• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.372-373
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• 2006

Chemical kinetics affects Cu CMP results (removal rate, Non uniformity etc.) Because Cu is removed by chemical action. Key factors in chemical kinetics are process temperature and concentration of slurry components. In this study, Hydrogen peroxide and citric acid were selected as a oxidant and a complexing agent and Slurry were made by mixing this components. In order to study effects of Chemical Kinetics, X-ray photoelectron spectroscopy (XPS) were performed on Cu sample after etching test as concentration of citric acid and slurry temperature. Finally Cu CMP was performed as same conditions.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.3
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• pp.382-388
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• 2006

This study experimented to understand the effect of transporting ice slurry through in pipe with valve. And at this experiment it used ethylene glycol-water solution and a concentration is 30wt%. The experimental apparatus was constructed of ice slurry generation tank, turbo flow meter, manometers for differential pressure measuring, PIV system for flow pattern measuring. illumination and along a horizontal circular tube with valve as test section. The experiments were carried out under various conditions, with velocity of fluid at the entry ranging from 0.5 to 1.5 m/s and concentration of IPF is 30%. Also valve open rate is 50%, 75%, 100%.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.144-149
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• 2006

In this study ice making characteristics are experimentally investigated for the ice slurry generating system which is pneumatically operated. The experimentations are conducted under the various test conditions such as chilled water inlet temperature, aqueous solution concentration, flow rate of cooling water, scraper pitch and frequency of cylinder stroke. For the above experimental conditions, ice making characteristics of the slurry ice generating system are evaluated in terms of the overall heat transfer coefficient, heat transfer rate and the amount of slurry ice generation. And the experimental results show that the heat transfer rate of the system increases as the flow rate of cooling water solution increases and the concentration of ethylene glycol and inlet temperature of chilled water decreases.

• Journal of the Korea Organic Resources Recycling Association
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• v.23 no.4
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• pp.74-85
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• 2015

Recently, the number of anaerobic digestion facility for livestock manure is on the rise in Korea. All of the livestock manure anaerobic digestion facilities in operation use pig manure slurry as a substrate for anaerobic digestion. Generally, pig manure slurry is composed of 97% water and 3% solids. The particulate matter, such as corn in the form of particles that is undigested by pig is contained in the pig manure slurry. Particulate matter is a factor reducing the effectiveness of biogas production in the anaerobic digestion process. In this study, mechanical grinding treatment was applied to analyze the effect of methane production from pig manure slurry by reducing the particle size of the slurry. On the other hand, the effect of the solid concentration levels on methane production and methane content of the biogas was analyzed. The fine particle concentration in the pig manure slurry was increased by the mechanical grinding treatment. And methane production and methane content of the biogas were higher in grinded pig manure slurry than untreated raw slurry.

• Journal of Advanced Marine Engineering and Technology
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• v.29 no.7
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• pp.779-784
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• 2005

This paper presents the theory of similarity transformations applied to the momentum and energy equations for laminar, forced, external boundary layer flow over a horizontal flat plate which leads to a set of non-linear, ordinary differential equations of phase change material slurry(PCM Slurry). The momentum and energy equation set numerically to obtain the non-dimensional velocity and temperature profiles in a laminar boundary layer are solved. The heat transfer characteristics of PCM slurry was numerically investigated with similar method. It is clarified that the similar solution method of Newtonian fluid can be used reasonably this type of PCM slurry which has low concentration. The data of local wall heat flux and convective heat transfer coefficient of PCM slurry are higher than those of water more than 150$\~$200$\%$, approximately.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.274-278
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• 2002

The purpose of this study was to characterize the reaction of Cu surface with Cu slurry and CMP performance as a function of additives in CMP slurry. The polish rate of Cu was dependent on the kind of organic acids added in slurry. It was considered that polish rate of Cu was dependent on the concentration of carboxylates and mean particle size. When the etchant and oxidant were added in slurry, the highest removal rate and lower etch rate were measured at neutral pH. The addition of etchant, oxidant and pH adjustor played key roles of CMP ability in slurry. As the pH increased, polish rate of Cu was increased by the enhanced the mechanical effects due to effective dispersion of slurry particles. Alumina abrasives was more desirable for 1st step slurry because of high removal rate of Cu and high selectivity ratio among TaN and Cu.

