• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.12
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• pp.13-19
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• 2004

We have been studied on the high concentration ozonized water production technology which substitute for the SPM wet cleaning solution process as the PR strip process after the photolithography process in the semiconductor and flat panel display manufacturing. In this work, we have developed the surface discharge type ozone generator which has the characteristics of the 12 ［wt%］ ozone concentration at the oxygen gas flow of 0.5［ℓ/min］ oxygen per cell and also developed the high efficiency ozone contactor for the mixing ozone gas with deionized water. As the production test results of the ozonized water, we obtained the ozonized water concentration above 80［ppm］ at the 10［wt%］ ozone gas concentration, and also had a good result of the PR strip rate of 147［nm/min］. at the 70［ppm］ ozonized water.

• Journal of Soil and Groundwater Environment
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• v.15 no.6
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• pp.37-45
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• 2010

Surfactant-enhanced ozone sparging (SEOS), an advanced version of SEAS (surfactant-enhance air sparging) was introduced in this study for the first time for removal of non-volatile contaminant from aquifer. The advantages of implementing SEAS, enhanced air saturation and expanded zone of sparging influence, are combined with the oxidative potential of ozone gas. Experiments conducted in this study were tow fold; 1-dimensional column experiments for the changes in the gas saturation and contaminant removal during sparging, and 2-dimensional box model experiment for the changes in the size of zone of influence and contaminant removal. An anionic surfactant (SDBS, sodium dodecylbenzene sulfonate) was used to control surface tension of water. Fluorescein sodium salt was used as a representative of watersoluble contaminants, for its fluorescence which is easy to detect when it disappears due to oxidative degradation. Three different gases (air, high-concentration ozone gas, and low-concentration ozone gas) were used for the sparging of 1-D column experiment, while two gases (air and low-concentration ozone gas) were used for 2-D box model experiment. When SEOS was performed for the column and box model, the air saturation and the zone of influence were improved significantly compared to air sparging without surface tension suppression, resulted in effective removal of the contaminant. Based on the experiments observations conducted in this study, SEOS was found to maintain the advantages of SEAS with further capability of oxidative degradation of non-volatile contaminants.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.4
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• pp.320-326
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• 2019

Recently, the application of atmospheric plasma technology in air filtration is increasing. Sterilization by an atmospheric plasma device is very effective. However, ozone gas, which is generated during atmospheric plasma formation, poses a hazard to human health. To reduce the ozone gas during plasma discharge, we fabricated a one-plate hybrid plasma discharge device with a heating element, which can decompose ozone gas effectively by a simple heating action. In this study, we evaluated the plasma discharge characteristics and ozone concentrations with various Ar flow rates and temperatures. With increasing Ar gas flow rate, the ozone concentration and spectrum intensity increased till an Ar gas flow rate of 60 sccm, and decreased thereafter. When discharged in high temperature, the ozone concentration and spectrum intensity decreased. Further, to evaluate the state of the treated surface under various plasma discharge and heating conditions, we measured the variation in the contact angles on the surface. Regardless of the temperature, the contact angle increased with increasing discharge voltage. However, the contact angle increased when discharged at high temperature.

• Applied Chemistry for Engineering
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• v.7 no.2
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• pp.280-288
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• 1996

In the ozone evolution using $PbO_2$, which was electrodeposited on Ti plate at various conditions in electrolyte, the effects of lead dioxide structure on the current efficiency and surface structure changes of lead dioxide were investigated. Also the effects of oxygen transfer reaction on the ozone evolution were investigated by means of a $PbO_2$ electrodeposited on the platinum rotating disk electrode. In order to develope an electrode for ozone evolution, durability of lead dioxide and optimum current density were investigated. At the electrodeposited lead dioxide with the larger grain size and higher crystallinity, the efficiency for ozone evolution was higher. Optimum current density to electrodeposite lead dioxide with large grain size and high crystalinity was $50mA/cm^2$. Lead dioxide deposited in the presence of glycerin showed the best advantage of ozone evolution. Also lead dioxide electrodeposited at less than $10mA/cm^2$ or at more than $100mA/cm^2$ has poor performance of ozone evolution and poor adhesive strength to substrate. In the beginning of ozone evolution, surface structure of lead dioxide was changed and this change resulted in good effects on ozone evolution. Lead dioxide doped with other elements was favorable not to ozone evolution but to oxygen evolution, so it is speculated that ozone evolution has not intermediate stage of oxygen evolution and occurs competitively with oxygen evolution. When ozone was evolved at $0.7{\sim}0.8A/cm^2$, the current efficiency was highest.

