• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
• /
• pp.113-113
• /
• 2008

Cu CMP (Chemical Mechanical Planarization) has been used to remove copper film and obtain a planar surface which is essential for the semiconductor devices. Generally, it is known that chemical reaction is a dominant factor in Cu CMP comparing to Silicon dioxide CMP. Therefore, Cu CMP slurry has been regarded as an important factor in the entire process. This investigation focused on understanding the effect of corrosion inhibitor on copper surface and CMP results. Benzotriazole (BTA) was used as a corrosion inhibitor in this experiment. For the surface analysis, electrochemical characteristics of Cu was measured by a potentiostat and surface modification was investigated by X-ray photoelectron spectroscopy (XPS). As a result, corrosion potential (Ecorr) increased and nitrogen concentration ratio on the copper surface also increased with BTA concentration. These results indicate that BTA prevents Cu surface from corrosion and forms Cu-BTA layer on Cu surface. CMP results are also well matched with these results. Material removal rate (MRR) decreased with BTA concentration and static etch rate also showed same trend. Consequently, adjustment of BTA concentration can give us control of step height variation and furthermore, this can be applicable for Cu pattern CMP.

• 한국콘크리트학회:학술대회논문집
• /
• 한국콘크리트학회 1997년도 봄 학술발표회 논문집
• /
• pp.235-240
• /
• 1997

The purpose of this experiment is to verify processing crack direction and state by the corrosion of electrifying re-bar in the salt water. The result of this experiment is the fact that the first crack appear on the surface of water-because of supplying of oxygen and water. The crack processing is on a surface to be contacted by air and to bottom as mainly the vertical direction from a surface of water. The crack by corrosion of steel reinforcing is emerged by the inside of concrete rather than surface concrete.

• 대한기계학회논문집
• /
• 제16권8호
• /
• pp.1503-1512
• /
• 1992

본 연구에서는 열화평가 및 수명예측에 있어서 가장 중요한 문제로 대두되는 기계구조물의 사용시간과 부식 정도에 대한 관계 곡선을 규명하기 위하여 실험실의 가혹 환경하에서 부식을 시키면서 표면을 측정한 데이터로 통계적인 파라메타(parame- ter)를 추정하여, 인공부식시킨 부식재로 피로 강도를 평가하고, 또 부식된 구조물의 잔존수명을 예측할 수 있는 하나의 방법을 제시하고저 한다.

• Corrosion Science and Technology
• /
• 제22권1호
• /
• pp.64-72
• /
• 2023

Ni-Ti shape memory alloy for dental nerve treatment devices was prepared by adding Mo to Ni-Ti alloy to improve flexibility and fatigue fracture characteristics and simultaneously increase corrosion resistance. Surface properties of the alloy were evaluated. Microstructure analysis of the Ni-Ti-xMo alloy revealed that the amount of needle-like structure increased with increasing Mo content. The shape of the precipitate showed a pattern in which a long needle-like structure gradually disappeared and changed into a small spherical shape. As a result of XRD analysis of the Ni-Ti-xMo alloy, R-phase structure appeared as Mo was added. R-phase and B2 structure were mainly observed. As a result of DSC analysis, phase transformation of the Ti-Ni-Mo alloy showed a two-step phase change of B2-R-B19' transformation with two exothermic peaks and one endothermic peak. As Mo content increased, R-phase formation temperature gradually decreased. As a result of measuring surface hardness of the Ti-Ni-Mo alloy, change in hardness value due to the phase change tended to decrease with increasing Mo content. As a result of the corrosion test, the corrosion potential and pitting potential increased while the current density tended to decrease with increasing Mo content.

• Corrosion Science and Technology
• /
• 제15권6호
• /
• pp.265-270
• /
• 2016

The ellipso-microscopic observation of a titanium surface undergoing anodization in $0.05mol\;dm^{-3}$ of $H_2SO_4$ was conducted. During irradiation by ultra-violet (UV) light with a wavelength of 325 nm, the titanium surface allowed for the flow of a photo-induced current and showed up as a bright, patch-like image on an ellipso-microscopic view. The brightness and patch-pattern in the image changed with flowing photo-induced current. The changes in the brightness and the image corresponded to the formation and/or degradation of titanium oxide due to the photo-electrochemical reaction of the oxide. An in situ monitoring using the ellipso-microscope revealed that the film change was dependent on the irradiation light power, by UV-light increases the anodic current and results in the initiation of pitting at lower potentials as compared with the non-irradiated condition.

• Corrosion Science and Technology
• /
• 제5권2호
• /
• pp.77-83
• /
• 2006

The plasma electrolytic oxidation (PEO) process is a relatively new surface treatment technique that produces a chemically stable and environment-friendly electrolytic coating that can be applied to all types of magnesium alloys. In this study, the characteristics of oxide film were examined after coating the extruded AZ31 alloy through the PEO process. Hard ceramic coatings were obtained on the AZ31 alloy by changing the coating time from 10min to 60min. The morphologies of the surface and the cross-section of the PEO coatings were examined by scanning electron microscopy and optical microscopy, and the thickness of the coating was measured. The X-ray diffraction pattern of the coating shows that the coated layer consists mainly of the MgO and $Mg_2SiO_4$ phases after the oxidation reaction. The hardness of the coated AZ31 alloy increased with increasing coating time. In addition, the corrosion rates of the coated and uncoated AZ31 alloys were examined by salt spray tests according to ASTM B 117 and the results show that the corrosion resistance of the coated AZ31 alloy was superior to that of the un-coated AZ31 alloy.

