• 센서학회지
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• 제17권4호
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• pp.289-294
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• 2008

The purpose of this study is to materialize the viscosity sensor by using the SH-SAW sensor of which the center frequency is operated at higher than 50 MHz. In order to measure the viscosity, SAW sensor of which the center frequency is operated at 100 MHz is developed. By using the developed sensor, phase shift, delay time, insertion loss, and frequency variation are measured at different viscosity. The result shows that the phase shift difference between the viscosity variations is such that the difference between the distilled water and the 100 % glycerol solution is approximately $45^{\circ}$, the change of the insertion loss is approximately 9 dB, and the difference of frequency variation is approximately 5.9 MHz. Therefore, it is shown that viscosity of unknown solution can be measured with the surface acoustic wave sensor.

• 전기학회논문지
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• 제59권2호
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• pp.390-396
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• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2010년도 추계학술대회 논문집
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• pp.537-537
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• 2010

High precision sensing is very important in various technologies. Especially, it is more important when it were applied to nano/micro meter level's sensing like AFM, storage, etc. And capacitive sensing is widely used method. To improve the measurement efficiency, many signal conditioners were studied and one of them was surface acoustic wave (SAW) device. SAW device is very widely used as a high frequency bandwidth filter. Due to the reflective characteristic of high frequency, the response of SAW device contains both propagative and reflective signal at the external impedance. In this paper, we used SAW device as signal conditioner of capacitive sensor. And high precision gap measurement was executed using capacitive load. Reference signal was reflective SAW response and the magnitude at the center frequency of SAW device by the change of impedance was checked. Finally, the attainable gap resolution was determined.

• 한국음향학회지
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• 제19권5호
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• pp.41-45
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• 2000

단결정 초격자 다층박막의 유효탄성계수를 표면탄성파 전파속도에 근거하는 두 가지 방법에 의하여 결정하였다. 첫째 방법은 구성층의 탄성계수로부터 초격자의 유효탄성계수를 계산하는 공식을 사용한다. 계산된 유효탄성계수로 계산한 기판 위 박막의 표면탄성파 전파속도와 선집속 초음파현미경으로 측정한 표면탄성파 전파속도를 비교하여 그 유효탄성계수를 검증한다. 둘째 방법은 선집속 초음파현미경으로 측정한 표면탄성파 전파속도 분산 데이터로부터 역산하여 초격자 다층박막의 유효탄성계수를 결정한다. 두 가지 방법을 TiN/NbN 초격자 다층박막에 적용하여 서로 잘 일치하는 결과를 얻었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.251-252
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• 2006

A development of surface acoustic wave gas sensor to detecting volatile gas has been observed by monitoring output signal as function of time onto the network analyzer. The SAW sensor with a center frequency of 200MHz was fabricated on $42^{\circ}$ S-T Quartz substrates. Using the gas chromatography column has been selectivity. Experimental results, which show the phase change of output signal under the absorption of volatile gas onto sensors, were presented. The proposed sensor has the properties of high sensitivity compare to the conventional SAW gas sensor and chemical selectivity. Thus, it is thought these results are applicable for use in sensor array of an high performance electronic nose system.

• 한국소음진동공학회논문집
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• 제20권5호
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• pp.437-443
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• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• 한국군사과학기술학회지
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• 제12권1호
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• pp.106-113
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• 2009

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.141-144
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• 2003

This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness $2.6{\mu}m$ was deposited (0001)-oriented sapphire by RF magnetron sputtering technique. IDTs (inter-digital transducers) electrodes were patterned upon SAW filter mask with solid finger structure unapodized using lift-off method on ZnO piezoelectric thin film. SAW propagation velocity was measured with the center frequency by HP 8753C network analyzer. A fabricated ZnO SAW filter exhibited a high propagation velocity of 5433 $^m/s$ and relatively insertion loss of -53.391dB at $\lambda=80{\mu}m$. The side-lobe attenuation of the center frequency was about 17dB. When the wavelength was $80{\mu}m$ $(\lambda/4=20{\mu}m)$, the center frequency was 67.907 MHz. $k^2$ (electromechanical coupling coefficient) was 15.84 %.

• 비파괴검사학회지
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• 제27권1호
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• pp.38-47
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• 2007

항공기 구조를 모사하여 일련의 리벳구멍을 갖는 AA2024-T3 박판 구조를 대상으로 음향방출(AE)을 이용하여 피로균열을 탐지하고, 표면초음파(SAW)를 이용하여 균열길이를 측정하였다. 누적 AE 발생수 곡선은 단균열(short crack)의 발생과 성장에 따라 일정한 간격을 두고 급격히 증가하는 계단식 형태로 나타났으나 피로균열의 성장은 지수함수적인 증가를 보였다. SAW를 이용한 균열길이 측정은 균열길이가 다른 13개의 균열에 대하여 실시하였고, 측정된 데이터를 이동식 현미경으로 측정한 결과와 비교하였다. 그 결과 1 mm 이하의 단균열의 크기를 표면초음파 방법으로 측정하는 것은 거의 불가능하였으나, 1 mm 이상의 균열에서는 비교적 높은 신뢰도로 균열길이 측정이 가능함을 확인함으로써 실용적인 측면에서 이 방법이 유효하게 사용될 수 있는 영역이 존재함을 알 수 있었다.

• 한국식품조리과학회지
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• 제22권3호통권93호
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• pp.299-306
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• 2006

The numerous varieties of coffee beans contain a wide range prices and qualities. While the varieties of green coffee beans can generally be distinguished by their appearance, this visual criterion is impossible after the roasting process. Therefore, we need to develop a classification method or device. In this study, the potential of a new type of electronic nose, fast gas chromatography based on a surface acoustic wave sensor(SAW), was evaluated for the classification of origins and blended commercial brands in roasted coffee beans. Eight blended commercial brands and the origins of four similarly roasted ground coffee beans(with no significant difference of color) were rapidly(90 sec/sample) classified. The reproductive results were easily understandable over the aroma image pattern by $VaporPrint^{TM}$. In conclusion, GC-SAW electronic nose can be applied to the classification of origins and commercial brands in roasted ground coffee beans and to e evaluation of the similarities and differences of volatile pattern between samples.