• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.113-113
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• 2008

Cu CMP (Chemical Mechanical Planarization) has been used to remove copper film and obtain a planar surface which is essential for the semiconductor devices. Generally, it is known that chemical reaction is a dominant factor in Cu CMP comparing to Silicon dioxide CMP. Therefore, Cu CMP slurry has been regarded as an important factor in the entire process. This investigation focused on understanding the effect of corrosion inhibitor on copper surface and CMP results. Benzotriazole (BTA) was used as a corrosion inhibitor in this experiment. For the surface analysis, electrochemical characteristics of Cu was measured by a potentiostat and surface modification was investigated by X-ray photoelectron spectroscopy (XPS). As a result, corrosion potential (Ecorr) increased and nitrogen concentration ratio on the copper surface also increased with BTA concentration. These results indicate that BTA prevents Cu surface from corrosion and forms Cu-BTA layer on Cu surface. CMP results are also well matched with these results. Material removal rate (MRR) decreased with BTA concentration and static etch rate also showed same trend. Consequently, adjustment of BTA concentration can give us control of step height variation and furthermore, this can be applicable for Cu pattern CMP.

• Proceedings of the Korea Concrete Institute Conference
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• 1997.04a
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• pp.235-240
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• 1997

The purpose of this experiment is to verify processing crack direction and state by the corrosion of electrifying re-bar in the salt water. The result of this experiment is the fact that the first crack appear on the surface of water-because of supplying of oxygen and water. The crack processing is on a surface to be contacted by air and to bottom as mainly the vertical direction from a surface of water. The crack by corrosion of steel reinforcing is emerged by the inside of concrete rather than surface concrete.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.8
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• pp.1503-1512
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• 1992

The strength evaluation and life prediction on the corrosion part of structure is one of the most important subjects, as a viewpoint of reducing economic loss by regular inspection, maintenance, repair and replace. For this purpose, it has been difficult to obtain the available data on growth of pit depth or growth rate of each pit which depends on time. In this paper, the life prediction and strength evaluation method was suggested for the structure with irregular stress concentration part by surface corrosion. The statistical distribution pattern of corrosion depth and the degree of fatigue strength decline were confirmed according to corrosion period by artificial corrosion of SS41 steel. The life prediction and the fatigue strength evaluation of materials with consideration of the corrosion period on the extreme value statistic analysis by the data of maximum depth of corrosion and on random variable was studied.

• Corrosion Science and Technology
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• v.22 no.1
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• pp.64-72
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• 2023

Ni-Ti shape memory alloy for dental nerve treatment devices was prepared by adding Mo to Ni-Ti alloy to improve flexibility and fatigue fracture characteristics and simultaneously increase corrosion resistance. Surface properties of the alloy were evaluated. Microstructure analysis of the Ni-Ti-xMo alloy revealed that the amount of needle-like structure increased with increasing Mo content. The shape of the precipitate showed a pattern in which a long needle-like structure gradually disappeared and changed into a small spherical shape. As a result of XRD analysis of the Ni-Ti-xMo alloy, R-phase structure appeared as Mo was added. R-phase and B2 structure were mainly observed. As a result of DSC analysis, phase transformation of the Ti-Ni-Mo alloy showed a two-step phase change of B2-R-B19' transformation with two exothermic peaks and one endothermic peak. As Mo content increased, R-phase formation temperature gradually decreased. As a result of measuring surface hardness of the Ti-Ni-Mo alloy, change in hardness value due to the phase change tended to decrease with increasing Mo content. As a result of the corrosion test, the corrosion potential and pitting potential increased while the current density tended to decrease with increasing Mo content.

• Corrosion Science and Technology
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• v.15 no.6
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• pp.265-270
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• 2016

The ellipso-microscopic observation of a titanium surface undergoing anodization in $0.05mol\;dm^{-3}$ of $H_2SO_4$ was conducted. During irradiation by ultra-violet (UV) light with a wavelength of 325 nm, the titanium surface allowed for the flow of a photo-induced current and showed up as a bright, patch-like image on an ellipso-microscopic view. The brightness and patch-pattern in the image changed with flowing photo-induced current. The changes in the brightness and the image corresponded to the formation and/or degradation of titanium oxide due to the photo-electrochemical reaction of the oxide. An in situ monitoring using the ellipso-microscope revealed that the film change was dependent on the irradiation light power, by UV-light increases the anodic current and results in the initiation of pitting at lower potentials as compared with the non-irradiated condition.

