• 비파괴검사학회지
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• 제36권1호
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• pp.18-26
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• 2016

반도체 산업은 우리나라 주력산업중 하나로 매년 꾸준한 성장세를 보이며 지속적인 성장을 하고 있다. 이러한 반도체 산업에서의 중요한 기술은 소자의 고 집적화이다. 이는 면적당 메모리 용량을 증가시키는 것으로 핵심역할을 하는 것이 바로 포토리소그래피 기술이다. 포토리소그래피란 마스크의 표면에 빛을 쬐어 생기는 그림자를 웨이퍼 상에 인쇄하는 기술이며 반도체 제조공정에서의 가장 중요한 공정이다. 이러한 공정을 통해 나온 패터닝을 분석 시에 폭과 단차의 균일성을 측정한다. 이에 따라 본 논문은 포토리소그래피 공정이 적용된 시험편 패터닝에 폭과 판 사이와의 단차를 투과형 디지털 홀로그래피를 구성하여 측정하고자 한다. 투과형 디지털 홀로그래피 간섭계를 구성하고 시험편에 임의의 9포인트를 설정하여 각 포인트를 측정하고 상용장비인 SEM (scanning electron microscopy)과 alpha step으로 측정한 결과와 비교하고자 한다. 투과형 디지털 홀로그래피는 측정시간이 타 기법에 비에 짧다는 장점과 배율렌즈를 사용하기 때문에 저 배율에서 고 배율로 변경하여 측정할 수 있는 장점을 가지고 있다. 실험 결과로부터 투과형 디지털 홀로그래피가 포토 리소그래피가 적용된 패터닝 측정에 유용한 기술임을 확인할 수 있었다.

• Journal of Plant Biology
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• 제9권1_2호
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• pp.7-16
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• 1966

In order to determine the factors related to site quality, 13 areas of Larch growing in the Kwangung and its vicinity forest as sample plots, were examined. Sample plots included various site classes as well as age classes. Three were divided into two groups (major and minor trees). Average height of dominant trees was determined through messurement of 5 to 6 dominant tree in each sample plots. Average height of dominant 30 year-old trees was the basis for site index. A Standard Yield Table for the larch produced in Kwangnung forest was made by various data, which included age class 5, ranging from 10 to 45 years. The relationship of the height of the trees, the site conditions, and ground vegetation are investigated in this paper. The site indexes of 40 forest class age in 28-B and 28-G forest classes of the larch associations for ground vegetation had comparatively rarge differences due to the sampled areas. The relation of the direction of forest communities to the height and the diameter of the tree shwoed that its communiteis of northest and northwest parts appeared higher valueof the height and the diameter. The diameter and the height of trees were closely realted to each other. The samller the occupied area per tree and the smaller the average distance among trees, the more density was increased. The larger the density was the lower height of the trees. In the ground vegetation of the larch communities, there seems to be a definite correlation between the height of trees and the occupied area per tree or the average distance among the trees. The height of trees and site index of two larch communities were as follow: 28-B forest class site index 20.8, height 24.0m, 28-G forest class site index 18.4, height 20.9m. The ground layer was analyzed by the method of Quadrat(20/20sq. cm) with an interval of 1M. It set up 40 Quadrats of the larch communiteis. The community structure of the ground vegetation of two larch was analyzed, and important value was calculated and then evaluated. The ground vegetation under the larch had developed Burmannii Beauv stratal society below the 28-B and 28-G the forest class. Accordingly, the first important value of Burmannii Beauv was found in two ground vegetation below the larch. Therefore, this species could be quantitatively considered as the forest indicator species. Common species of each community appeared 18 species out of 34 species in the ground vegetation under two larch communities. The ground vegetation of the 28-B forest class showed more than that of the 28-G forest class. the similarity of the ground vegetation was measrued by the Frequency Index Community Coefficient. The differences between the associations were lcearly manifested by the ground vegetation tested by Gleason's Frequency Index of Community Coefficient for the analysis of each stratal society of all associations. According to F.I.C.C. the ground vegetation under two larch(28-B and 28-G) forest classes showed higher value. An investigation into the relationship of physical and chemical properties of soil and site was considered the next step to be taken in the study of the larch site classification.

• 한국정밀공학회지
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• 제31권11호
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• pp.999-1006
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• 2014

In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.

• 대한기계학회논문집A
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• 제29권11호
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• pp.1455-1462
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• 2005

In this paper, we intend to introduce a nonlinear finite element method based on the fully nonlinear potential flow theory in order to simulate the large amplitude sloshing flow in two-dimensional baffled tank subject to horizontally forced excitation. The free surface is tracked by a direct time differentiation scheme with the four-step predictor-corrector time integration method. The flow velocity is accurately recovered from the velocity potential by second-order least square method. In order to maintain the finite element mesh regularity and total mass, the semi-Lagrangian surface tracking method with area conservation is applied. According to the numerical formulae, we perform the parametric experiments by varying the installation height and the opening width of baffles, in order to examine the effects of baffle on the nonlinear liquid sloshing. From the numerical results, the hydrodynamic characteristics of the large amplitude sloshing are investigated.

