• 제목/요약/키워드: Sol-gel spin coating

검색결과 235건 처리시간 0.026초

Effect of annealing temperature on amorphous indium zinc oxide thin films prepared by a sol-gel spin-coating method

  • Lee, Sang-Hyun;Lee, Seung-Yup;Park, Byung-Ok
    • 한국결정성장학회지
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    • 제22권1호
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    • pp.15-18
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    • 2012
  • Transparent conductive indium zinc oxide thin films were prepared by spin-coating a sol-gel solution. Zinc acetate dihydrate [$Zn(CH_3COO)_2{\cdot}2H_2O$] and indium acetate [In$(CH_3COO)_3$] were used as starting precursors, and 2-methoxyethanol with 1-propanol as solvents. Upon annealing in a temperature range from 500 to $1000^{\circ}C$, the thin film crystallizes into polycrystalline $In_2O_3$(ZnO). The lowest electrical resistivity was obtained at an annealing temperature of $700^{\circ}C$ as $2{\Omega}{\cdot}cm$. Average optical transmittances were higher than 80% at all annealing temperatures. These experimental results confirm that the sol-gel spin-coating can be a good simplified practical method for forming transparent electrodes.

Characterization of F- and Al-codoped ZnO Transparent Conducting Thin Film prepared by Sol-Gel Spin Coating Method

  • Nam, Gil Mo;Kwon, Myoung Seok
    • 한국세라믹학회지
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    • 제53권3호
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    • pp.338-342
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    • 2016
  • ZnO thin film co-doped with F and Al was prepared on a glass substrate via simple non-alkoxide sol-gel spin coating. For a fixed F concentration, the addition of Al co-dopant was shown to reduce the resistivity mainly due to an increase in electrical carrier density compared with ZnO doped with F only, especially after the second post-heat-treatment in a reducing environment. There was no effective positive contribution to the reduction in resistivity due to the mobility enhancement by the addition of Al co-dopant. Optical transmittance of the ZnO thin film co-doped with F and Al in the visible light domain was shown to be higher than that of the ZnO thin film doped with F only.

(F, Ga) 코도핑된 ZnO 투명 전도 박막의 솔-젤 제조와 특성 (Sol-gel Spin-coating of ZnO Co-doped with (F, Ga) as A Transparent Conducting Thin Film)

  • 남길모;권명석
    • 반도체디스플레이기술학회지
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    • 제13권1호
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    • pp.91-95
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    • 2014
  • (F,Ga) co-doped ZnO thin film on glass substrate was fabricated via a simple non-alkoxide sol-gel spin-coating. Contrary to the F single doped ZnO thin film, the (F,Ga) co-doped thin film showed a significant reduce in electrical resistivity after a second post-heat-treatment in reducing environment. The resulting decrease in electrical resistivity with Ga co-doping is considered to be resulted from the increases both carrier density and mobility. The optical transmittance of the (F,Ga) co-doped thin film in the visible range showed higher transmittance with Ga co-doping compared with F single doped ZnO thin film.

Al-doped ZnO via Sol-Gel Spin-coating as a Transparent Conducting Thin Film

  • Nam, Gil-Mo;Kwon, Myoung-Seok
    • Journal of Information Display
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    • 제10권1호
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    • pp.24-27
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    • 2009
  • A simple nonalkoxide sol-gel route for depositing an Al-doped ZnO thin film on a glass substrate was derived in this study. The initial Al dopant concentration in the sol-gel preparation varied and ranged from 0 to 5%. The sol-gel-derived thin films showed c-plane preferred crystallization of their hexagonal phase, with nanosized grain structures. First and second post-heat-treatments were carried out to improve the film’s electrical resistivity. The carrier density and the Hall mobility were measured and discussed to explain the electrical resistivity. The optical transmittance within the visible range showed compatible properties, which indicates the possible use of A1-doped ZnO as a transparent electrode in flat panel displays.

Transparent Sol-Gel Hybrid Dielectric Material Coatings for Low k Passivation Layer

  • Yang, Seung-Cheol;Oh, Ji-Hoon;Kwak, Seung-Yeon;Bae, Byeong-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1453-1456
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    • 2009
  • Transparent sol-gel hybrid dielectric material (hybrimer) coating films were fabricated by spin coating and photo or thermal curing of sol-gel derived oligosiloxane resins. Hybrimer coating films are suitable as the passivation layer of TFT in AMLCD due to low dielectric constant, small loss tangent, low leakage current density, high transmittance and thermal stability.

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Fabrication of PZT Film by a Single-Step Spin Coating Process

  • Oh, Seung-Min;Kang, Min-Gyu;Do, Young-Ho;Kang, Chong-Yun;Nahm, Sahn;Yoon, Seok-Jin
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.193-193
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    • 2011
  • To obtain ceramic films, the sol-gel coating technique has been broadly used with heat treatment, but crack formation tend to occur during heat treatment in thick sol-gel films. We prepared PZT thin films by sol-gel method with single-step spin coating process. The PZT solution have been synthesized using lead acetate ($Pb(CH_3COO)_2$), zirconium acetylacetonate ($Zr(OC_3H_7^n)_4$), and titanium diisopropoxide bis(acetylacetonate) 75wt% in isopropanol ($Ti(OC_3H_7^i)_2(OC_3H_7^n)_2$) as starting materials and n-propanol was selected as a solvent. The poly(vynilpyrrolidone) (PVP) was added with 0, 0.25, 0.5, 0.75, and 1 molar ratios to control viscosity of solution. We investigated influence of the viscosity on thickness, microstructure, and electrical properties of final PZT films. Thermo-gravimetric analysis and differential scanning calorimeter (TGA/DSC) was carried out from room temperature to $800^{\circ}C$ in order to measure pyrolysis temperature. Structural characteristics were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Ferroelectric and dielectric properties were measured by RT66A (Radiant) and impedance analyzer (Agilent), respectively. The thicknesses of PZT films depended on incorporation of an excess amount of PVP. Finally, we obtained PZT films of good quality without crack formation via single-step spin coating.

