• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.10
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• pp.1-10
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• 2000

A rigorous modeling of ultra-low energy implantation is becoming increasingly more important as devices shrink to deep submicron dimensions. In this paper, we have developed an efficient three-dimensional Monte Carlo ion implantation model based on a modified Binary Collision Approximation(BCA). To this purpose, the modified electronic stopping model and the multi-body collision model have been taken into account in this simulator. The dopant and damage profiles show very good agreement with SIMS(Secondary Ion Mass Spectroscopy) data and RBS(Rutherford Backscattering Spectroscopy) data, respectively. Moreover, the ion distribution replica method has been implemented into the model to get a computational efficiency in a 3D simulation, and we have calculated the 3D Monte Carlo simulation into the topographically complex structure.

• Journal of Periodontal and Implant Science
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• v.47 no.1
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• pp.30-40
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• 2017

Purpose: Optical coherence tomography (OCT) is a noninvasive diagnostic technique that may be useful for both qualitative and quantitative analyses of the periodontium. Micro-computed tomography (micro-CT) is another noninvasive imaging technique capable of providing submicron spatial resolution. The purpose of this study was to present periodontal images obtained using ex vivo dental OCT and to compare OCT images with micro-CT images and histologic sections. Methods: Images of ex vivo canine periodontal structures were obtained using OCT. Biologic depth measurements made using OCT were compared to measurements made on histologic sections prepared from the same sites. Visual comparisons were made among OCT, micro-CT, and histologic sections to evaluate whether anatomical details were accurately revealed by OCT. Results: The periodontal tissue contour, gingival sulcus, and the presence of supragingival and subgingival calculus could be visualized using OCT. OCT was able to depict the surface topography of the dentogingival complex with higher resolution than micro-CT, but the imaging depth was typically limited to 1.2-1.5 mm. Biologic depth measurements made using OCT were a mean of 0.51 mm shallower than the histologic measurements. Conclusions: Dental OCT as used in this study was able to generate high-resolution, cross-sectional images of the superficial portions of periodontal structures. Improvements in imaging depth and the development of an intraoral sensor are likely to make OCT a useful technique for periodontal applications.

• Journal of IKEEE
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• v.9 no.1 s.16
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• pp.57-64
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• 2005

This paper presents a built-in current sensor(BICS) that detects defects in CMOS integrated circuits using the current testing technique. This circuit employs a cross-coupled connected PMOS transistors, it is used as a current comparator. The proposed circuit has a negligible impact on the performance of the circuit under test (CUT) and high speed detection time. In addition, in the operation of the normal mode, the BlCS does not have dissipation of extra power, and it can be applied to the deep submicron process. The validity and effectiveness are verified through the HSPICE simulation on circuits with defects. The area overhead of a BlCS versus the entire chip is about 9.2%. The chip was fabricated with Hynix $0.35{\mu}m$ 2-poly 4-metal N-well CMOS standard technology.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.350-350
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• 2008

최근 이동 통신 분야에서 전자기기들의 고주파화와 소형화에 대한 관심이 높아지면서 고주파 소자로서 필수적으로 사용 되어온 디커플링 캐패시터도 이 두 가지 요구를 만족시키기 위해 기존의 표면 실장형에서 평판 형태인 기판 내장형 캐패시터로 발전해 가고 있다. 이를 실현하기 위한 공정법으로 Low Temperature Co-fired Ceramics (LTCCs)와 polymer composite등의 연구가 진행되고 있으나 LTCCs는 높은 공정온도에 의한 내부 확산과 서로 다른 열팽창 계수에 의한 소결후의 수축과 같은 단점들을 가지고 있으며 polymer composite 은 비교적 낮은 공정온도에도 불구하고 유전특성과 방열특성이 우수하지 못한 문제점을 가지고 있었다. 이러한 단점들을 극복하기 위해 Aerosol Deposition Method (ADM)를 주목하게 되었다. 이 공정 법은 상온 저 진공 분위기에서 세라믹 분말을 기판에 고속 분사시켜 기공과 균열이 거의 없는 치밀한 나노구조의 세라믹을 제작하는 새로운 코팅기술이다. 본 연구에서는 고주파용 디커플링 캐패시터의 응용을 위하여 상온에서 높은 유전율을 가지며 강유전체 물질인 $BaTiO_3$를 사용하였다. 출발원료로서 0.45 ${\mu}m$크기의 $BaTiO_3$ 분말을 이용하여 상온에서 submicron에서 수 micron의 두께로 성막하였다. 그러나 ADM으로 $BaTiO_3$ 막을 성막할 경우 유전율이 100이하로 급격히 떨어지는 현상이 기존 연구에서 보고되어 왔으며 본 연구에서도 이를 확인하였다. 디커플링 캐패시터의 밀도를 높이기 위해서 유전체의 유전율을 높이거나 두께를 앓게 하는 방법이 있으나 이번 연구에서는 박막화에 초점을 맞추어 진행하였다. 하지만 $BaTiO_3$ 막의 두께를 $1{\mu}m$이하의 박막으로 제조했을 경우 XRD 분석을 통하여 결정상이 얻어졌음을 확인했음에도 불구하고 유전체로서의 특성을 보이지 않았다. 이 원인을 $BaTiO_3$ 박막의 누설전류에 의한 것이라고 판단하고 $BaTiO_3$ 박막과 기판과의 계면 및 미세구조를 확인하였으며 이것이 전기적 특성에 미치는 영향에 대해 분석하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.617-620
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• 1999

In this study, the polarization e(fecal and the birefringence effect of amorphous germanium (a-Ge) thin films were investigated by using linearly polarized He-Ne laser beam. The a-7e thin films were deposited on the quarts substrate by plasma enhanced chemical vapor deposition (PECVD) and thermal vacuum evaporation In order to obtain the optimum grating arrays, inorganci resists such as Si$_3$N$_4$ and a-Se$_{75}$ Ge$_{25}$ , were prepared with the optimized thickness by Monte Carlo (MC) simulation. As the results of MC simulation, the thickness ofa-Se$_{75}$ Ge$_{25}$ resist was determined with Z$_{min}$ of 360$\AA$ . The resists were exposed to Ga$^{+}$-FIB with accelerating energies of 50 keV, developed by wet etching, and a-Ge thin film was etched by reactive ion-etching (RIE). Finally, we were obtained grating arrays which grating width and linewidth are 0.8${\mu}{\textrm}{m}$, respectively and we studied the polarization and birefringence effect in transmission grating array made of high refractive amorphous material, and the applicability as waveplates and polarizers in optical device.e.e.

