• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.321-328
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• 2011

The 30 nm-thick Ni layers was deposited on a flexible polyimide substrate with an e-beam evaporation. Subsequently, we deposited a Si layer using a catalytic CVD (Cat-CVD) in a hydride amorphous silicon (${\alpha}$-Si:H) process of $T_{s}=180^{\circ}C$ with varying thicknesses of 55, 75, 145, and 220 nm. The sheet resistance, phase, degree of the crystallization, microstructure, composition, and surface roughness were measured by a four-point probe, HRXRD, micro-Raman spectroscopy, FE-SEM, TEM, AES, and SPM. We confirmed that our newly proposed Cat-CVD process simultaneously formed both NiSi and crystallized Si without additional annealing. The NiSi showed low sheet resistance of < $13{\Omega}$□, while carbon (C) diffused from the substrate led the resistance fluctuation with silicon deposition thickness. HRXRD and micro-Raman analysis also supported the existence of NiSi and crystallized (>66%) Si layers. TEM analysis showed uniform NiSi and silicon layers, and the thickness of the NiSi increased as Si deposition time increased. Based on the AES depth profiling, we confirmed that the carbon from the polyimide substrate diffused into the NiSi and Si layers during the Cat-CVD, which caused a pile-up of C at the interface. This carbon diffusion might lessen NiSi formation and increase the resistance of the NiSi.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.2
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• pp.89-95
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• 1995

The structure of boron ion-implanted pn junctio in the vacancy-doped p-type HgCdTe was investigated with the differential Hall measurement. The as-implanted junction showed the electron concentration as high as 1${\times}10^{18}/cm^{3}$ and the junction depth of 0.6.mu.m. When the HgCdTe junction was heated in oven, the electron concentration near the junction decreased and the junction depth increased as the annealing temperature and time increased. The junction structure after the thermal annealing was n$^{+}$/n$^{-}$/p. For the 200.deg. C 20min annealed sample, the electron mobility was 10$^{4}cm^{2}/V{\cdot}$s near the surface(n$^{+}$), and was larger thatn 10$^{5}cm^{2}/V{\cdot}$s near the junction(n$^{+}$). The junction formation mechanism is conjectured as follows. When HgCdTe is ion-implanted, the ion energy generates crystal defecis and displaced Hg atoms HgCdTe is ion-implanted, the ion energy generates crystal defecis and displaced Hg atoms near the surface. The displaced Hg vacancies diffuse in easily by the thernal treatment and a fill the Hg vacancies in the p-HgCdTe substrate. With the Hg vacancies filled completely, the GfCdTe substrate becomes n-type because of the residual n-type impurity which was added during the wafer growing. Therefore, the n$^{+}$/n$^{-}$/p regions are formed by crystal defects, residual impurities, and Hg vacancies, respectively.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.3
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• pp.83-88
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• 2020

The evolution of smartphones has led to numerous researches in the mechanical behavior of flexible devices. Due to the nano-size of the thin flexible film, nanoindentation is widely used to evaluate its mechanical behaviors, such as elastic modulus, and hardness. However, the commonly used Oliver-Pharr method is not suited for analyzing the indentation force-depth curves of hard films on soft substrates, as the effects of soft substrate is not considered theoretically. In this study, the elastic modulus of the thin film was evaluated with references to other reported models which include the substrate effect, and with calibration of the indentation depth for the pile-ups between the indenter and test surface. We fabricated test samples by deposition of amorphous metal film on polyimide and silicon wafers for verification of modified models.

• Journal of Environmental Science International
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• v.21 no.12
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• pp.1455-1462
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• 2012