• 한국자동차공학회논문집
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• 제2권1호
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• pp.128-141
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• 1994

This roport explain the basic theory of desinging the accelerating durability test road and the role of each factors contributing to test road surface profile. Also this road is designed by considering the charactors of vehicle suspension system and condition of driving. In test road, the factors affecting to the vehicle Structural durability are correlation among surface shape of road profile, frequency of vehicle suspension system, distribution of axletwist angle and vibration profile height Road PSD magnitude and frequency delay is used to control these factors relation.

• 대한수학회보
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• 제55권2호
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• pp.449-467
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• 2018

In this paper we introduce and study the lattice paths for which the horizontal step is allowed at height $h{\geq}0$, $h{\in}{\mathbb{Z}}$. By doing so these paths generalize the heavily studied weighted lattice paths that consist of horizontal steps allowed at height zero only. Six q-series identities of Rogers-Ramanujan type are studied combinatorially using these generalized lattice paths. The results are further extended by using (n + t)-color overpartitions. Finally, we will establish that there are certain equinumerous families of (n + t)-color overpartitions and the generalized lattice paths.

• Transactions on Electrical and Electronic Materials
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• 제6권5호
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• pp.225-228
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• 2005

In this work, we studied the optimized copper thickness in Cu ECP (Electrochemical Plating). In order to select an optimized Cu ECP thickness, we examined Cu ECP bulge (bump, hump or over-plating amount), Cu CMP dishing and electrical properties of via hole and line trench over dual damascene patterned wafers split into different ECP Cu thickness. In the aspect of bump and dishing, the bulge increased according as target plating thickness decreased. Dishing of edge was larger than center of wafer. Also in case of electrical property, metal line resistance distribution became broad gradually according as Cu ECP thickness decreased. In conclusion, at least $20\%$ reduced Cu ECP thickness from current baseline; $0.8\;{\mu}m$ and $1.0\;{\mu}m$ are suitable to be adopted as newly optimized Cu ECP thickness for local and intermediate layer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.910-913
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• 2000

In this research we investigate geometric issues involved while using a particular rapid prototyping system, called Stereolithography(SLA). SLA create prototypes layer by layer, each layer being formed by scanning a laser beam across the x, y surface of a vat of liquid monomer mix. The performance of SLA is influenced by orientation and layer thickness of designed fabrication. The number of layer and the area needed support is influenced by the orientation and layer thickness of designed fabrication. The step influence and volume error is influenced by slice thickness. We minimize the support are, the number of layer and cusp height. These variables of fabrication is minimized using genetic algorithm. The time for genetic algorithm is as little as we can accept. So we calculate support area and cusp height simply.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2011년 춘계학술대회논문집
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• pp.494-499
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• 2011

One of the devices to prevent separated flow over a wing or a flap at high angle of attack is a vortex generator. In the present work, we numerically study the flow around a low-profile or micro vortex generator whose height is less than local boundary layer thickness which can delay separation with a minimum drag penalty owing to its very small wetted surface area. As a first step toward a parametric study to efficiently design this MVG flow control system, we simulate the flow around a single MVG on a flat plate. For the simulation, we employ OpenFOAM with Launder-Sharma ${\kappa}$-epsilon model. The analysis results are validated by comparing with experimental results of a rectangular MVG at an angle of attack of 10 degrees whose height is 20% of local boundary layer. Important results and aspects of this numerical study are discussed. We also simulate the flow around rectangular, triangular and trapezoidal MVGs and the results are compared

• 소성∙가공
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• 제8권2호
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• pp.135-142
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• 1999

Tube Process(TP) is one of the processes to produce permanent magnets. Advantage claimed for this process is that it can accmplish both densification and anisotropication in one step forming. This process is distinguished from other processes since it uses deformable tube for densification of powder magnets. TP has, however, difficulties in manufacturing permanent magnets from Nd-Fe-B green powder due to folding resulted from large height reduction and localized densification. Therefore, an adequate preform is necessary to reduce folding resulted from large height reduction and localized densification. Therefore, an adequate preform is necessary to reduce folding, lead magnets into almost desired final shape and get uniform densification. In this paper, preform design for TP is carried out without a deformable tube to investigate the behaviour of magnet sinter-forging. Preform design is accomplished to increase the effective magnet area with a near net shape and uniform densification.