Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05c
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- Pages.141-144
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- 2003
Fabrication of a SAW Filter Using a ZnO Thin Film deposited by RF Magnetron Sputtering
RF 마그네트론 스퍼터링법으로 증착된 ZnO 박막 SAW 필터의 제작
- Jung, Eun-Ja (Kyungpook National Uni.) ;
- Jang, Cheol-Yeong (Kyungpook National Uni.) ;
- Jung, Young-Chul (Gyeongju Uni.) ;
- Choi, Hyun-Chul (Kyungpook National Uni.) ;
- Lee, Yong-Hyun (Kyungpook National Uni.)
- Published : 2003.05.16
Abstract
This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness