Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 31 Issue 6
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- Pages.407-416
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- 1998
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
The ozone depletion and the alternative cleaning in the cleaning process
세정공정에서의 오존층에서의 오증촌파괴와 대체세정
Abstract
Keywords