• 한국정밀공학회지
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• 제23권5호
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• pp.59-67
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• 2006

Chemical Mechanical Polishing(CMP) in semiconductor production is characterized its output property by Removal Rate(RR) and Non-Uniformity(NU). Some previous works show that RR is determined by production of pressure and velocity and NU is also largely affected by velocity of flowfield during CMP. This study is about the direct measurement of velocity of slurry during CMP and whole flowfield upon the non-groove pad by Particle Image Velocimetry(PIV). Typical PIV system is modified adequately for inspecting CMP and slurry flowfield is measured by changing both pad rpm and carrier rpm. We performed measurement with giving some variation in the kinds of pad. The results show that the flowfield is majorly determined not by Carrier but by Pad in the case of non-groove pad.

• 설비공학논문집
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• 제13권12호
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• pp.1275-1281
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• 2001

Aqueous polymer solutions are known to have small pressure reduction. Paraffin slurries are known to have high thermal capacity. Paraffin particles are mixed into an aqueous polymer solution to make a new heat transfer fluid having high thermal capacity but low pressure reduction. The heat transfer characteristics of the new slurry was tested in a circular tube having a constant heat transfer boundary condition. The new slurry was found to have high Nusselt numbers as well as high thermal capacity and low pressure reduction in the laminar flow. The trends of the Nusselt numbers along the heating test section were studied for various heating conditions.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2006년도 하계학술발표대회 논문집
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• pp.111-115
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• 2006

To clarify the hydraulic and thermal characteristics of ice slurry which made from 6.5% ethylene glycol-water solution flow in the double tube and plate type heat exchanger, experimental studies were performed. The mass flux and Ice fraction of ice slurry were varied from 800 to $3,500 kg/m^2s$(or 7 to 17 kg/min) and from 0 to 25%, respectively. During the experiment, it was found that the measured pressure drop and heat transfer rate increase with the mass flux and ice fraction; however the effect of ice fraction appears not to be significant at high mass flux region. At the region of low mass flux, a sharp increase in the pressure drop and heat transfer rate were observed depends on mass flux.

• 대한기계학회논문집B
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• 제21권8호
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• pp.1068-1076
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• 1997

Emission control of acid exhaust gases from coal-fired power plants and waste incinerators has become an increasing concern of both industries and regulators. Among those gaseous emissions, SO$_{2}$ has been eliminated by a Spray Drying Absorber (SDA) system, where the exhaust gas is mixed with atomized limestone-water slurry droplets and then the chemical reaction of SO$_{2}$ with alkaline components of the liquid feed forms sulfates. Liquid atomization is necessary because it maximizes the reaction efficiency by increasing the total surface area of the alkaline components. An experimental study was performed with a laboratory scale SDA to investigate whether the scrubbing efficiency for SO$_{2}$ reduction increased or not with the application of a DC electric field to the limestone-water slurry. For a selected experimental condition SO$_{2}$ concentrations exited from the reactor were measured with various applied voltages and liquid flow rates. The applied voltage varied from -10 to 10 kV by 1 kV, and the volume flow rate of slurry was set to 15, 25, 35 ml/min which were within the range of emission mode. Consequently, the SO$_{2}$ scrubbing efficiency increased with increasing the applied voltage but was independent of the polarity of the applied voltage. For the electrical and flow conditions considered a theoretical study of estimating average size and charge of the atomized droplets was carried out based on the measured current-voltage characteristics. The droplet charge to mass ratio increased and the droplet diameter decreased as the strength of the applied voltage increased.

• 한국세라믹학회지
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• 제53권5호
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• pp.557-562
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• 2016

Pyrophyllite granule powders for thermal spray coating were successfully prepared through spray drying process. To produce a stable slurry, commercial pyrophyllite powder of $45{\mu}m$ in size was ball-milled for reduction of the size to $2{\sim}3{\mu}m$ and a dispersant was added to control the viscosity. Dense and spherical granules (average granule size : $59{\mu}m$) were prepared under conditions of 12,500 rpm for rotation velocity of the atomizer and 100 cps for slurry viscosity. The granules were then heat treated at $1,200^{\circ}C$ for proper handling strength and flow properties. The final granules had an apparent density of $0.725g/cm^3$ and a flow rate of 2.5 g/sec, which represent excellent properties to be used as the granule powder for thermal spray coatings.

• 플랜트 저널
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• 제15권1호
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• pp.38-44
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• 2019

본 연구에서는 1,000 MW급 석탄화력발전소용 탈황흡수탑을 대상으로 대기환경보전법 및 발전소 자체 배출규제치를 준수하면서 운전할 때, 석회석 슬러리 투입량을 조절하여 흡수탑 내부 슬러리 pH의 적정 범위를 찾고자 하였다. 배기가스 유량, 발전기 출력, 흡수탑 압력강하, 산화용 공기량을 고정한 상태에서 흡수탑 유입가스에 포함된 이산화황의 평균 농도, ${\bar{C\;in}}$ [ppm]을 500 ppm, 550 ppm, 600 ppm 그리고 635 ppm으로 변동시키며 운전하였을 때, 흡수탑 내부 적정슬러리 pH, 는 5.0, 5.2, 5.3 그리고 5.4였다. 이러한 결과로부터 흡수탑 유입가스에 포함된 이산화황의 평균 농도가 500~635 ppm의 범위일 때 상관관계식 을 이용하여 적정슬러리 pH를 산출하여 운전하는 것이 추천된다.

