• Title/Summary/Keyword: Substrate loss

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Dielectric and Electric Properties of Nb Doped PZT Thin Films by Sol-gel Technique (솔-젤법으로 제조한 PZT 박막의 Nb 첨가에 따른 유전 및 전기적 특성)

  • 김창욱;김병호
    • Journal of the Korean Ceramic Society
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    • v.33 no.10
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    • pp.1101-1108
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    • 1996
  • No-doped PZT thin films have been fabricated on Pt/Ti/SiO2/Si substrate using Sol-Gel technique. A fast annealing metho (three times of intermediate and final annealing) was used for the preparation of multi-coated 1800$\AA$ thick Nb-doped PZT thin films. As Nb doping percent was increased leakage current was lowered approximately 2 order but dielectic properties were degraded due to the appearance of pyrochlore phase and domain pinning. Futhermore the increase of the final annealing temperature up to 74$0^{\circ}C$lowered the pyrochlore phase content resulting in enhancing the dielectric properties of the Nb doped films. The 3%-Nb doped PZT thin films with 5% excess Pb showed a capacitance density of 24.04 fF/${\mu}{\textrm}{m}$2 a dielectric loss of 0.13 a switchable polarization of 15.84 $\mu$C/cm2 and a coercive field of 32.7 kV/cm respectively. The leakage current density of the film was as low as 1.47$\times$10-7 A/cm2 at the applied voltage of 1.5 V.

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Design and Fabrication of Circularly Polarized Antenna for 2.45GHz RFID Application (2.45GHz RFID용 원형편파안테나의 설계 및 제작)

  • Park, Jeong-Heum
    • Journal of the Institute of Electronics Engineers of Korea TE
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    • v.42 no.4
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    • pp.63-68
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    • 2005
  • In this paper, the single coaxial fed and circularly polarized patch antenna for the RFID system in 2.45GHz ISM band has been fabricated. The simulation by HFSS, electro-magnetic field simulator was executed in order to decide the location of feed which is difficult to be analysed. The simulated result has the same tendency as the measured one in the view of input impedance with the variation of feed location. VSWR of fabricated antenna is low($\leq$1.2) even in comparatively high dielectric loss epoxy substrate(FR4), and this value is enough for the application of RFID reader antenna.

A 77 GHz 3-Stage Low Noise Amplifier with Cascode Structure Utilizing Positive Feedback Network using 0.13 μm CMOS Process

  • Lee, Choong-Hee;Choi, Woo-Yeol;Kim, Ji-Hoon;Kwon, Young-Woo
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.8 no.4
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    • pp.289-294
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    • 2008
  • A 77 GHz 3-stage low noise amplifier (LNA) employing one common source and two cascode stages is developed using $0.13{\mu}m$ CMOS process. To compensate for the low gain which is caused by lossy silicon substrate and parasitic element of CMOS transistor, positive feedback technique using parasitic inductance of bypass capacitor is adopted to cascode stages. The developed LNA shows gain of 7.2 dB, Sl1 of -16.5 dB and S22 of -19.8 dB at 77 GHz. The return loss bandwidth of LNA is 71.6 to 80.9 GHz (12%). The die size is as small as $0.7mm\times0.8mm$ by using bias line as inter-stage matching networks. This LNA shows possibility of 77 GHz automotive RADAR system using $0.13{\mu}m$ CMOS process, which has advantage in cost compared to sub-100 nm CMOS process.

A Compact CPW-fed Antenna for 2.4 GHz WLAN applications (2.4 GHz 무선랜 대역용 CPW 소형 안테나)

  • Choi, In-Tae;Shin, Ho-Sub
    • The Journal of the Korea institute of electronic communication sciences
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    • v.10 no.11
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    • pp.1245-1250
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    • 2015
  • In this paper, a compact CPW-fed antenna for 2.45 GHz band WLAN applications is presented. The proposed antenna which has a geometry of folded stub and slot is fabricated into an inexpensive FR-4 substrate that has a dielectric constant of 4.2 and a thickness of 1.0 mm with optimized parameters obtained by simulation, and then measured. From measured result, we confirmed available operation as antenna for WLAN applications by obtaining the return loss level of < -10 dB in the frequency band of 2.4-2.484 GHz.

