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A Study on the Ozonized Water Production technology for the PR Strip Process  

Son Young Su (Advanced Industrial Technology Depart., KIMM)
Chai Sang Hoon (Department of Electronic Eng., Ho Seo University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.41, no.12, 2004 , pp. 13-19 More about this Journal
Abstract
We have been studied on the high concentration ozonized water production technology which substitute for the SPM wet cleaning solution process as the PR strip process after the photolithography process in the semiconductor and flat panel display manufacturing. In this work, we have developed the surface discharge type ozone generator which has the characteristics of the 12 ［wt%］ ozone concentration at the oxygen gas flow of 0.5［ℓ/min］ oxygen per cell and also developed the high efficiency ozone contactor for the mixing ozone gas with deionized water. As the production test results of the ozonized water, we obtained the ozonized water concentration above 80［ppm］ at the 10［wt%］ ozone gas concentration, and also had a good result of the PR strip rate of 147［nm/min］. at the 70［ppm］ ozonized water.
Keywords
wet cleaning process; PR strip; ozone cell; surface discharge; ozonized water; ozone contactor;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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