Properties of Single Crystalline 3C-SiC Thin Films Grown with Several Carbonization Conditions (여러 탄화조건에 따라 성장된 단결정 3C-SiC 박막의 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.23 no.11
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- pp.837-842
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- 2010