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Development of a SAW based Gyroscope  

Oh, Hae-Kwan (Ajou University)
Yun, Sung-Jin (ADD)
Lee, Kee-Keun (Ajou University)
Wang, Wen (Ajou University)
Yang, Sang-Sik (Ajou University)
Publication Information
Journal of the Korea Institute of Military Science and Technology / v.12, no.1, 2009 , pp. 106-113 More about this Journal
Abstract
This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.
Keywords
Coriolis Force; Surface Acoustic Wave; Self-Oscillation; SAW Oscillator; SAW Resonator;
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1 J. Soderkvist, 'Micromachined Gyroscopes', Sensors and Actuators A, Vol. 43, pp. 65-71, 1994   DOI   ScienceOn
2 V. K. Varadan, W. D. Suh and P. B. Xavier, 'Design and Development of a MEMS-IDT Gyroscope', Smart Materials and Structures, Vol. 9, pp. 898-905, 2000   DOI   ScienceOn
3 S. A. Sarapuloff, G. A. Skipkovskii and J. W. Rhim, 'Inertial Effects in Surface and Bulk Elastic Waves and Possibility of Their Use in High-G Solid-State Micro Gyro', The Int. Conf. on Integrated Navigation Systems, pp. 355-361, 2005
4 N. Yazdi, F. Ayazi and K. Najafi, 'Michromachined Inertial Sensors', Proc. IEEE, Vol. 86, pp. 1640-1659, 1998   DOI   ScienceOn
5 P. V. Write, 'Analysis and Design of Low Loss SAW Devices with Internal Reflections using Coupling-of-Mode Theory', IEEE Ultrasonics Symp., pp. 141-152, 1989
6 J. W. Rhim, C. B. Jeon, H. K. Moon, J. S. Lee and S. W. Lee, 'High-G Micro Rate Sensor for Smart Munitions', Korea Institute of Science and Technology, Report No. A114, Nov. 2003
7 W. Geiger, B. Folkmer, J. Merz, H. Sandmaier and W. Tang, 'A New Sillcon Rate Gyroscope Systems', The IEEE Int. Conf. on Micro Electro Mechanical System, pp. 615-620, 1998   DOI
8 K. Maenaka and T. Shzawa, 'A Study of Silicom Angular Rate Sensors using Anisotropic Etching Technology', Sensors and Actuators A, Vol. 43, pp. 72-77, 1994   DOI   ScienceOn
9 M. Kurosawa, Y. Fukula and M. Takasaki, 'A Surface Acoustic Wave Gyro Sensor', Sensors and Actuators A, Vol. 66, pp. 33-39, 1998   DOI   ScienceOn
10 M. Hashimoto, C. Cabuz, K. Minami and M. Esahi, 'Silicon Resonant Angular Rate Sensor using Electromagnetic Excitation and Capacitive Detection', Journal of Micromechanics and Microengineering, Vol. 5, pp. 219-225, 1995   DOI   ScienceOn
11 T. E. Parker and G. K. Montress, 'Precision Surface-Acoustic-Wave(SAW) Oscillator', IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 35(3), pp. 342-364, 1988   DOI   ScienceOn