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http://dx.doi.org/10.5050/KSNVE.2010.20.5.437

Design of Capacitive Displacement Sensor and Gap Measurement with High Precision Using Surface Acoustic Wave Device  

Kim, Jae-Geun (연세대학교 대학원 기계공학과)
Lee, Taek-Joo (아이티에프(주))
Lim, Soo-Cheol (삼성전기(주))
Park, No-Cheol (연세대학교 기계공학과)
Park, Young-Pil (연세대학교 기계공학과)
Park, Kyoung-Su (연세대학교 기계공학과)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.20, no.5, 2010 , pp. 437-443 More about this Journal
Abstract
SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.
Keywords
Surface Acoustic Wave(SAW); Capacitive Load; Gap Measurement; Sensor;
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