The vertical distributions of nitrifying bacteria in aerobic fixed biofilm were investigated to evaluate the relationship between nitrification performance and microbial community at different HRT. Fluorescent in situ hybridization (FISH) and portable ion selective microelectrode system were adopted to analyze microbial communities and ions profiles according to the biofilm depth. Cilia media packed MLE (Modified Ludzack-Ettinger) like reactor composed of anoxic, aerobic I/II was operated with synthetic wastewater having COD 200 mg/L and $NH_4{^+}$-N mg/L at HRT of 6 hrs and 4 hrs. Total biofilm thickness of aerobic I, II reactor at 4 hrs condition was over two times than that of 6 hrs condition due to the sufficient substrate supply at 4 hrs condition (6 hrs; aerobic I 380 ${\mu}m$ and II 400 ${\mu}m$, 4 hrs; aerobic I 830 ${\mu}m$ and II 1040 ${\mu}m$). As deepen the biofilm detection point, the ratio of ammonia oxidizing bacteria (AOB) was decreased while the ratio of nitrite oxidizing bacteria (NOB) was maintained similar distribution at both HRT condition. The ratio of AOB was higher at 4 hrs than 6 hrs condition and $NH_4{^+}$-N removal efficiency was also higher at 4 hrs with 89.2% than 65.4% of 6 hrs. However, the ratio of NOB was decreased when HRT was reduced from 6 hrs to 4 hrs and $NO_2{^-}$-N accumulation was observed at 4 hrs condition. Therefore, it is considered that insufficient HRT condition could supply sufficient substrate and enrichment of AOB in all depth of fixed biofilm but cause decrease of NOB and nitrite accumulation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.4
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• pp.308-317
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• 2007

We fabricated thermally-evaporated 10 nm-Ni/(poly)Si and 10 nm-$Ni_{0.5}Co_{0.5}$/(Poly)Si structures to investigate the microstructure of nickel silicides at the elevated temperatures required lot annealing. Silicides underwent rapid annealing at the temperatures of $600{\sim}1100^{\circ}C$ for 40 seconds. Silicides suitable for the salicide process formed on top of both the single crystal silicon actives and the polycrystalline silicon gates. A four-point tester was used to investigate the sheet resistances. A transmission electron microscope and an Auger depth profilescope were employed for the determination of vortical microstructure and thickness. Nickel silicides with cobalt on single crystal silicon actives and polycrystalline silicon gates showed low resistance up to $1100^{\circ}C$ and $900^{\circ}C$, respectively, while the conventional nickle monosilicide showed low resistance below $700^{\circ}C$. Through TEM analysis, we confirmed that a uniform, $10{\sim}15 nm$-thick silicide layer formed on the single-crystal silicon substrate for the Co-alloyed case while a non-uniform, agglomerated layer was observed for the conventional nickel silicide. On the polycrystalline silicon substrate, we confirmed that the conventional nickel silicide showed a unique silicon-silicide mixing at the high silicidation temperature of $1000^{\circ}C$. Auger depth profile analysis also supports the presence of this mixed microstructure. Our result implies that our newly proposed NiCo-alloy composite silicide process may widen the thermal process window for the salicide process and be suitable for nano-thick silicides.

• Journal of Environmental Science International
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• v.31 no.10
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• pp.825-832
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• 2022

This study aimed to explore companion planting to improve vegetable productivity on extensive green roofs through urban agriculture with limited substrate depth. From May to July 2021, the study conducted on the rooftop to evaluate the effects of marigold (Tagetes patula) planting ratio on the growth and pest control of cabbage (Brassica campestris). The experiment plot measured 1 m in width × 1 m in length × 0.25 m in height and 0.2 m in substrate depth. Fifteen plots were planted in varying proportions of cabbage and marigold for three repetitions per treatment: cabbage control (CC), 2:1(C₂M₁), 1:1(C₁M₁), 1:2(C₁M₂), and marigold control (MC). We found that companion planting marigolds with cabbage significantly increased cabbage growth and reduced pest infestation. The study revealed that C₁M₁, when cabbage and marigold have the same proportion, is an efficient companion planting ratio. Companion planting, in which non-crop vegetation manages pests and increases crop productivity, improves natural pest control and preserves biodiversity on rooftop urban agriculture.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.6
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• pp.63-70
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• 1989

The ion beam extracted from the AuGe liquid metal ion source was implanted into GaAs substrate. The surface composition and the structure of ion implanted samples were investigated by AES, RHEED, SEM and EPMA. The depth profiles measured by AES were compared with the results of Monte Carlo simulation based on the two-body collision. As the results of AuGe ion implantation the preferential sputtering of As were revealed by AES and EPMA, and the outdiffusion of Ga and Ge was investigated by 300$^{circ}C$ annealing. The Au and Ge depth profiles measured by AES agreed with the results of Monte Carlo simulation based on the two-body collision.