• Journal of Korean Society for Atmospheric Environment
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• v.24 no.2
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• pp.196-205
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• 2008

Variability in vertical ozone and meteorological profiles was measured by 2Z electrochemical concentration cells (ECC) ozonesonde at Bangyi in Seoul ($37.52^{\circ}N$, $127.13^{\circ}E$) during June $6{\sim}9$, 2003 in odor to identify the vertical distribution of ozone and its relationship with the lower-atmospheric structure resulted in the high ozone concentrations near the surface. The eight profiles obtained in the early morning and the late afternoon during the study period clearly showed that the substantial change of ozone concentrations in lower atmosphere(${\sim}5\;km$), indicating that it is tightly coupled to the variation of the planetary boundary layer (PBL) structure as well as the background synoptic flow. All profiles observed early in the morning showed very low ozone concentrations near the surface with strong vertical gradients in the nocturnal stable boundary layer due to the photochemical ozone loss caused by surface NO titration under very weak vertical mixing. On the other hand, relatively uniform ozone profiles in the developed mixing layer and the ozone peaks in the upper PBL, were observed in the late afternoon. It was noted that a significant increase in ozone concentrations in the lower atmosphere occurred with the corresponding decrease of the mixing height in the late afternoon on June 8. Ozone in upper layer did not vertically vary much compared to that in PBL but changed significantly on June 6 that was closely associated with the variation of synoptic flows. Interestingly, heavily polluted ozone layers aloft (a maximum value of 115 ppb around 2 km) were formed early in the morning on 6 through 7 June under dominant westerly synoptic flows. This indicates the effects of the transport of pollutants on regional scale and consequently can give a rise to increase the surface ozone concentration by downward mixing processes enhanced in the afternoon.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.11a
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• pp.48-49
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• 2007

자외선 살균기는 기존의 살균기보다 효율적으로 작동되어, 모델의 세균살균을 향상시키기 위하여 투과 반사와 오존을 복합적으로 사용하였다. 투과 반사 효과가 기존의 모델에 비해 세균살균의 효율에 상당한 영향을 주었음을 알 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.320.1-320.1
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• 2013

We have investigated the effect of surface passivation for crystalline silicon solar cell using ozone-based atomic layer deposited (ALD) $Al_2O_3$. We examined passivation properties such as uniformity, carrier lifetime, thickness, negative fixed charge density at AlOx/Si interface, and reflectance. The influences of process temperature and heat treatment were investigated using microwave photoconductance decay (PCD). Ozone-based ALD $Al_2O_3$ film shows the best carrier lifetime at lower deposition temperature than $H_2O$-based ALD.

• Journal of Korean Society for Atmospheric Environment
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• v.11 no.1
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• pp.85-93
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• 1995

Measurements of ground level ozone concentrations were made in a rural area of Chongwon (Choongbook Province) from June 1993 to July 1994. High values frequently exceeding 100 ppb (ambient air qualyty standard of Korea) were recorded. High ozone concentrations in the boundary layer were primarily correlated with the several meteorological parameters in warm seasons: pressure, radiation, temperature, precipitation and wind velocity. The annual average concentration of ozone at Chongwon was 17ppb, and this value was relatively higher than those for other cities in Korea. O$\_$3/ concentrations were observed to increase when the ridge of a surface anticyclone was passing over the region, and maximum values(.geq.100 ppb) were observed on the rear sides of high pressure centers and in the warm sectors of cyclones(well head of cold fronts). The ozone concentrations had a negative correlation with the concentration of primary pollutants(e.g., total hydrocarbons).

• Ocean and Polar Research
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• v.25 no.1
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• pp.9-20
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• 2003

A solar radiation model was used to investigate the UV radiation at the surface offing Sejong Station in West Antarctica. The results calculated by this model were compared with the values measured by UV-Biometer and UV-A meter during 1999-2000. In this study, the parameterization of solar radiative transfer process was based on Chou and Lee(1996). The total ozone amounts measured by Breve. Ozone Spectrophotometer and the aerosol amounts by Nakajima et al.(1996) was used as the input data of the solar radiative transfer model. And the surface albedo is assumed to be 0.20 in summer and 0.85 in winter. The sensitivity test of solar radiative transfer model was done with the variation of total ozone, aerosol amount, and surface albedo. When the cosine of solar zenith angle is 0.3, Erythemal UV-B radiation decreased 73% with the 200% increase of total ozone from 100 DU to 300 DU, but the decrease of UV-A radiation is about 1%. Also, for the same solar zenith angle, UV-A radiation was decreased 31.0% with the variation of aerosol optical thickness from 0.0 to 0.3 and Erythemal UV-B radiation was decreased only 6.1%. The increase of Erythemal W-B radiation with the variation of surface albedo was twice that of UV-A increase. The surface Erythemal UV-B and UV-A radiation calculated by solar raditive transfer model were compared with the measured values fer the relatively clear day at King Sejong Station in West Antarctica. The model calculated Erythemal UV-B radiation at the surface coincide well with the measured values except for cloudy days. But the difference between the model calculated UV-A radiation and the measured value at the surface was large because of cloud scattering effect. So, the cloud property data is needed to calculate the UV radiation more exactly at King Sejong Station in West Antarctica.

• Journal of the Korean institute of surface engineering
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• v.31 no.6
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• pp.407-416
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• 1998