• Title/Summary/Keyword: Surface Area of Plasma

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Fundamental Study on the Formation of Nanostructured Coating Layer (나노구조 용사코팅층의 형성에 관한 기초적 연구)

  • Kim, Y.S.
    • Journal of Power System Engineering
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    • v.9 no.4
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    • pp.90-95
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    • 2005
  • The wire-arc process is a low-cost thermal spray method simply utilizes electrical energy to melt the feedstock wire. It is more userful for field applications, especially to coat large surface area. In this paper, a special Fe-based alloy coatings by using the wire-arc process were developed. Nanoscale composite coatings were achieved either during spraying or through a post heat treatment. As-sprayed Fe-based alloy coatings had been an amorphous matrix structure, after heating to $700^{\circ}C$ for 10 minutes a solid state transformation occurred in the some fraction of amorphous matrix which resulted in the formation of nanostructured recrystallized phase. Scanning electron microscopy (SEM) and field emotional scanning electron microscope(FE-SEM) were applied to analyze the microstructure of the coatings. Additionally hardness and bend resistance of the Fe-based alloy coatings were examined, and these results were compared with those of partially stabilized zirconia(PSZ) coatings by using the plasma spray process.

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Discharge characteristics of FFL as the variation of cell structure (셀 구조 변화에 따른 FFL(Flat Fluorescent Lamp)의 방전특성)

  • 윤성현;박철현;조민정;임민수;권순석;임기조
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.600-603
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    • 2000
  • Recently, Display devices have become important in the information-oriented society and flat display devices are greatly demanded. Liquid crystal display(LCD) represents one of the most promising devices for large size desk-top monitors, notebook PC and car navigation system. However LCD cannot give forth light itself and must have backlight system. The most popular backlighting system is composed of a lighting-guide plate and CCFL as a lighting source. The number of CCFL must increase up if the area of display is increased. So a new backlighting source with high luminance is needed for large LCDs. In this paper, we proposed a surface discharge FFL with the new electrode structure like the needle shaped electrode as the variation of cell structure to high luminance and low power consumption. In comparison with different electrode structure it has low discharge voltage and current and good optical characteristics. So it has better discharge characteristics than different surface discharge FFL and can be fungible for a backlight as a lighting source in LCDs.

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Ni Nanoparticles-hollow Carbon Spheres Hybrids for Their Enhanced Room Temperature Hydrogen Storage Performance

  • Kim, Jin-Ho;Han, Kyu-Sung
    • Transactions of the Korean hydrogen and new energy society
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    • v.24 no.6
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    • pp.550-557
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    • 2013
  • A glucose hydrothermal method is described for preparing hollow carbon spheres (HCS), which have a regular morphology and a high Brunauer-Emmett-Teller surface area of 28.6 m2/g. Scanning electron microscopy shows that they have thin shells and diameter between 2 and 8 ${\mu}m$. The HCSs were modified for the enhanced room temperature hydrogen storage by employing Ni nanoparticles on their surface. The Ni-decorated HCSs were characterized by X-ray diffraction, transmission electron microscopy coupled with an energy dispersive spectroscope, and an inductively coupled plasma spectrometer, indicating that fine and well-distributed Ni nanoparticles can be accomplished on the HCSs. The hydrogen uptake capacity in HCSs with and without Ni loading was evaluated using a high-pressure microbalance at room temperature under a hydrogen pressure upto 9 MPa. As much as 1.23wt.% of hydrogen can be stored when uniformly distributed Ni nanoparticles are formed on the HCSs, while the hydrogen uptake capacity of as-received HCSs was 0.41 wt.%. For Ni nanoparticle-loaded HCSs, hydrogen molecules could be easily dissociated into atomic hydrogen and then chemically adsorbed by the sorbents, leading to an enhanced capacity for storing hydrogen.

Role of an edge ring in plasma processing systems for semiconductor wafers (반도체용 플라즈마 장치에서 edge ring의 역할)