• Ecology and Resilient Infrastructure
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• v.4 no.4
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• pp.216-225
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• 2017

We assessed the microhabitat conditions of three fish species (black shinner Pseudopungtungia nigra, striped shinner Pungtungia herzi, Korean shinner Coreoleuciscus splendidus) considering various stream order in the Geumgang River Basin. A total of 1,275 individuals were collected from 19 sites. And the microhabitat condition was assessed measuring flow velocity, water depth and substrate size at each site. The highest relative frequencies for P. herzi, C. splendidus and P. nigra were calculated 100% (n = 310), 78.9% (n = 784) and 47.3% (n = 181) respectively. P. herzi appeared in all streams, irrespective of their stream order; however, appearance in streams with the $2^{nd}$ order or lower was found to be scarcer than in the ones with the $3^{rd}$ order or higher. On the other hand, P. nigra and C. splendidus didn't appear in streams with the $2^{nd}$ order or lower. When it comes to P. nigra, the ones with 7 to 8 cm in length most frequently appeared. They inhabited streams, mainly, with 0.2 to $0.4m\;s^{-1}$ and 0.5 m in velocity and water depth, respectively. The three species all preferred runs as types of habitats with lots of coarse gravels-cobbles. P. herzi, the ones with 5 cm or shorter in length most frequently appeared. They inhabited streams, mainly, with 0 to $0.3m\;s^{-1}$ and 0.4 m in velocity and water depth, respectively. C. splendidus with 7 to 8 cm in length occupied the majority of them. They appeared in streams, mainly, with $0.9m\;s^{-1}$or higher and 0.3 m in velocity and water depth.

• Journal of Korean Society on Water Environment
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• v.39 no.5
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• pp.396-412
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• 2023

Species from the mayfly genus Ephemera (Order Ephemeroptera) was assessed for their physical microhabitat suitability (namely E. strigata, E. separigata, and E. orientalis-sachalinensis). Probability distribution models (Exponential, Normal, Lognormal, Logistic, Weibull, Gamma, Beta, and Gumbel) based on the data collected from 23,957 sampling units of 6,787 sites in Korea from 2010 to 2021 were used. Mode and standard deviation calculated from the best-fitting models to species distribution along a water depth gradient were 265 cm and 159 cm in E. orientalis-sachalinensis; 10 cm and 83 cm in E. strigata; 20 cm and 15 cm in E. separigata, respectively. The current velocity gradient was 22 cm/s and 40 cm/s in E. orientalis-sachalinensis; 60 cm/s and 53 cm/s in E. strigata; 82 cm/s and 25 cm/s in E. separigata, respectively. The mean diameter (phi scale) of substrate grains were -3.6 and 2.2 in E. orientalis-sachalinensis; -7.4 and 1.5 in E. strigata; -5.8 and 0.9 in E. separigata, respectively. Habitat suitability range of E. orientalis-sachalinensis was estimated to be 161~369 cm (water depth), 5~44 cm/s (current velocity), -5.2~-2.0 (mean diameter); 3~34 cm (water depth), 36~94 cm/s (current velocity), -8.1~-6.3 (mean diameter) for E. strigata; 12~32 cm (water depth), 63~96 cm/s (current velocity), -6.3~-5.2 (mean diameter) for E. separigata. In relative comparison, E. orientalis-sachalinensis was estimated to be rheophobic, eurybathophilic, and eurypsephophilic; E. strigata to be euryrheophilic, bathophobic, and lithophilic; E. separigata to be stenomesorheophilic, stenobathophobic, stenolithophilic.

• Proceedings of the KIEE Conference
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• 2001.11a
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• pp.16-19
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• 2001

DLC films are deposited using a modified FCVA system. Carbon amorphous networks, chemical bonding states, $sp^3$ fraction, interfaces, and structures are studied as a function of substrate voltage ($0{\sim}-250V$). The $sp^3$ content in the films is evaluated by analyzing the XPS spectra(C1s). The structural properties of the surface, bulk, and interfacial layers in DLC/Si systems are quantitatively analyzed by employing XRR method. As the substrate voltage is increased, the $sp^3$ fraction is decreased by means of XPS and Raman spectroscopy. In addition, the structural properties (interfacial layer, contamination layer, and sp3 fraction) derived from XPS depth profile are relatively correlated with the XRR results.