[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/TEEM.2004.5.3.120

Fabrication of High Tc Superconducting Films by CVD Process

Lee, Sang-Heon (Department of Electronics Information and Communication Engineering, Sun Moon University)

Publication Information

Transactions on Electrical and Electronic Materials / v.5, no.3, 2004 , pp. 120-121 More about this Journal

Abstract

YBaCuO thick films were fabricated by plasma enhanced chemical vapor deposition, and the crystallinity and the superconducting properties were investigated. The growth temperature to obtain the thick films was decreased by around 150 $^{\circ}C$ due to plasma enhancement. The zero resistivity temperatures for films grown at 590 $^{\circ}C$ and 620 $^{\circ}C$ were 55 and 80 K, respectively.

Keywords

YBaCuO; Chemical vapor deposition; Thick films; SrTiO $_3$ ;

Citations & Related Records

Reference

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