Design of Capacitive Displacement Sensor and Gap Measurement with High Precision Using Surface Acoustic Wave Device |
Kim, Jae-Geun
(연세대학교 대학원 기계공학과)
Lee, Taek-Joo (아이티에프(주)) Lim, Soo-Cheol (삼성전기(주)) Park, No-Cheol (연세대학교 기계공학과) Park, Young-Pil (연세대학교 기계공학과) Park, Kyoung-Su (연세대학교 기계공학과) |
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