Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Design of Capacitive Displacement Sensor and Gap Measurement with High Precision Using Surface Acoustic Wave Device

표면 탄성파 장치를 응용한 용량 성 변위센서의 설계 및 초정밀 간극 측정

  • Received : 2009.11.10
  • Accepted : 2010.02.03
  • Published : 2010.05.20
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Abstract

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

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References

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