  • Ju, Jeong-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.71-71
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    • 2017
  • 플라즈마를 이용하는 건식 식각 또는 박막 증착 장비(PECVD)의 경우 웨이퍼에 rf bias를 인가하여 이온의 에너지와 입사각을 조절한다. 종래에는 웨이퍼의 가장 자리 3 mm영역을 공정 대상에서 제외하는 exclusion area로 지정하였으나 점차 공정 기술의 발달로 2 mm 이내로 감소하고 있다. 따라서 웨이퍼의 가장 자리에서 발생하는 전기장의 방향 및 크기 변화를 조절할 수 있는 기술의 개발이 필요하게 되었으며 그중 핵심적인 부품이 Si 또는 SiC로 제작되는 edge ring이다. Focus ring이라고도 불리는 이 부품은 웨이퍼 상에서 반경 방향으로 흐르는 가스의 유속이 가장 자리에 근접하면 빨라지는 현상과 이에 의해 식각/증착 화학 반응 속도가 증가하는 문제를 완화하기 위한 것과 적절한 전기 전도도를 부여함으로써 가장 자리의 전기장 분포를 최적화 할 수 있는 새로운 설계 변수로 활용할 수 있다. 스퍼터링의 경우에도 웨이퍼 중앙과 주변 부는 마그네트론 음극의 회전 링과의 입체각이 차이가 나므로 가장 자리의 경우 트렌치나 홀의 내측이 외측에 비해서 증착막의 두께가 얇아지는 문제가 있으며 건식 식각의 경우 홀의 형상이 수직에서 벗어나는 경향이 발생할 수 있다. 또한 사용 시간에 비례해서 edge ring의 형상이 변화하는데 상대적으로 고가품이어서 교체 주기를 설정하는 보다 합리적 기준이 필요하다. 본 연구에서는 전산 유체 역학 모델을 사용하는 ESI사의 CFD-ACE+를 활용하여 edge ring의 형상과 재질이 갖는 영향을 전산 모사하기 위한 기초 작업을 그림 1과 같이 진행하였다. 2D-CCP model에 Ar 가스를 가정하고 비유 전율 10내외 전도도 $0.1/Ohm{\cdot}m$정도의 재질에 대한 용량성 결합 플라즈마에 대해서 계산을 하고 이 때 기판에 인가되는 고주파 전력에 의한 이온의 입사 에너지 분포 및 각도 분포를 Monte Carlo 방법으로 처리하여 계산하였다.

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ELECTRON MICROSCOPIC STUDY ON THE PULP OF HUMAN PRIMARY TOOTH IN THE SHEDDING STAGE (탈락기(脫落期) 유치치수(乳齒齒髓)의 미세구조(微細構造)에 관(關)한 전자현미경적(電子顯微鏡的) 연구(硏究))

  • Kim, Woo-Chul
    • Journal of the korean academy of Pediatric Dentistry
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    • v.10 no.1
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    • pp.25-33
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    • 1983
  • With electron microscope, author studied on the pulp structure of human primary tooth in shedding stage. Non-carious human primary molar teeth were selected for this study. Using standard methods, specimens were sectioned and examined by light and electron microscope, The results were as follows; 1. In coronal pulp, odontoblasts were replaced by multinucleated odontoclasts, which contained a large number of mitochondria of varying shape and vacuoles in cytoplasm. Where odontoclasts were in contact with tooth surface, the characteristic ruffled border and clear zone were observed. 2. Fibrous tissue with plentiful collagen fibers and fibroblasts was observed adjacent to the dentin in the pulp. Fibroblast contained a number of mitochondria and well-developed rough-surfaced endoplasmic reticulum. 3. Inflammatory cells were observed in the pulp and active fibroblasts could be seen between inflammatory cells. In many cases, cervical epithelium proliferated toward absorbed area. 4. Inflammatory cells consisted of a number of lymphocytes, polymorphonuclear leukocytes, plasma cells and macrophages. Macrophage containing lysosomes in digestive state or phagocyting PMN could be seen. 5. In the primary molar of delayed root resorption, odontoblast layer, zone of Weil and cell-rich zone could be seen at roof of pulp chamber and odontoblast in this area cont과ained some lipid droplets.

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WETTABILITY AND DRUG DELIVERY OF FUNCTIONALLY GRADED NANO-MICRO POROUS TITANIUM SURFACE

