• Title/Summary/Keyword: Specific resistivity

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Effect of Rapid Thermal Annealing on the Ti doped In2O3 Films Grown by Linear Facing Target Sputtering

  • Seo, Ki-Won;Kim, Han-Ki
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.342.1-342.1
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    • 2014
  • The electrical, optical and structural properties of Ti doped $In_2O_3$ (TIO) ohmic contacts to p-type GaN were investigated using linear facing target sputtering (LFTS) system. Sheet resistance and resistivity of TIO films are decreased with increasing rapid thermal annealing (RTA) temperature. Although the $400^{\circ}C$ and $500^{\circ}C$ annealed samples showed rectifying behavior, the $600^{\circ}C$ and $700^{\circ}C$ annealed samples showed linear I-V characteristics indicative of the formation of an ohmic contact between TIO and p-GaN. The annealing of the contact at $700^{\circ}C$ resulted in the lowest specific contact resistivity of $9.5{\times}10^{-4}{\Omega}cm^2$. Based on XPS depth profiling and synchrotron X-ray scattering analysis, we suggested a possible mechanism to explain the annealing dependence of the properties of TIO layer on rapid thermal annealing temperature.

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Low resistivity ohmic Pt/Si/Ti contacts to p-type 4H-SiC (Pt/Si/Ti P형 4H-SiC 오옴성 접합에서 낮은 접촉 저항에 관한 연구)

  • Yang, S.J.;Lee, J.H.;Nho, I.H.;Kim, C.G.;Cho, N.I.;Jung, K.H.;Kim, E.D.;Kim, N.K.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.521-524
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    • 2001
  • In this letter. we report on the investigation of Ti. Pt/Si/Ti Ohmic contacts to p-type 4H-SiC. The contacts were formed by a 2-step vacuum annealing at $500^{\circ}C$ for 1h. $950^{\circ}C$ for 10 min respectively. The contact resistances were measured using the transmission line model method. which resulted in specific contact resistivities in the $3.5{\times}10^{-3}$ and $6.2{\times}10^{-4}ohm/cm^{2}$, and the physical properties of the contacts were examined using x-ray diffraction. microscopy. AES(auger electron spectroscopy). AES analysis has shown that, at this anneal temperature, there was a intermixing of the Ti and Si. migration of into SiC. Overlayer of Pt had the effect of decreasing the specific contact resistivity and improving the surface morphology of the annealed contact.

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Low resistivity ohmic Pt/Si/Ti contacts to p-type 4H-SiC (Pt/Si/Ti P형 4H-SiC 오옴성 접합에서 낮은 접촉 저항에 관한 연구)

  • 양성준;이주헌;노일호;김창교;조남인;정경화;김은동;김남균
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.521-524
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    • 2001
  • In this letter, we report on the investigation of Ti, Pt/Si/Ti Ohmic contacts to p-type 4H-SiC. The contacts were formed by a 2-step vacuum annealing at 500$^{\circ}C$ for 1h, 950$^{\circ}C$ for 10 min respectively. The contact resistances were measured using the transmission line model method, which resulted in specific contact resistivities in the 3.5x10$\^$-3/ and 6.2x10$\^$-4/ ohm/$\textrm{cm}^2$, and the physical properties of the contacts were examined using x-ray diffraction, microscopy, AES(auger electron spectroscopy). AES analysis has shown that, at this anneal temperature, there was a intermixing of the Ti and Si, migration of into SiC. Overlayer of Pt had the effect of decreasing the specific contact resistivity and improving the surface morphology of the annealed contact.

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Effect of $Sb_2O_3$ Addition on the Microstructure and the PTCR Characteristic in $BaTiO_3$ Ceramics ($BaTiO_3$ 세라믹스에 있어서 미세구조와 PTCR특성에 미치는 $Sb_2O_3$의 첨가효과)

  • 김준수;이병하;이경희
    • Journal of the Korean Ceramic Society
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    • v.31 no.2
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    • pp.185-193
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    • 1994
  • Effect of Sb2O3 addition on microstructure and the PTCR characteristic was investigated. The range of the Sb2O3 content and the sintering temperature showing semiconducting and PTCR characteristic, were 0.05~0.125 mol%, and over 130$0^{\circ}C$, respectively. We found that PTCR characteristic, that is, room-temperature resistivity and specific resistivity ration were dependent on the microstructure.

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A Study on the Identification of Specific Earth Resistivity for Grounding Design of 500 KV Transmission Towers (500 kV 송전철탑 접지설계를 위한 대지저항률 산정에 관한 연구)

  • Choi, Jong-Kee;Lee, Sung-Doo;Lee, Dong-Il;Jung, Gil-Jo;Kim, Kyung-Chul
    • Proceedings of the KIEE Conference
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    • 2005.07a
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    • pp.703-705
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    • 2005
  • 접지설계에 있어서 토양의 전기적 특성은 접지극의 형상과 더불어 가장 중요한 설계요소 중 하나이며 이러한 토양의 전기적 특성은 접지극이 매설될 지역의 고유한 저항률, 즉 고유저항률(specific earth resistivity)로 대표되어 왔다. 이처럼 고유저항률에 근거한 수작업 접지설계는 복잡한 구조와 특성을 갖는 실제 토양을 균일한 매질로 등가화하는 절차를 필요로 한다. 본 논문에서는 미얀마 500 kV 송전철탑 수작업 접지설계를 위하여 수평다층토양을 균일매질로 등가화하는 절차를 제시하였다.

