Efil, Kursat;El-Nasr, T.A. Seif;Abbas, Osama A.
    • Journal of Electrochemical Science and Technology
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    • v.8 no.3
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    • pp.222-235
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    • 2017
  • First, in this study, the inhibition efficiencies of metal complexes with Cu(II), Ni(II) and Zn(II) of STSC ligand for corrosion control of mild steel in oilfield formation water were investigated. The IEs for a mixture of 500 ppm STSC and 5 ppm metal ion ($Cu^{+2}$, $Ni^{+2}$, $Zn^{+2}$) were found to be 88.77, 87.96 and 85.13 %, respectively. The results were obtained from the electrochemical techniques such as open circuit potential, linear and tafel polarization methods. The polarization studies have showed that all used Schiff base metal complexes are anodic inhibitors. The protective film has been analyzed by FTIR technique. Also, to detect the presence of the iron-inhibitor complex, UV-Visible spectral analysis technique was used. The inhibitive effect was attributed to the formation of insoluble complex adsorbed on the mild steel surface and the adsorption process follows Langmuir adsorption isotherm. The surface morphology has been analyzed by SEM. Secondly, the computational studies of the ligand and its metal complexes were performed using DFT (B3LYP) method with the $6-311G^{{\ast}{\ast}}$ basis set. Finally, it is found that the experimental results were closely related to theoretical ones.

Wind Load Combinations Including Torsion for Rectangular Medium-rise Buildings

  • Stathopoulos, T.;Elsharawy, M.;Galal, K.
    • International Journal of High-Rise Buildings
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    • v.2 no.3
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    • pp.245-255
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    • 2013
  • This paper presents the results of a set of wind tunnel tests carried out to examine wind-induced overall structural loads on rectangular medium-rise buildings. Emphasis was directed towards torsion and its correlation with peak shear forces in transverse and longitudinal directions. Two building models with the same horizontal dimensions but different gabled-roof angles ($0^{\circ}C$ and $45^{\circ}C$) were tested at different full-scale equivalent eave heights (20, 30, 40, 50, and 60 m) in open terrain exposure for all wind directions (every $15^{\circ}C$). Wind-induced pressures were integrated over building surfaces and results were obtained for along-wind force, across-wind force, and torsional moment. Maximum wind force component was given along with the other simultaneously-observed wind force components normalized by the overall peak. The study found that for flat-roofed buildings maximum torsion for winds in transverse direction is associated with 80% of the overall shear force perpendicular to the longer horizontal building dimension; and 45% of the maximum shear occurs perpendicular to the smaller horizontal building dimension. Comparison of the wind tunnel results with current torsion provisions in the American wind standard, the Canadian and European wind codes demonstrate significant discrepancies. Suggested load combination factors were introduced aiming at an adequate evaluation of wind load effects on rectangular medium-rise buildings.

A Design and Implementation of 32-bit Five-Stage RISC-V Processor Using FPGA (FPGA를 이용한 32-bit RISC-V 5단계 파이프라인 프로세서 설계 및 구현)

  • Jo, Sangun;Lee, Jonghwan;Kim, Yongwoo
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.27-32
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    • 2022
  • RISC-V is an open instruction set architecture (ISA) developed in 2010 at UC Berkeley, and active research is being conducted as a processor to compete with ARM. In this paper, we propose an SoC system including an RV32I ISA-based 32-bit 5-stage pipeline processor and AHB bus master. The proposed RISC-V processor supports 37 instructions, excluding FENCE, ECALL, and EBREAK instructions, out of a total of 40 instructions based on RV32I ISA. In addition, the RISC-V processor can be connected to peripheral devices such as BRAM, UART, and TIMER using the AHB-lite bus protocol through the proposed AHB bus master. The proposed SoC system was implemented in Arty A7-35T FPGA with 1,959 LUTs and 1,982 flip-flops. Furthermore, the proposed hardware has a maximum operating frequency of 50 MHz. In the Dhrystone benchmark, the proposed processor performance was confirmed to be 0.48 DMIPS.

