• 한국표면공학회지
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• 제40권2호
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• pp.98-102
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• 2007

[ $NiCl_2$ ] and poly-L-lysine coated protein chip plates have been fabricated using a spin coating system. Water has been used as solvent and scratching effects on glass slides and ITO have been investigated. We also observed the surface properties of $NiCl_2$ and poly-L-lysine coated slides by using PSA(Particle size analyzer) and AFM(Atomic force microscope). The AFM results imply that the surface patterns created in the spin coating system determine the protein adsorption. Adsorption of histidine-tagged KRS proteins immobilized on glass slides and ITO was analyzed using a BAS image system. The results suggest that the scratching effect was increased ability of protein adsorption.

• 한국표면공학회지
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• 제54권6호
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.313-314
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• 2002

SiCp-reinforced metal matrix composites (MMCs) containing 8 wt % and 16 wt % of $SiC_p-reinforced$ with 30 and $45\;{\mu}m$ in sizes were prepared by a melt stirring-squeeze casting technique. Microstructural observation showed that particle distributions were reasonably well. Turning experiments were carried out on the composites using uncoated and triple-layer coated carbide tools at various cutting speeds under a constant feed rate and depth of cut. Coated tools indicated better performance than uncoated tools for all the materials while the poor surface finish was obtained for coated tools.

• 한국분말재료학회지
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• 제19권6호
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• pp.424-428
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• 2012

Nano Pd spot-coated active carbon powders were synthesized by a hydrothermal-attachment method (HAA) using PVP capped Pd colloid in a high pressure bomb at $250^{\circ}C$, 450 psi, respectively. The PVP capped Pd colloid was synthesized by the precipitation-redispersion method. PVP capped Pd nano particles showed the narrow size distribution and their particle sizes were less than 8nm in diameter. In the case of nano Pd-spot coated active carbon powders, nano-sized Pd particles were adhered in the active carbon powder surface by HAA method. The component of Pd was homogeneously distributed on the active carbon surface.

• Tribology and Lubricants
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• 제15권4호
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• pp.321-327
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• 1999

An experimental study was performed to discover the effect of adsorbed moisture on the rolling resistance behavior of pure silver-coated 52100 bearing steel. Plasma surface modifications were performed on the silver-coated specimen to change the wetting characteristics. Experiments using a thrust ball bearing-type rolling test-rig were performed under vacuum, dry air and various humidity conditions. Results showed that the changes in the wetting characteristics influenced remarkably on the silver particle agglomeration and resulted in the different behavior of rolling resistance with humidity.

• 한국세라믹학회지
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• 제47권6호
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• pp.633-637
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• 2010

In this study, lithium manganese oxide spinel ($LiMn_{1.9}Fe_{0.1}Nb_{0.0005}O_4$) as a cathode material of lithium ion secondary batteries is synthesized with spray drying, and in order to increase its crystallinity and electrochemical properties, the granulated $LiMn_{1.9}Fe_{0.1}Nb_{0.0005}O_4$ particle surface is coated with lithium titanium oxide spinel ($Li_4Ti_5O_{12}$) through a sol-gel method. The granulated particles present a higher tap density and lower specific surface area. The crystallinity and discharge capacity of the $Li_4Ti_5O_{12}$ coated material is relatively higher than uncoated material. With the coating layer, the discharge capacity and cycling stability are increased and the capacity fading is suppressed successfully.

• 대한화장품학회지
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• 제13권1호
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• pp.15-28
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• 1987

Silica spheres were prepared by interfacial reaction method. Factors in-fluencing to the mean particle size and specific surface area of silica spheres were investigated. The experiment about the surface modification of silica spheres was carried out. It was observed that silica spheres have characteristics of the spherical shape with the vacancy in the inner side, high surface area, and reaction tendency by many silanol group. The mean particle size of silica spheres is dependent on the surfactant concentration and W/O ratio. The specific surface area is influenced by SiO2/Na2O mole ratio in sodium silicate. Silica spheres coated with titanium dioxide or zirconium dioxide improve the UV protection effect. Titanate and silane coupling agent make chemical bond with silica surface and improve the organophile and the dispersibility of silica spheres.

• Korean Chemical Engineering Research
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• 제49권5호
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• pp.554-559
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• 2011

리튬금속을 음전극으로 사용할 때의 안전성과 전극 특성을 개선하기 위해, 리튬금속 표면에 각기 종류가 다른 3가지의 탄소분말을 리튬금속 표면에 물리적으로 코팅한 전극을 제조하고 이를 리튬 2차전지의 음전극으로 채택하여 충방전 특성을 조사하였다. 일차입자의 입경이 작고 비표면적이 큰 탄소분말로 코팅한 음전극을 채택하는 경우가 충진밀도가 높고 표면 거칠기가 낮으며, 충방전 특성도 우수하게 나타났다. 이러한 탄소분말 코팅 효과는 소형 셀일수록 더욱 유리하게 나타났다.

• 반도체디스플레이기술학회지
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• 제11권3호
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.59-66
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• 2000

An experimental study on the effect of silver particles on the sliding behavior of bearing steels was performed by using a ball-on-disk tribometer. Tests were carried out in ambient air, dry and vacuum. Disks of AISI 52100 were silver-coaled by a thermal evaporation method, and the effects of silver particle transfer on friction were firstly analyzed. In order to understand further the mechanism of silver particles transfer and its effect on friction and wear, pre-compressed silver particles were artificially introduced into the friction interface and the results were compared to those of silver-coated specimens. Results showed that the introduced silver particles produced transfer layers and resulted in low friction. It also showed that this low friction is closely related to the characteristic behavior of transfer layers. Shakedown and rachetting occurred at the friction interface and affected the friction and wear.