Fabrication of $(Pb,La)TiO_3$ Thin Films by Pulsed Laser Ablation (레이저 어블레이션에 의한 $(Pb,La)TiO_3$ 박막의 제작)

  • Park, Jeong-Heum;Kim, Joon-Han;Lee, Sang-Yeol;Park, Chong-Woo;Park, Chang-Yub
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.2
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    • pp.133-137
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    • 1998
  • $(Pb_{0.72}La_{0.28})Ti_{0.93}O_3(PLT(28))$ thin films were fabricated by pulsed laser deposition. PLT films deposited on $Pt/Ti/SiO_2/Si$ at $600^{\circ}C$ had a preferred orientation in (111) plane and at $550^{\circ}C$ had a (100) preferred orientation. We found that (111) preferred oriented films had well grown normal to substrate surface. This PLT(28) thin films of $1{\mu}m$ thickness had dielectric properties of ${\varepsilon}_r$=1300, dielectric $loss{\fallingdotseq}0.03 $. and had charge storage density of 10 [${\mu}C/cm^2$] and leakage current density of less than $10^{-6}[A/cm^2]$ at 100[kV/cm]. These results indicated that the PLT(28) thin films fabricated by pulsed laser deposition are suitable for DRAM capacitor application.

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Preparation and Dielectric Properties of the $PbTiO_3$ Thin Film by Sol-Gel Method (Sol-Gel법에 의한 $PbTiO_3$ 박막의 제조 및 유전 특성)

  • Chung, Jang-Ho;Park, In-Gil;Ryu, Ki-Won;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1434-1436
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    • 1996
  • In this study, ferroelectric $PbTiO_3$ thin films were deposited on the Pt/$SiO_2$/Si substrate by Sol-Gel method. $PbTiO_3$ stock solution was made and spin-cooled at 4000[rpm] for 30[sec.]. Coated specimens were dried at $400[^{\circ}C]$ for 10[min.] and then annealed at $500{\sim}800[^{\circ}C]$ for 1 hour. Annealing temperature were examined to optimize micro structural and dielectric properties of the films. The ferroelectric perovskite phase was observed in the file annealed at $700[^{\circ}C]$ for 1 hour. In the case of $PbTiO_3$ thin films annealed at $700[^{\circ}C]$ for hour, dielectric constant and dielectric loss showed the good value of 324, 2.0[%], respectively.

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Dielectric Properties of the PZT Thin Film Capacitors for DRAM Application (DRAM용 PZT 박막 캐패시터의 유전특성)

  • Chung, Jang-Ho;Park, In-Gil;Lee, Sung-Gap;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 1995.11a
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    • pp.335-337
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    • 1995
  • In this study, $Pb(Zr_{0.52}Ti_{0.48})O_3$ ceramic thin films were fabricated from an alkoxide-based by Sol-Gel method. $Pb(Zr_{0.52}Ti_{0.48})O_3$ stock solution was made and spin-coated on the $Pt/SiO_2/Si$ substrate at 4000[rpm] for 30[sec]. Coated specimens were dried at 400[$^{\circ}C$] for 10 [min]. The coating process was repeated 4 times and then heat-treated at 500$\sim$800[$^{\circ}C$], 1 hour. The final thickness of the thin films were about 3000[A]. The crystallinity and microstructure of the thin films were investigated for varing the sintering condition. The ferroelectric perovskite' phases precipitated under the sintering of 700[$^{\circ}C$] for 1 hours. In the $Pb(Zr_{0.52}Ti_{0.48})O_3$ thin films sintered at 700[$^{\circ}C$] for 1 hour, dielectric constant and dielectric loss were 2133, 2.2[%] at room temperature, respectively. $Pb(Zr_{0.52}Ti_{0.48})O_3$ thin film capacitors having good dielectric and electrical properties are expected for the application to the dielectric material of DRAM.

