• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1621-1623
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• 2004

The $Pb(Zr_{0.52}Ti_{0.48})O_3/(Ba_{0.6}Sr_{0.4})TiO_3$ [PZT(52/48)/BST(60/40)] heterolayered thin films were deposited on Pt/Ti/$SiO_2$/Si substrates by using the RF sputtering method with RF powers of 60,70,80,90[W]. All thin films showed the peaks of the tetragonal phase. Increasing the RF power, dielectric constant and loss of the PZT(52/48)/BST(60/40)] heterolayered thin films were decreased. The thickness ratio of PZT and BST thin films was 1/1. The relative dielectric constant and the dielectric loss of the PZT(52/48)/ BST(60/40) heterolayered thin films were 562 and 13%, respectively.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.440-441
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• 2006

Several titanate powders ($Al_2TiO_5,\;SrTiO_3$, etc.) were synthesized by an ethylene glycol solution route. Titanium isopropoxide and nitrate salts were dissolved in stoichiometric proportions in liquid-type ethylene glycol without any precipitation. The parent precursor sols were dried to porous gels, and then the gels were calcined and crystallized. All synthesized titanate powders had stable crystallization behavior at low temperature and high specific surface area after a simple ball-milling process. A three-component PZT $(Pb(Zr_{0.52}{\cdot}Ti_{0.48})O_3)$ powder was also synthesized successfully by the ethylene glycol method. In this study, the characteristics of the multi-component titanate powders by the ethylene glycol method are examined.

• Journal of Sensor Science and Technology
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• v.23 no.5
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• pp.337-341
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• 2014

For various additives doped-$VO_2$ critical temperature sensors using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were systematically investigated. As a starting material of $VO_2$ sensor, vanadium pentoxide ($V_2O_5$) powders were used, and CaO, SrO, $Bi_2O_3$, $TiO_2$, and PbO dopants were used, respectively. The $V_2O_5$ powders with dopants were mixed with a vehicle to form paste. This paste was silk screen-printed on $Al_2O_3$ substrates and then $V_2O_5$-based thick films were heat-treated at $500^{\circ}C$ for 2 hours in $N_2$ gas atmosphere for the reduction to $VO_2$. From X-ray diffraction analysis, $VO_2$ phases for pure $VO_2$, and CaO and SrO-doped $VO_2$ thick films were confirmed and their grain sizes were 0.57 to $0.59{\mu}m$. The on/off resistance ratio of the $VO_2$ sensor in phase transition temperature range was $5.3{\times}10^3$ and that of the 0.5 wt.% CaO-doped $VO_2$ sensor was $5.46{\times}10^3$. The presented critical temperature sensors could be commercialized for fire-protection and control systems.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.145-145
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• 1999

La-Ca-Mn-O (LCMO) 박막에서 초거대 자기 저항 효과와 발견된 이후 자기 센서와 고밀도 자기 저장 매체로서 응용하기 위한 연구가 진행되고 있다. 그러나 현재 대부분의 증착은 타겟과 박막간의 조성의 일치를 위하여 PLD 방법을 이용하고 있으며 RF magnetron sputtering 법으로 증착한 예는 많이 보고되고 있지 않으며 특히 적층 성장시킨 예는 아직 보고되지 있지 않다. 또한 LCMO와의 낮은 격자 상수 불일치를 보이는 SrTiO3와 LaAlO3 기판에 LCMO 박막을 성장시킬 경우 LaAlO3의 경우 XRD rocking curve의 curve의 FWHM 값이 SrTiO3 상에 증착시킨 것의 10배 이상의 값을 보인다는 것은 주목할 만한 사실이다. RF magnetron sputtering 법을 이용하여 LaAlO3 기판상에 145nm MCMO 박막을 적층성장시켰다. XRD $ heta$-2$\theta$ scan을 통해 박막이 c-축 배향한 것을 확인할 수 있었으며 RBS 분석결과 4.98%의 minimumyield를 보였으며 이로부터 박막이 적층성장한 것을 확인할 수 있었다. LCMO (200) peak의 XRD $\theta$-rocking 결과 FWHM의 값은 0.311$^{\circ}$를 보였으나 2개의 피크가 존재하는 것을 볼 수 있었다. 따라서 기판의 (200) 피크를 XRD $\theta$-2$\theta$ scan에서 0.3$^{\circ}$ 간격으로 두 개의 피크를 관찰할 수 있었는데 이는 기판과 박막간의 stress로 인한 tetragonal distortion에 의한 것으로 알려져 있었다. 따라서 기판상에 박막이 어떤 식으로 적층 성장되었는지를 RBS를 이용하여 <001>과 <011> 방향으로 2MeV He++를 주입하여 0.1$^{\circ}$ 간격으로 틸팅을 해본 결과 <001> 방향에서는 1.12$^{\circ}$의 차이를 보였다. 이는 기판과의 compressive stress로 인해 c축 방향으로 늘어났으며 stress relaxed layer는 XRD 결과와는 달리 관찰할 수 없었다. 이러한 현상의 기판 자체의 twin 구조로 인한 것으로 생각된다. RBS 분석후 고분해능 XRD를 이용해 LCMO (200) peak의 $\theta$-rocking 결과 이제R지 laAlO3 상 증착한 LCMO의 값으로는 제일 작은 0.147$^{\circ}$를 나타내었다.