• Structural Engineering and Mechanics
• /
• 제75권6호
• /
• pp.723-736
• /
• 2020

In this paper, acoustic emission (AE) and pattern recognition are utilized to identify the AE signal signatures caused by propagation of stress corrosion cracking (SCC) in a 304 stainless steel plate. The surface of the plate is under almost uniform tensile stress at a notch. A corrosive environment is provided by exposing the notch to a solution of 1% Potassium Tetrathionate by weight. The Global b-value indicated an occurrence of the first visible crack and damage stages during the SCC. Furthermore, a method based on linear regression has been developed for damage identification using AE data.

• Journal of Electrochemical Science and Technology
• /
• 제9권1호
• /
• pp.1-8
• /
• 2018

The effect of mixing ratio on the corrosion protection of carbon steel coated by a film composed of poly(vinylidene) fluoride (PVDF) and poly(methyl methacrylate) (PMMA) was examined using electrochemical impedance spectroscopy. Surface crystallization behavior and thermal properties of the PVDF/PMMA coated carbon steel were evaluated using polarized optical microscopy and differential scanning calorimetry, respectively. A Maltese cross-pattern spherulite crystal was observed in the PVDF/PMMA coating film, which became more apparent with increasing PVDF content. The highest corrosion protection performance was achieved with 60 wt.% PVDF-coated carbon steel, and delamination and corrosion reactions were observed for 20 wt.% PVDF-coated carbon steel. Further, corrosion protection performance with an amorphous/crystal mixture (PVDF/PMMA, 60/40 (w/w)) was better than those observed in the amorphous domain and the perfect-crystal domain of the PVDF/PMMA blended coating system.

• 보존과학연구
• /
• 통권24호
• /
• pp.215-227
• /
• 2003

The gilt-bronze Sarira Reliquary was discovered when repairing three-stories east stone pagoda (Treasure No. 395) at Seungju-eup in Suncheon city in Jeollanam-do Province in August, 1986. Then it was appointed as Treasure in 1988. The Sarira Reliquary had been held in Seonamsa temple, but deterioration on the surface and corrosion had appeared affecting its surface detail. Consequently, the conservation treatment was carried out from November 2002 to March 2003.The corrosion and dirt on the surface of the Sarira Reliquary were cleaned with ethyl alcohol and Benzotriazole was applied to prevent further corrosion. Finally, NAD-10(Paraloid NAD-10), acrylic resin, was used to consolidate the structure. Moreover, after non-destructive analysis to confirm element of alloy, copper, gold, silver and mercury were discovered and this result tells us that it was plated with gold by amalgam. Fibers at the pedestal were examined under the microscope and identified as silk. The total height of this Sarira Reliquary is 6.0cm, the height of lotus pedestal and the roof is 2.7cm and 1.8cm, respectively. The roof and body are joined together, and the lotus pedestal can be separated, on which the octagonal reliquary is impaled. The pedestal consists of 3layers of petals and the surface is decorated with flower pattern. The reliquary is presumed to be created in the 14th century, and it becomes valuable historical material to reveal the secret of metal work in the late Goryeo Dynasty.

• Journal of Advanced Marine Engineering and Technology
• /
• 제34권5호
• /
• pp.670-677
• /
• 2010

가혹한 부식환경 하에 사용되어 지고 있는 다양한 강구조물에 대해서 많은 표면방식법이 있다. 그 중의 한방법인 용사는 다양한 강구조물의 표면방식을 위하여 비교적 최근에 개발된 유용한 방식법이다. 그러나 용사피막도 환경오염의 가속화에 따라 점차 더욱 좋은 내식성을 필요로 하고 있다. 본 연구에서는 아아크 용사에 의해서 도막두께 $200{\mu}m$의 피막을 만들었으며, 피막의 종류는 순 아연,순 알류미늄, 합금피막(Al:Zn=85:15) 및 (Al:Zn=95:5)의 합금피막이었다. 그리고 이들 피막의 내식성을 해수용액에서 전기화학적인 방법으로 고찰 하였다. 순 알류미늄 피막은 다른 피막에 비해서 비교적 상당히 좋은 내식성을 보였다. 그리고 합금피막도 역시 순 아연피막에 비해서 좋은 내식성을 보였다. 특히 순 알류미늄 피막은 갈바륨 용사라고 알려진 합금피막(Al:Zn=85:15)보다 해수용액에서 내식성이 상대적으로 좋았음이 관찰되었다. 순 아연의 부식된 표면양상은 입게부식의 형태를 나타내었으나 순 알류미늄과 합금피막은 균일부식의 형태를 나타내었다.