• Asian-Australasian Journal of Animal Sciences
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• v.17 no.11
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• pp.1608-1614
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• 2004

This study was performed to evaluate the accuracy, validation and applicability of UV spectrophotometer (UV), Ion Chromatography (IC), and Detector tube (DT) methods for measuring ammonia (NH3) concentration in a swine confinement house and swine slurry storage tank. The mean values of $NH_{3}$ emitted from the house and slurry were 5.333 ppm and 42.192 ppm for the IC method; 4.13 ppm and 36.29 ppm for the Detector tube; and 5.417 ppm and 34.193 ppm for the UV method. The accuracy and the correlation of an ammonia level analyzed by the IC method compared to the UV method were 98% and 0.998($R^{2}$) in the swine confinement house and 94% and 0.997($R^{2}$) in the swine slurry storage tank. On the other hand, those of ammonia level measured by the Detector tube compared to the UV method were 77% and 0.957($R^{2}$) in the swine confinement house and 82% and 0.941($R^{2}$) in the swine slurry storage tank. This indicated that the accuracy and the correlation of the IC method compared to the UV method were higher than those of the Detector tube method compared to the UV method. Therefore, it was concluded that the IC method was more accurate in measuring ammonia concentration in a swine house and a swine slurry storage tank. The Detector tube method should not be applied to the swine slurry storage tank in which ammonia concentration is generally higher than 30 ppm because low accuracy is caused by a gross space between scales inscribed in the Detector tube.

• Journal of Animal Environmental Science
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• v.19 no.2
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• pp.101-108
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• 2013

This study was to investigate the effect of addition levels of odor reducing contents on reducing the concentration of odorous compounds. Slurry treatments included three levels mixture of horseradish powder (HP), mushroom waste (MW) and probiotics powder (PP), and non-treatment control (n=4 each group). Levels of odorous compounds were measured from the liquid slurry incubated in room temperature ($20{\sim}25^{\circ}C$) for 2 wk in chamber whose structure is similar to slurry pit. Concentration of phenols and indoles was lower (p<0.05) in level 1, which was mixed HP 0.01%, MW 0.4% and PP 0.004% (98.69, 1.87 ppm) compared to control. Short chain fatty acid (SCFA) and branched chain fatty acid (BCFA) was lowest (p<0.05) level 1 (6,557, 1675 ppm). Taken together, lower level are effective in reducing odorous compounds in pig slurry.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.8
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• pp.599-606
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• 2007

An experimental study was performed to measure a ice concentration of ice slurry flowing in a pipe in a real time. In the present paper, we suggested a measuring method by a refractive index and compared it to other methods by a freezing point and a density. To measure the refractive index of the solution, ice particles in the ice slurry should be completely removed and a hydro-cyclone was introduced instead of a mesh. The measuring method through the refractive index coincided with the density method using the real-time solution density within ${\pm}5%$ error range, having the error range less than the other two methods. In the other hand, the measuring method through the density has a good resolution, but the result using the initial density of the solution was different more than 10% error from that using the real-time density. And it has an error range 1.5 times greater than the method through the refractive index.

• Journal of Korean Society on Water Environment
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• v.18 no.4
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• pp.435-440
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• 2002

A pilot scale SBR (effective volume, $20m^3$) for the treatment of piggery wastewater treatment was performed with three different kinds of wastewater; fermenter effluent, scraper type and slurry type. The react phase in SBR was performed by sub-cycle operation consisting of repeated short cycle of anoxic-aerobic step. The fermenter effluent was characterized by the rapid nitrification and $NO_X-N$ accumulation due to depletion of organic matter in wastewater. The scraper type wastewater showed appropriate nitrogen removal efficiency, however, a poor response capacity for high loading rate often resulted in increased nitrogen concentration in effluent. Moreover, severe P release was the most serious problem in scraper type wastewater. SBR treated slurry type wastewater with high nitrogen removal efficiency to satisfy effluent quality requirement. It was thought that high concentration of organic matter in slurry made it possible to uptake P during SBR operation, where P concentration of 140mgP/l was decreased to 8mgP/l. As results, SBR was suitable to treat slurry type wastewater which has been discharged to the ocean till now.