  • Yun, Kwi-Dug;Vang, Mong-Sook;Yang, Hong-So;Park, Sang-Won;Park, Ha-Ok;Lim, Hyun-Pil
    • The Journal of Korean Academy of Prosthodontics
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    • v.46 no.3
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    • pp.307-319
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    • 2008
  • STATEMENT OF PROBLEM: It is known that an anodic oxidation technique, one of the methods for the implant surface treatment, remarkably increased surface area, enhanced wettability and accelerated the initial bone healing. Purpose: This study was performed to evaluate the wettability of anodized titanium surface which has a nanotubular structure, to assess osseointegration after the placement of implant with nano-size tubes on tibia of rats and to analyze quantitatively transferable rhBMP-2 on each surface. MATERIAL AND METHOD: Four different kinds of surface-treated titanium discs (polished (machined surface) group, micro (blasting surface) group, nano (anodizedmachined surface) group, and nano-micro (anodized-blasting surface) group) were fabricated (n=10). Three different media were chosen to measure the surface contact angles; distilled water, plasma and rhBMP-2 solution. After a single drop (0.025 $m{\ell}$) of solution, the picture was taken with the image camera, and contact angle was measured by using image analysis system. For the test of osseointegration, 2 kinds of anodized surface (anodized-machined surface, anodized-blasting surface) implants having 2.0 mm in diameter and 5.0 mm in length inserted into the tibia of Wistar rats. After 3 weeks, tibia were harvested and the specimens were stained with hematoxylin and eosin for histological analysis. To test the possibility of drug delivery, after soaking sample groups in the concentration of 250 ng/$m{\ell}$l of rhBMP-2 for 48 hours, the excess solution of rhBMP-2 were removed. After that, they were lyophilized for 24 hours, and then the rhBMP-2 on the surface of titanium was resolved for 72 hours in PBS. All the extracted solution was analyzed by ELISA. One-way analysis of variance (ANOVA) was performed on the data. RESULTS: The wettability is improved by anodic oxidation. The best wettability was shown on the nano-micro group, and it was followed by nano group, micro group, and polished group. In the histological findings, all implants showed good healing and the new bone formation were observed along the implant surface. After 3 days, nano-micro group delivered the most amount of rhBMP-2, followed by nano group, micro group, and polished group. CONCLUSION: It indicated that anodic oxidation on blasting surface produce functionally graded nano-micro porous structure and enhance hydrophilicity of the surface and osseointegration. The findings suggest that the nano-micro porous structure could be a useful carrier of osteogenic molecules like rhBMP-2.

a-C:H Films Deposited in the Plasma of Surface Spark Discharge at Atmospheric Pressure. Part I: Experimental Investigation

  • Chun, Hui-Gon;K.V. Oskomov;N.S. Sochungov;Lee, Jing-Hyuk;You, Yong-Zoo
    • Journal of the Korean institute of surface engineering
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    • v.36 no.5
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    • pp.357-363
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    • 2003
  • The aim of this work is the synthesis of a-C:H films from methane gas using surface spark discharge at the atmospheric pressure. Properties of these films have been investigated as functions of energy W delivered per a methane molecule in the discharge. The method enables the coatings to be deposited with high growth rates (up to $100 \mu\textrm{m}$/hour) onto large-area substrates. It is shown that the films consist of spherical granules with diameter of 20∼50 nm formed in the spark channel and then deposited onto the substrate. The best film characteristics such as minimum hydrogen-to-carbon atoms ratio H/C=0.69, maximum hardness $H_{v}$ =3 ㎬, the most dense packing of the granules and highest scratch resistance has been obtained under the condition of highest energy W of 40 eV. The deposited a-C:H coatings were found to be more soft and hydrogenated compared to the diamond-like hydrogenated (a-C:H) films which obtained by traditional plasmaenhanced chemical vapor deposition methods at low pressure (<10 Torr). Nevertheless, these coatings can be potentially used for scratch protection of soft plastic materials since they are of an order harder than plastics but still transparent (the absorption coefficient is about $10^4$$10^{5}$ $m^{-1}$ At the same time the proposed method for fast deposition of a-C:H films makes this process less expensive compared to the conventional techniques. This advantage can widen the application field of. these films substantially.y.

Electrochemical Behavior of Pt-Ru Catalysts on Zeolite-templated Carbon Supports for Direct Methanol Fuel Cells