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Optimization of Slanted and Chirp IDT Configurations for Realizing and Propagating Surface Acoustic Wave with Wide Bandwidth (광대역 표면탄성파 구현을 위한 slanted 및 chirp IDT의 최적화)

  • Lee, Tae-Yoon;Fu, Chen;Lee, Kee-Keun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.62 no.12
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    • pp.1730-1736
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    • 2013
  • Slanted and chirp interdigital transducer(IDT) configurations were studied for generating the surface acoustic wave(SAW) with wide bandwidths on a piezoelectric substrate. These devices can be applied to manipulate optical path of light along the waveguide, ultimately used for optical switches and holographic image implementation. Prior to fabrication, the coupling of modes(COM) modeling and simulation were performed to extract optimal design parameters. The optimally designed wideband device showed wide bandwidth of 30MHz, low insertion loss of -25dB, and abrupt side suppression ratio (SSR). Several design conditions were determined during device implementation, such as slanted angle, aperture length, number of fingers, and central frequencies of IDTs. These factors were experimentally analyzed and described in details in this paper.

Characterization of Inkjet-Printed Silver Patterns for Application to Printed Circuit Board (PCB)

  • Shin, Kwon-Yong;Lee, Minsu;Kang, Heuiseok;Kang, Kyungtae;Hwang, Jun Young;Kim, Jung-Mu;Lee, Sang-Ho
    • Journal of Electrical Engineering and Technology
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    • v.8 no.3
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    • pp.603-609
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    • 2013
  • In this paper, we describe the analysis of inkjet-printed silver (Ag) patterns on epoxy-coated substrates according to several reliability evaluation test method guidelines for conventional printed circuit boards (PCB). To prepare patterns for the reliability analysis, various regular test patterns were created by Ag inkjet printing on flame retardant 4 (FR4) and polyimide (PI) substrates coated with epoxy for each test method. We coated the substrates with an epoxy primer layer to control the surface energy during printing of the patterns. The contact angle of the ink to the coated epoxy primer was $69^{\circ}$, and its surface energy was 18.6 $mJ/m^2$. Also, the substrate temperature was set at $70^{\circ}C$. We were able to obtain continuous line patterns by inkjet printing with a droplet spacing of $60{\mu}m$. The reliability evaluation tests included the dielectric withstanding voltage, adhesive strength, thermal shock, pressure cooker, bending, uniformity of line-width and spacing, and high-frequency transmission loss tests.

Study on the characteristics of low loss 4H-SiC LDIMOSFET implemented on semi-insulating substrate (반절연 기판을 이용한 저손실 4H-SiC LDIMOSFET의 동작 특성 연구)

  • Kim, Hyoung-Woo;Kim, Ki-Hyun;Lee, Kyoung-Ho;Kim, Min-Sung;Seo, Kil-Soo
    • Proceedings of the KIEE Conference
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    • 2015.07a
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    • pp.1143-1144
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    • 2015
  • 반절연 4H-SiC 기판을 이용한 LDIMOSFET에 대해 전류 통전 영역의 길이에 따른 항복전압 및 순방향 특성을 분석하였다. 또한, 온도 변화에 따른 역방향 상태 및 벌크 트랩 유무에 따른 누설전류 특성을 분석하였다. 전류 통전 영역의 두께를 $0.2{\mu}m$로 고정시키고 농도를 $1{\times}10^{15}/cm^3{\sim}1{\times}10^{17}/cm^3$ 까지 변화하였을 때 $2{\times}10^{16}/cm^3$인 경우에 1710V로 가장 높은 항복전압을 나타내었으며, 농도가 $2{\times}10^{16}/cm^3$ 이상인 경우 항복전압은 감소하는 특성을 나타내었다. 제안한 소자의 순방향 특성에 대해서도 simulation을 통해 특성을 분석하였으며, 항복전압이 1710V인 경우 온 저항은 $0.351{\Omega}-cm^2$를 나타내었다. 또한 벌크 트랩이 있는 경우에 대해 온도 변화 및 전류 통전 영역의 길이 변화에 따른 역방향 바이어스 상태에서의 누설전류 특성 변화에 대해서도 분석하였다.

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