• Bulletin of the Korean Chemical Society
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• v.25 no.9
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• pp.1371-1378
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• 2004

A porous stainless steel (SUS) as a substrate of silica composite membranes for hydrogen purification was used to improve mechanical strength of the membranes for industrial application. The SUS support was successfully modified by using submicron Ni powder, $SiO_2$ sols with particle size of 500 nm and 150 nm in turns. Silica top layer was coated on the modified supports under various preparation conditions such as calcination temperature, dipping time and repeating number of dipping-drying process. The calcination temperature for proper sintering was between H ttig temperature and Tamman temperature of the coating materials. Maximum hydrogen selectivity was investigated by changing dipping time. As repeating number of dipping-drying process increased, permeances of nitrogen and hydrogen were decreased and $H_2/N_2$ selectivity was increased due to the reduction of non-selective pinholes and mesopores. For the silica membrane prepared under optimized conditions, permeance of hydrogen was about $3\;{\times}\;10^{-5}\;cm^3{\cdot}cm^{-2}{\cdot}s^{-1}{\cdot}cmHg^{-1}$ combined with $H_2/N_2$ seletivity of about 20.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.54-58
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• 2007

This paper describes an atomic force microscope (AFM)-based instrument for measuring the nanoscale cutting edge profiles of diamond cutting tools. The instrument consists of a combined AFM unit and an optical sensor to align the AFM tip with the top of the diamond cutting tool edge over a submicron range. In the optical sensor, a aser beam is emitted from a laser diode along the Y-axis and focused to a small beam spot with a diameter of approximately $10{\mu}m$ at the beam waist, which is then received by a photodiode. The top of the tool edge is first brought into the center of the beam waist by adjusting it in the X-Z-plane while monitoring the variation in the photodiode output. The cutting tool is then withdrawn and its top edge position at the beam center is recorded. The AFM tip can also be positioned at the beam center in a similar manner to align it with the top of the cutting edge. To reduce electronic noise interference on the photodiode output and thereby enhance the alignment accuracy, a technique is applied that can modulate the photodiode output to an AC signal by driving the laser diode with a sinusoidal current. Alignment experiments and edge profile measurements of a diamond cutting tool were carried out to verify the performance of the proposed system.

• Korean Journal of Materials Research
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• v.3 no.2
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• pp.151-157
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• 1993

Abstract We have fabricated Y-Ba-Cu-O superconducting thin films by in-situ on-axis rf magnetron sputtering method using $Y_1$B$a_2$C${u_4}\;{_2O_x}$ nonstoichiometric target. Reactive ion etching (RIE) method was used in patterning the films. We have investigated the properties of patterned films, and compared the properties of the films before and after patterning. As the line width of the pattern decreases from 5${\mu}$m to 2${\mu}$m, a slight but not significant degradation in superconducting properties of the patterned films is observed. The bridge patterns are found to have clean edges and good electrical properties enough to be applied in device applications. From the result of this research, the possibility of submicron patterning by RlE is confirmed.

• Journal of Hydrogen and New Energy
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• v.23 no.5
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• pp.455-460
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• 2012

This work describes the hydriding chemical vapor synthesis (HCVS) of the $MgH_2$ in a hydrogen atmosphere and the product's hydriding-dehydridng properties. Mg powder was used as a starting material to synthesize $MgH_2$ and uniformly heated to a temperature of $600^{\circ}C$ for Mg vaporization. The effects of hydrogen pressure on the morphology and the composition of HCVS-$MgH_2$ were examined by using X-ray diffraction (XRD) and scanning electron microscopy (SEM). It is clearly seen that after the HCVS process, the particle size of synthesized $MgH_2$ was drastically reduced to the submicron or micrometer-scale and these showed different shapes (needle-like nanofibers and angulated plate) depending on the hydrogen pressure. It was found that after the HCVS process, the $H_2$ desorption temperature of HCVS-$MgH_2$ decreased from 380 to $410^{\circ}C$, and the minimum hydrogen desorption tempreature of HCVS-$MgH_2$ powder with needle-like shape can be obtained. In addition, the enhanced hydrogen storage performance for needle-like $MgH_2$ was achieved during subsequent hydriding-dehydriding cycles.

• Applied Microscopy
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• v.29 no.1
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• pp.67-73
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• 1999

It is practically hard to prepare good TEM specimens from powders which are embedded in epoxy materials for ion milling, because the milling rate difference between powders and epoxy is quite large. In order to overcome this problem, we tried to find methods to increase the density of powders in the embedding epoxy without loosing the adhesive strength between them. Powder density was considerably increased by employing a centrifuge for embedding, compared to the result by a conventional vacuum embedding. In addition, mixing powders of different sizes after sieving also enhanced the final density by allowing smaller particles filling in the gaps of larger particles. Ion milling of powders embedded by these methods resulted in thin specimens good enough for normal TEM works. TEM specimens from spherical, platy and fibrous powders of submicron size were successfully prepared by this centrifuging method.