• Corrosion Science and Technology
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• v.5 no.2
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• pp.77-83
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• 2006

The plasma electrolytic oxidation (PEO) process is a relatively new surface treatment technique that produces a chemically stable and environment-friendly electrolytic coating that can be applied to all types of magnesium alloys. In this study, the characteristics of oxide film were examined after coating the extruded AZ31 alloy through the PEO process. Hard ceramic coatings were obtained on the AZ31 alloy by changing the coating time from 10min to 60min. The morphologies of the surface and the cross-section of the PEO coatings were examined by scanning electron microscopy and optical microscopy, and the thickness of the coating was measured. The X-ray diffraction pattern of the coating shows that the coated layer consists mainly of the MgO and $Mg_2SiO_4$ phases after the oxidation reaction. The hardness of the coated AZ31 alloy increased with increasing coating time. In addition, the corrosion rates of the coated and uncoated AZ31 alloys were examined by salt spray tests according to ASTM B 117 and the results show that the corrosion resistance of the coated AZ31 alloy was superior to that of the un-coated AZ31 alloy.

• Structural Engineering and Mechanics
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• v.75 no.6
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• pp.723-736
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• 2020

In this paper, acoustic emission (AE) and pattern recognition are utilized to identify the AE signal signatures caused by propagation of stress corrosion cracking (SCC) in a 304 stainless steel plate. The surface of the plate is under almost uniform tensile stress at a notch. A corrosive environment is provided by exposing the notch to a solution of 1% Potassium Tetrathionate by weight. The Global b-value indicated an occurrence of the first visible crack and damage stages during the SCC. Furthermore, a method based on linear regression has been developed for damage identification using AE data.

• Journal of Electrochemical Science and Technology
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• v.9 no.1
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• pp.1-8
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• 2018

The effect of mixing ratio on the corrosion protection of carbon steel coated by a film composed of poly(vinylidene) fluoride (PVDF) and poly(methyl methacrylate) (PMMA) was examined using electrochemical impedance spectroscopy. Surface crystallization behavior and thermal properties of the PVDF/PMMA coated carbon steel were evaluated using polarized optical microscopy and differential scanning calorimetry, respectively. A Maltese cross-pattern spherulite crystal was observed in the PVDF/PMMA coating film, which became more apparent with increasing PVDF content. The highest corrosion protection performance was achieved with 60 wt.% PVDF-coated carbon steel, and delamination and corrosion reactions were observed for 20 wt.% PVDF-coated carbon steel. Further, corrosion protection performance with an amorphous/crystal mixture (PVDF/PMMA, 60/40 (w/w)) was better than those observed in the amorphous domain and the perfect-crystal domain of the PVDF/PMMA blended coating system.

• 보존과학연구
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• s.24
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• pp.215-227
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• 2003

The gilt-bronze Sarira Reliquary was discovered when repairing three-stories east stone pagoda (Treasure No. 395) at Seungju-eup in Suncheon city in Jeollanam-do Province in August, 1986. Then it was appointed as Treasure in 1988. The Sarira Reliquary had been held in Seonamsa temple, but deterioration on the surface and corrosion had appeared affecting its surface detail. Consequently, the conservation treatment was carried out from November 2002 to March 2003.The corrosion and dirt on the surface of the Sarira Reliquary were cleaned with ethyl alcohol and Benzotriazole was applied to prevent further corrosion. Finally, NAD-10(Paraloid NAD-10), acrylic resin, was used to consolidate the structure. Moreover, after non-destructive analysis to confirm element of alloy, copper, gold, silver and mercury were discovered and this result tells us that it was plated with gold by amalgam. Fibers at the pedestal were examined under the microscope and identified as silk. The total height of this Sarira Reliquary is 6.0cm, the height of lotus pedestal and the roof is 2.7cm and 1.8cm, respectively. The roof and body are joined together, and the lotus pedestal can be separated, on which the octagonal reliquary is impaled. The pedestal consists of 3layers of petals and the surface is decorated with flower pattern. The reliquary is presumed to be created in the 14th century, and it becomes valuable historical material to reveal the secret of metal work in the late Goryeo Dynasty.

• Journal of Advanced Marine Engineering and Technology
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• v.34 no.5
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• pp.670-677
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• 2010

There are many surface protection methods for numerous steel structures being used under severely corrosive environment, one of them, metallizing(thermal spray) is a available protection method which is comparatively and recently developed for surrface protection of various steel structures. However coating film obtained by spraying is to be needed increasingly more good corrosion resistance due to accelerating of environmental contamination. In this study, coating films(DFT:$200{\mu}m$) are performed with arc spray by wire metal and their types of films are pure zinc, pure aluminum, alloy film(Al:Zn=85:15) and alloy film(Al:Zn=95:5). And corrosion resistance of their films was investigated with electrochemical methods in seawater solution. Pure aluminum film showed a relatively somewhat good corrosion resistance compared to among those of other films and alloy films also showed a good corrosion resistance compared to pure zinc film. Especially it was observed that pure aluminum film showed a comparatively good corrosion resistance than that of alloy film named as galvarium spray(Al:Zn=85:15) in seawater solution. Morphology of corroded surface of pure zinc film appeared the pattern like intergranlar corrosion, however films of pure aluminum and alloy metal showed a general corrosion pattern.