• Korean Journal of Materials Research
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• v.30 no.7
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• pp.343-349
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• 2020

NKN [(Na,K)NbO₃] is a candidate lead-free piezoelectric material to replace PZT [Pb(Zr,Ti)O₃]. A single crystal has excellent piezoelectric-properties and its properties are dependent of the crystal orientation direction. However, it is hard to fabricate a single crystal with stoichiometrically stable composition due to volatilization of sodium during the growth process. To solve this problem, a solid solution composition is designed (Na,K)NbO₃-Ba(Cu,Nb)O₃ and solid state grain growth is studied for a sizable single crystal. Ceramic powders of (Na,K)NbO₃-M(Cu,Nb)O₃ (M = Ca, Sr, Ba) are synthesized and grain growth behavior is investigated for different temperatures and times. Average normal grain sizes of individual specimens, which are heat-treated at 1,125 ℃ for 10 h, are 6.9, 2.8, and 1.6 ㎛ for M = Ca, Sr, and Ba, respectively. Depending on M, the distortion of NKN structure can be altered. XRD results show that (NKN-CaCuN: shrunken orthorhombic; NKN-SrCuN: orthorhombic; NKN-BaCuN: cubic). For the sample heat-treated at 1,125 ℃ for 10 h, the maximum grain sizes of individual specimens are measured as 40, 5, and 4,000 ㎛ for M = Ca, Sr, and Ba, respectively. This abnormal grain size is related to the partial melting temperature (NKN-CaCuN: 960 ℃; NKN-SrCuN: 971 ℃; NKN-BaCuN: 945 ℃).

• Korean Journal of Materials Research
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• v.31 no.9
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• pp.488-495
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• 2021

Solid state grain growth (SSCG) is a method of growing large single crystals from seed single crystals by abnormal grain growth in a small-grained matrix. During grain growth, pores are often trapped in the matrix and remain in single crystals. Aerosol deposition (AD) is a method of manufacturing films with almost full density from nano grains by causing high energy collision between substrates and ceramic powders. AD and SSCG are used to grow single crystals with few pores. BaTiO₃ films are coated on (100) SrTiO₃ seeds by AD. To generate grain growth, BaTiO₃ films are heated to 1,300 ℃ and held for 10 h, and entire films are grown as single crystals. The condition of grain growth driving force is ∆G_max < ∆G_c ≤ ∆G_seed. On the other hand, the condition of grain growth driving force in BaTiO₃ AD films heat-treated at 1,100 and 1,200 ℃ is ∆G_c < ∆G_max, and single crystals are not grown.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.280-280
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• 2007

$Pb(Zr,Ti)O_3$ (PZT) 강유전체 박막은 높은 잔류 분극 (remanent polarization) 특성 때문에 현재 강유전체 메모리 (FeRAM) 소자에 적용하기 위하여 가장 활발히 연구되고 있다. 그런데 PZT 물질은 피로 (fatigue) 및 임프린트 (imprint) 등의 장시간 신뢰성 (long-term reliability) 특성이 취약한 단점을 가지고 있다. 이러한 신뢰성 문제를 해결할 수 있는 효과적인 방법 중의 하나는 $IrO_2$, $SrRuO_3$(SRO) 등의 산화물 전극을 사용하는 것이다. 많은 산화물 전극 중에서 SRO는 PZT와 비슷한 pseudo-perovskite 결정구조를 갖고 격자 상수도 비슷하여, PZT 커패시터의 강유전 특성 및 신뢰성을 향상시키는데 매우 효과적인 것으로 알려져 있다. 따라서 본 연구는 PZT 커패시터에 적용하기 위하여 SRO 박막을 증착하고 이의 전기적 특성 및 미세구조를 분석하고자 하였다. 또 실제로 SRO 박막을 상부전극과 PZT 사이의 버퍼 층 (buffer layer)으로 적용한 경우의 커패시터 특성도 평가하였다. 먼저 다결정 SRO 박막을 $SiO_2$/Si 기판 위에 DC 마그네트론 스퍼터링 법 (DC magnetron sputtering method)으로 증착하였다. 그 다음 이러한 SRO 박막의 미세구조, 결정성 및 전기적 특성이 증착 조건들의 변화에 따라서 어떤 경향성을 보이는지를 평가하였다. 기판 온도는 $350\;{\sim}\;650^{\circ}C$ 범위에서 변화시켰고, 증착 파워는 500 ~ 800 W 범위에서 변화시켰다. 또 Ar+$O_2$ 혼합 가스에서 산소의 혼합 비율을 20 ~ 50% 범위에서 변화시켰다. 이러한 실험 결과 SRO 박막의 전기적 특성 및 미세 구조는 기판의 증착 온도에 따라서 가장 민감하게 변함을 관찰할 수 있었다. 다른 증착 조건과 무관하게 $450^{\circ}C$ 이상의 온도에서 증착된 SRO 박막은 모두 주상정 구조 (columnar structure)를 형성하며 (110) 방향성을 강하게 나타내었다. 가장 낮은 전기 저항은 $550^{\circ}C$ 증착 온도에서 얻을 수 있었는데, 그 값은 약 $440\;{\mu}{\Omega}{\cdot}cm$ 이었다. SRO 버퍼 충을 적용하여 제작한 PZT 커패시터의 잔류 분극 (Pr) 값은 약 $30\;{\mu}C/cm^2$ 정도로 매우 높은 값을 나타내었고, 피로 손실 (fatigue loss)도 $1{\times}10^{11}$ 스위칭 사이클 후에 약 11% 정도로 매우 양호한 값을 나타내었다.