The Effect of Plant Coverage on the Constructed Wetlands Performance and Development and Management of Macrophyte Communities (식생피도가 인공습지의 질소 및 인 처리효율에 미치는 영향과 습지식물의 조성 및 관리)

  • Ham, Jong-Hwa;Kim, Hyung-Chul;Koo, Won-Seok;Shin, Hyun-Bhum;Yun, Chun-Gyeong
    • Korean Journal of Ecology and Environment
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    • v.38 no.3 s.113
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    • pp.393-402
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    • 2005
  • The field scale experiment was performed to examine the effect of plant coverage on the constructed wetland performance and recommend the optimum development and management of macrophyte communities. Four sets (each set of 0.88 ha) of wetland (0.8 ha) and pond (0.08 ha) systems were used. Water flowing into the Seokmoon estuarine reservoir from the Dangjin stream was pumped into wetland system. Water depth was maintained at 0.3 ${\sim}$ 0.5 m and hydraulic retention time was managed to about 2 ${\sim}$ 5 days; emergent plants were allowed to grow in the wetlands. After three growing seasons of the construction of wetlands, plant coverage was about 90%, even with no plantation, from bare soil surfaces at the initial stage. During the start up period of constructed wetlands, lower water levels should be maintained to avoid flooding newly plants, if wetland plants are to be started from germinating seeds. Effluent T-N concentration in low plant coverage wetland was higher in winter than high plant coverage wetland, whereas no T-P effluent concentration and removal efficiency difference was observed within 15% plant coverage. Dead vegetation affected nitrogen removal during winter because it is a source of organic carbon which is an essential parameter in denitrification. Biomass harvesting is not a realistic management option for most constructed wetland systems because it could only slightly increase the removal rate and provide a minor nitrogen removal pathway due to lack of organic carbon.

Studies on Predicting Chemical Composition of Permanent Pastures in Hilly Grazing Area Using Near-Infrared Spectroscopy (근적외선 분광법을 이용한 산지방목지 목초시료 화학적 성분 분석에 관한 연구)

  • Park, Hyung-Soo;Lee, Hyo-Jin;Lee, Hyo-won;Ko, Han-Jong;Jeong, Jong-Sung
    • Journal of The Korean Society of Grassland and Forage Science
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    • v.37 no.2
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    • pp.154-160
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    • 2017
  • This study was conducted to find out an alternative way of rapid and accurate analysis of chemical composition of permanent pastures in hilly grazing area. Near reflectance infrared spectroscopy (NIRS) was used to evaluate the potential for predicting proximate analysis of permanent pastures in a vegetative stage. 386 pasture samples obtained from hilly grazing area in 2015 and 2016 were scanned for their visible-NIR spectra from 400~2,400nm. 163 samples with different spectral characteristics were selected and analysed for moisture, crude protein (CP), crude ash (CA), acid detergent fiber (ADF) and neutral detergent fiber (NDF). Multiple linear regression was used with wet analysis data and spectra for developing the calibration and validation mode1. Wavelength of 400 to 2500nm and near infrared range with different critical T outlier value 2.5 and 1.5 were used for developing the most suitable equation. The important index in this experiment was SEC and SEP. The $R^2$ value for moisture, CP, CA, CF, Ash, ADF, NDF in calibration set was 0.86, 0.94, 0.91, 0.88, 0.48 and 0.93, respectively. The value in validation set was 0.66, 0.86, 0.83, 0.71, 0.35 and 0.88, respectively. The results of this experiment indicate that NIRS is a reliable analytical method to assess forage quality for CP, CF, NDF except ADF and moisture in permanent pastures when proper samples incorporated into the equation development.

Machine learning in survival analysis (생존분석에서의 기계학습)

  • Baik, Jaiwook
    • Industry Promotion Research
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    • v.7 no.1
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    • pp.1-8
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    • 2022
  • We investigated various types of machine learning methods that can be applied to censored data. Exploratory data analysis reveals the distribution of each feature, relationships among features. Next, classification problem has been set up where the dependent variable is death_event while the rest of the features are independent variables. After applying various machine learning methods to the data, it has been found that just like many other reports from the artificial intelligence arena random forest performs better than logistic regression. But recently well performed artificial neural network and gradient boost do not perform as expected due to the lack of data. Finally Kaplan-Meier and Cox proportional hazard model have been employed to explore the relationship of the dependent variable (ti, δi) with the independent variables. Also random forest which is used in machine learning has been applied to the survival analysis with censored data.