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Preparation of$SnO_2$-based gas sensor by Sol-Gel process

  • Bui, Anh-Hoa;Baek, Won-Woo;Lee, Sang-Tae;Jun, Hee-Kwon;Lee, Duk-Dong;Huh, Jeung-Soo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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    • pp.135-135
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    • 2003
  • This paper presents the preparation of SnO$_2$ films by Sol-Gel process and using spin coating method, and their sensing properties in CO gas. Experimental procedure consisted of following steps: (1) Tin chloride(SnCl$_4$) and Ammonium hydrogen carbonate (NH$_4$HCO$_3$) were used as precursors; (2) the Sol solution with concentration of about 10wt% SnO$_2$ was prepared from washed Gel-precipitate for spin coating step; (3) thereafter, the coating solution was dropped onto the alumina (Al$_2$O$_3$) substrate that was then spun, the spin coating was carried out with total 10 times; (4) finally, the films were calcined for 3 hours at 50$0^{\circ}C$ or higher temperature (600, 700, 800 or 90$0^{\circ}C$) in order to obtain various gram sizes. The average grain size was calculated by Scherrer's equation using main peaks in XRD spectra; meanwhile the thickness, microstructure and surface morphology of the films were observed by FE-SEM.

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졸-겔 코팅에 의한 저온형 고체산화물 연료저지용 전해질막의 합성 및 특성 (Synthesis of Electrolyte Films for Low-Temperature Solid Oxide Fuel Cells by Sol-Gel Coating and Their Characteristics)

  • 현상훈;김승구;장운석
    • 한국세라믹학회지
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    • 제36권4호
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    • pp.391-402
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    • 1999
  • Characteristics of composite electrolytes which were prepared by coating a thin film of YSZ (yttria sta-bilized zirconia : (ZrO2)0.92 (Y2O3)0.08) on YDC (yttria doped ceria : Ce0.8Y0.2O1.9) with mixed conductivity have been investigated in order to develop the low-temperature solid oxide fuel cell. The thickness (t) of spin-coated YSZ thin films after the heat-treatment at 600$^{\circ}C$ was increased proportionally to the sol con-centrations (C) while the decrease in its thickness with the spin rate ($\omega$) could be expressed in the e-quation of ln t=9.49-0.53 ln $\omega$(0.99mol//s sol conc.) When the sol concentration and the spin rate being less than 0.99 mol/l and higher than 1000 rpm respectively reliable YSZ/YDC composite electrolytes could be obtained by multi-coating although several micro-cracks were observed in singly coated YSZ film surfaces. The dense YSZ film with a 1$\mu\textrm{m}$ thickness was prepared by coating of 0.99 mol/l YSZ sol five-times at 2000 rpm followed by heat-treatment at 1400$^{\circ}C$ for 2h, The adhesion between YSZ film and YDC substrate was found to be very good. The open circuit voltages of H2/O2 single cell with YSZ/YDC composite electrolytes were 0.79∼0.82 V at 800$^{\circ}C$ and 0.75∼0.77V at 900$^{\circ}C$ The open circuit voltage was inversely proportioned to the thickness ratio of YSZ thin film (1$\mu\textrm{m}$) to YDC substrate(0.28-2.22 mm)

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Sol-Gel 하드 코팅 막에서의 Spiropyran의 광 변색 특성 (Photochromic Properties of Spiropyran in Hard Coating Films Made by Sol-Gel Method)

  • 정상혁;조경인;박정용;송기창
    • Korean Chemical Engineering Research
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    • 제46권2호
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    • pp.310-315
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    • 2008
  • 실란커플링제인 glycidoxypropyl trimethoxysilane(GPTMS)과 vinyltriethoxysilane(VTES)을 출발물질로 하여 sol-gel 법에 의해 유-무기 혼성 용액을 제조하였다. 이 용액에 spiropyran계 광 변색 염료를 ethylacetate에 용해시킨 용액을 혼합하여 광 변색 코팅 용액을 제조하였다. 그 후 기재인 polycarbonate 시트에 스핀 코팅 시키고 $100^{\circ}C$에서 2 h 동안 열 경화시켜 광 변색성을 갖는 하드 코팅 막을 제조하였다. 코팅 막은 UV 광을 조사함에 의해 투명색으로부터 푸른색으로 변했다가 다시 투명색으로 변하는 가역적인 색변화를 보여주었다. 이때 코팅 막의 소색속도 및 연필경도는 코팅 용액 중의 GPTMS의 mol비가 증가됨에 따라 증가하였다.