• Geomechanics and Engineering
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• 제34권2호
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• pp.155-171
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• 2023

Aiming at the grouting treatment of water inflow in karst conduits, a visualized experiment system for conduit-type grouting blocking was developed. Through the improved water supply system and grouting system, and the optimized multisource information monitoring system, the real-time observation of diffusion and deposition of slurry, and the data acquisition of pressure and velocity during the whole process of grouting were realized, which breaks through the problem that the monitoring element is easy to fail due to slurry adhesion in conventional test system. Based on the grouting experiments in static and flowing water, the diffusion and deposition behavior of the quick-setting slurry under different working conditions were analyzed. The temporal and spatial variation behavior of the pressure and velocity were studied, and the blocking mechanism of the grouting were further revealed. The results showed that: (1) Under the flowing water condition, the counter-flow diffusion distance of slurry was negatively correlated with the flow water velocity and the volume ratio of cement and sodium silicate (C-S ratio), and positively correlated with the grouting volume. The slurry deposition thickness was negatively correlated with the flowing water velocity, and positively correlated with the grouting volume and C-S ratio. (2) The pressure increased slowly before blocking of the flowing water and rapidly after blocking in karst conduits. (3) With the continuous progress of grouting, the flowing water velocity decreased slowly first, then significantly, and finally tended to be stable. According to the research results, some engineering recommendations were put forward for the grouting treatment of the conduit-type water inflow disaster, which has been successfully applied in the treatment project of the China Resources Cement (Pingnan) Limestone Mine. This study provided some guidance and reference for the parameter optimization of grouting for the treatment projects of water inflow in karst conduits.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2011년도 정기총회 및 추계학술대회 논문집
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• pp.1199-1213
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• 2011

이수가압식 쉴드공법은 사질토에서 적용성이 우수하지만, 이수압이 낮으면 이수 유출 및 지반변형이 발생하기도 한다. 따라서 이수가압식 쉴드에서는 초기 막장압보다 큰 초과 이수압을 가하여 막장 안정을 유지한다. 그러나 이수압이 너무 높으면 전방 지반의 수동 파괴를 유발하므로 수동 파괴 위험성을 줄이고 이수압을 증가시키는 방법으로 막장 전방에 수평 차수층을 설치하는 방안이 있으나 위치와 규모, 효과가 잘 알려져 있지 않다. 따라서 본 연구에서는 포화 사질토에서 막장전방에 차수 그라우팅 적용시 발생하는 효과를 규명하기 위하여 모형실험을 수행하였다. 실험 결과, 차수층이 있는 경우가 없는 경우보다 이수압을 크게 가할 수 있어서 전방 차수층이 막장 안정성을 증대시킬 수 있다는 것을 확인하였다. 막장 안정성 증대에 가장 큰 영향을 주는 적정 차수층은 길이 1.0~1.5D, 설치높이 1.0D로 나타났다. 초기 막장압 대비 최대 이수압의 비로 막장의 자립 안전율(F)을 제안할 수 있으며, 전방 차수층을 적정 위치에 설치할 경우 초기 막장압보다 3.5~4.0배 크게 이수압을 가할 수 있는 것으로 나타났다.

• 한국입자에어로졸학회지
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• 제12권4호
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• pp.145-150
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• 2016

During the chemical mechanical planarization (CMP) process, slurry that comprises abrasive particles can directly affect the CMP performance and quality. Mainly, the large particles in the slurry can generate the defects on the wafer. Thus, many kinds of filters have been used in the CMP process to remove unwanted over-sized particles. Among these filters, the point-of-use (POU) filter is used just before the slurry is supplied onto the CMP pad. In the CMP research field, analysis of the POU filter has been relatively exceptional, and previous studies have not focused on the standardized filtration efficiency (FE) or filter performance. Furthermore, conventional evaluation methods of filter performance are not appropriate for POU filters, as the POU filter is not a membrane type, but is instead a depth type roll filter. In order to accurately evaluate the POU filter, slurry FE according to particle size was measured in this study. Additionally, a CMP experiment was conducted with filtered slurry to demonstrate the effects of filtered slurry on CMP performance. Depending on the flow rate and the filter retention size, the FE according to particle size was different. When the small and large particles have different FEs, the total filtration efficiency (TFE) can still have a similar value. For this reason, there is a need to measure the FE with respect to the particle size to verify the effects of the POU filter on the CMP process.

• 한국분말재료학회지
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• 제22권2호
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• pp.87-92
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• 2015

Metallic porous materials have many interesting combinations of physical and geometrical properties with very low specific weight or high gas permeability. In this study, highly porous Cu foam is successfully fabricated by a slurry coating process. The Cu foam is fabricated specifically by changing the coating amount and the type of polyurethane foam used as a template. The processing parameters and pore characteristics are observed to identify the key parameters of the slurry coating process and the optimized morphological properties of the Cu foam. The pore characteristics of Cu foam are investigated by scanning electron micrographs and micro-CT analyzer, and air permeability of the Cu foam is measured by capillary flow porometer. We confirmed that the characteristics of Cu foam can be easily controlled in the slurry coating process by changing the microstructure, porosity, pore size, strut thickness, and the cell size. It can be considered that the fabricated Cu foams show tremendous promise for industrial application.