  • Lim, Tae-Jin;Lee, Seul-Yi;Yoo, Yoon-Jong;Park, Soo-Jin
    • Bulletin of the Korean Chemical Society
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    • v.35 no.12
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    • pp.3576-3582
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    • 2014
  • Zeolite-templated carbons (ZTCs), which have high specific surface area, were prepared by a conventional templating method using microporous zeolite-Y for catalyst supports in direct methanol fuel cells. The ZTCs were synthesized at different temperatures to investigate the characteristics of the surface produced and their electrochemical properties. Thereafter, Pt-Ru was deposited at different carbonization temperatures by a chemical reduction method. The crystalline and structural features were investigated using X-ray diffraction and scanning electron microscopy. The textural properties of the ZTCs were investigated by analyzing $N_2$/77 K adsorption isotherms using the Brunauer-Emmett-Teller equation, while the micro- and meso-pore size distributions were analyzed using the Barrett-Joyner-Halenda and Harvarth-Kawazoe methods, respectively. The surface morphology was characterized using transmission electron microscopy and inductively coupled plasma-mass spectrometry. The electrochemical properties of the Pt-Ru/ZTCs catalysts were also analyzed by cyclic voltammetry measurements. From the results, the ZTCs carbonized at $900^{\circ}C$ show the highest specific surface areas. In addition, ZTC900-PR led to uniform dispersion of Pt-Ru on the ZTCs, which enhanced the electro-catalytic activity of the Pt-Ru catalysts. The particle size of ZTC900-PR catalyst is about 3.4 nm, also peak current density from the CV plot is $12.5mA/cm^2$. Therefore, electro-catalytic activity of the ZTC900-PR catalyst is higher than those of ZTC1000-PR catalyst.

Growth of vertically aligned carbon nanotubes on a large area Si substrates by thermal chemical vapor deposition

  • Lee, Cheol-Jin;Park, Jung-Hoon;Son, Kwon-Hee;Kim, Dae-Woon;Lyu, Seung-Chul;Park, Sung-Hoon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.212-212
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    • 2000
  • Since the first obserbvation of carbon nanotubes, extensive researches have been done for the synthesis using arc discharge, laser vaporization, and plasma-enhanced chemical vapor deposition. Carbon nanotubes have unique physical and chemical properties and can allow nanoscale devices. Vertically aligned carbon nanotubes with high quality on a large area is particularly important to enable both fundamental studies and applications, such as flat panel displays and vacuum microelectronics. we have grown vertically aligned carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition using C2H2 gas at 750-950$^{\circ}C$. we deposited catalytic metal on Si susbstrate using thermal evaporation. The nanotubes reveal highly purified surface. The carbon nanotubes have multi-wall structure with a hollow inside and it reveals bamboo structure agreed with base growth model. Figure 1 shows SEM micrograph showing vertically aligned carbon nanotubes whih were grown at 950$^{\circ}C$ on a large area (20mm${\times}$30mm) of Si substrates. Figure 2 shows TEM analysis was performed on the carbon nanotubes grown at 950$^{\circ}C$ for 10 min. The carbon nanotubes are multi-wall structure with bamboo shape and the lack of fringes inside the nanotube indicates that the core of the structure is hollow. In our experiment, carbon nanotubes grown by the thermal CVD indicate base growth model.

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Development of the Large-area Au/Pd Transfer-printing Process Applying Both the Anti-Adhesion and Adhesion Layers (접착방지막과 접착막을 동시에 적용한 대면적 Au/Pd 트랜스퍼 프린팅 공정 개발)

  • Cha, Nam-Goo
    • Korean Journal of Materials Research
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    • v.19 no.8
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    • pp.437-442
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    • 2009
  • This paper describes an improved strategy for controlling the adhesion force using both the antiadhesion and adhesion layers for a successful large-area transfer process. An MPTMS (3-mercaptopropyltrimethoxysilane) monolayer as an adhesion layer for Au/Pd thin films was deposited on Si substrates by vapor self assembly monolayer (VSAM) method. Contact angle, surface energy, film thickness, friction force, and roughness were considered for finding the optimized conditions. The sputtered Au/Pd ($\sim$17 nm) layer on the PDMS stamp without the anti-adhesion layer showed poor transfer results due to the high adhesion between sputtered Au/Pd and PDMS. In order to reduce the adhesion between Au/Pd and PDMS, an anti-adhesion monolayer was coated on the PDMS stamp using FOTS (perfluorooctyltrichlorosilane) after $O_2$ plasma treatment. The transfer process with the anti-adhesion layer gave good transfer results over a large area (20 mm $\times$ 20 mm) without pattern loss or distortion. To investigate the applied pressure effect, the PDMS stamp was sandwiched after 90$^{\circ}$ rotation on the MPTMS-coated patterned Si substrate with 1-${\mu}m$ depth. The sputtered Au/Pd was transferred onto the contact area, making square metal patterns on the top of the patterned Si structures. Applying low pressure helped to remove voids and to make conformal contact; however, high pressure yielded irregular transfer results due to PDMS stamp deformation. One of key parameters to success of this transfer process is the controllability of the adhesion force between the stamp and the target substrate. This technique offers high reliability during the transfer process, which suggests a potential building method for future functional structures.