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Comparative studies of ohmic metallization on p-GaAsSb (금속에 따른 p-GaAsSb 오믹접촉의 전기적 특성에 관한 비교 연구)

  • Cho, Seung-Woo;Jang, Jae-Hyung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.33-36
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    • 2004
  • 탄소 도핑$(5{\times}10^{19}\;cm^{-3})$된 p-type GaAsSb 에피층 위에, Ti/Pt/Au, Pd/Au, Pd/Ir/Au를 이용한 다층 오믹 접촉을 제작하였다. MOCVD(metal-organic chemical vapor deposition)를 이용하여 성장시킨 이 p-GaAsSb의 정공 이동도는 탄소의 도핑 농도가 매우 높음에도 불구하고, $50\;cm^2/Vs$로 측정되었다. 오믹 접촉의 전기적 특성을 측정하기 위하여 TLM(Transfer length method)를 이용하였다. Pd/Ir/Au을 이용한 오믹접촉의 specific contact resistivity는 $10^{-8}\;ohm-cm^2$ 보다 작은 수치를, transfer length는 100 nm보다 작은 수치를 보였으며, Ti/Pt/Au을 이용한 ohmic contact의 specific contact resistivity는 $10^{-7|\;ohm-cm^2$ 보다 작은 수치를, transfer length는 400 nm보다 작은 수치를 나타내었다.

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The Study on the Improvement of Friction Properties of Graphite/Nylon Composite by oil-Impregnation (오일 함침에 의한 흑연/나일론 복합체의 마찰특성 향상에 관한 연구)

  • Gang, Seok-Chun;Jeong, Dae-Won
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.3
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    • pp.114-122
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    • 2002
  • Electric conductivities, mechanical properties and friction properties were investigated far graphite-nylon composites impregnated with oil. Specific resistivity of composites containing oil from 2% to 6% were in the range of $10^7 ~10^6 \ohm$ cm, which were applicable for anti-static purpose of composites improved by the impregnation of graphite with 2%. Improvement in the impact strength and friction properties of graphite/nylon composites was achieved by the impregnation of oil. The coefficient of friction of the composites containing graphite from 2% to 4% and oil with 2 - 4% showed much loller than that of virgin nylon. Also the abrasive wear of the oil impregnated graphite composites were decreased about 1/3 - 1/10.

Ohmic Contact of P-type GaAs Implanted the Liquid Metal Ion (액체금속이온이 주입된 p형 GaAs의 오옴성 접촉)

  • 김송강;강태원;홍치유;임재영;엄기석;이재환;위영호;이정주
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.9
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    • pp.1381-1387
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    • 1989
  • For the fabrication of ohmic contact to p-type GaAs, In Liquid Metal Ions were implanted into p-type GaAs (Zn:1.5x10**19/cm**3). After the samples were processed by Infrared rapid thermal annealing (IRTA0 or Furance Annealing (FA), I-V and specific contact contact resistivity were measured. Specific contact resistivity was found to be 1.7x10**-5 \ulcorner-cm\ulcornerin IRTA 750\ulcorner, 10 sec annealed sample. The surface characteristics of the samples were investigated with SEM, RHEED, AES. From these results we can know that implanted In ions were formed mixing layer of InAs at the surface.

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3D Effect of Embankment Dam Geometry to Resistivity Data (3차원 댐구조가 전기비저항 자료에 미치는 영향)

  • Cho, In-Ky;Lee, Keun-Soo;Kang, Hye-Jin
    • Geophysics and Geophysical Exploration
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    • v.13 no.4
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    • pp.397-406
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    • 2010
  • Resistivity method is a practical and effective geophysical technique to detect leakage zones in embankment dams. Generally, resistivity survey conducted along the crest assumes that the embankment dam has a 2D structure. However, the 3D topography of the embankment distorts significantly resistivity data measured on anywhere of the dam. This study evaluates the influence from 3D effects created by specific dam geometry and effects of water level fluctuations through the 3D finite element modeling technique. Also, a comparison between different locations of survey line are carried out, and topographic correction technique is developed for the resistivity data obtained along the embankment dam. Furthermore, using synthetic resistivity data for an embankment dam model with leakage zone, detectability of leakage zones is estimated through 2.5D inversion.

Ohmic Contact Characteristics of p-InGaAs with Near-Noble Transition Metals of Pt and Pd (준귀금속 전이원소, Pt, Pd를 이용한 p-InGaAs의 오믹 접촉저항 특성 연구)

  • Park, Young-San;Ryu, Sang-Wan;Yu, Jun-Sang;Kim, Hyo-Jin;Kim, Sun-Hun;Kim, Jin-Hyeok
    • Korean Journal of Materials Research
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    • v.16 no.10
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    • pp.629-632
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    • 2006
  • Electrical characteristics of Pt/Ti/Pt/Au and Pd/Zn/Pd/Au contacts to p-type InGaAs grown on an InP substrate have been characterized as a function of the doping concentration and the annealing temperature. The Pt/Ti/Pt/Au contacts produced the specific contact resistance as low as $2.3{\times}10^{-6}{\Omega}{\cdot}cm^2$, when heat-treated at an annealing temperature of $400^{\circ}C$. Comparison of the Pt/Ti/Pt/Au and Ti/Pt/Au contacts showed that the first Pt layer plays an important role in reducing the contact resistivity probably by lowering energy barrier at the metal-semiconductor interface. For the Pd/Zn/Pd/Au contacts, the contact resistivity remained virtually unchanged with increasing annealing temperature. The specific contact resistivity as low as $4.7{\times}10^{-6}{\Omega}{\cdot}cm^2$ was obtained. The results indicate that the Pt/Ti/Pt/Au and Pd/Zn/Pd/Au schemes could be potentially important for the fabrication of InP-based optoelectronic devices, such as photodetector and optical modulator.