• The Journal of the Petrological Society of Korea
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• v.11 no.1
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• pp.1-16
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• 2002

The study area is mostly composed of Precambrian Gyeonggi gneiss complex, Jurassic Daebo granites, Cretaceous tonalite and dykes, and so on. On the basis of field survey and mineral assemblage, the granites can be divided into three types; biotite granite (Gb), garnet biotite granite (Ggb) and two mica granite (Gtm). They predominantly belong to monzo-granites from the modes. Field relationship and K-Ar mica age data in the surrounding area suggest that intrusive sequences are older in order of Gtm, Ggb and Gb. Gb and Ggb, major study targets, occur as medium-coarse grained rocks, and show light grey and light grey-light pink colors, respectively. Mineral constituents are almost similar except for opaque in Gb and garmet in Ggb. Gb and Ggb have felsic, peraluminous, subalkaline and calc alkaline natures. In Harker diagram, both rocks show moderately negative trends of $TiO_2$, MgO, CaO, $Al_2O_3$, $Fe_2O_3$(t), $K_2O$ and $P_2O_5$ as $SiO_2$ contents increase. Among them, $TiO_2$, MgO and CaO show two linear trends. From the trends and the linear patterns in AFM, Sr-Ba and Rb-Ba-Sr relations, it is likely that they were originated from the same granitic magma and Ggb was differentiated later than Gb. REE concentrations normalized to chondrite value have trends of parallel LREE enrichment and HREE depletion. One data of Ggb showing a gradually enriched HREE trend may be caused by garnet accompaniment. Ggb have more negative Eu anomalies than Gb, suggesting that plagioclase fractionation in Ggb have occurred much stronger than that in Gb. In modal (Qz+Af) vs. Op, Gb and Ggb belong to magnetite-series and ilmenite-series, respectively. From the EPMA results, opaques of Gb are magnetite and ilmenite, and those of Ggb are magnetite-free ilmenite or not observed. Bimodal distribution of magnetic susceptibility reveals two different granites of Gb (332.6 ${mu}SI$) and Ggb (2.3 ${mu}SI$). Based on the paleomagnetic analysis as well as modal analysis, the main susceptibilities of Gb and Ggb reside in magnetite and mafic minerals, respectively. They belong to S-type granite of non-magnetic granite by susceptibility value. In addition, $SiO_2$ contents, $K_2O/Na_2O$, A/CNK molar ratio and ACF diagram support that they all belong to S-type granites.

• Journal of Sensor Science and Technology
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• v.3 no.3
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• pp.3-8
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• 1994

Flow sensor was fabricated with PTC thermistor usually operating as thermostats. The PTC thermistor was manufactured with $(Ba_{0.7}Sr_{0.3})TiO_{3}$ powder and its resistivity as a function of flow velocity was investigated. The resistivity changed from 4.45 $k{\Omega}{\cdot}cm$ to 3.95 $k{\Omega}{\cdot}cm$ as flow velocity varied 0 cm/s to 5 cm/s The sensitivities of the PTC thermistor were -204 (${\Omega}{\cdot}cm$)/(cm/s) and -24 (${\Omega}{\cdot}cm$)/(cm/s) at the flow velocity of 1 cm/s and 5 cm/s, respectively.

• Transactions on Electrical and Electronic Materials
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• v.5 no.3
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• pp.120-121
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• 2004

YBaCuO thick films were fabricated by plasma enhanced chemical vapor deposition, and the crystallinity and the superconducting properties were investigated. The growth temperature to obtain the thick films was decreased by around 150$^{\circ}C$ due to plasma enhancement. The zero resistivity temperatures for films grown at 590$^{\circ}C$ and 620$^{\circ}C$ were 55 and 80 K, respectively.