• Title/Summary/Keyword: Silicon waste sludge

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Analysis of Patents on the Recycling Technologies for the Waste Silicon Sludge (폐실리콘 슬러지의 재활용(再活用) 기술(技術)에 관한 특허동향(特許動向) 분석(分析))

  • Kil, Dae-Sup;Jang, Hee-Dong;Kang, Kyung-Seok;Han, Hye-Jung
    • Resources Recycling
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    • v.17 no.4
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    • pp.66-76
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    • 2008
  • Silicon wafer is used in making semiconductor device of various forms in the semiconductor industry. Silicon wafer is produced by cutting silicon ingot and sludge containing silicon results from cutting process. The amount of silicon sludge is increasing owing to the usage of semiconductor device in many industry sectors. These days the recycling technologies of the waste silicon sludge has been widely studied from view point of economy and efficiency. In this study, patents on the recycling technologies of the waste silicon sludge were analyzed. The range of search was limited in the open patents of USA, European Union, Japan, and Korea up to september, 2007. Patents were collected using key-words and filtered by filtering criteria. The trend of the patents was analyzed by the years, countries, companies, and technologies.

Study on the Producing SiC Based Briquette for Raised Temperature of Molten Steel using Si Sludge Induced in the Process of Si Fabrication (실리콘 제조 공정에서 발생한 실리콘 슬러지를 활용한 용강 SiC계 승온제 제조 연구)

  • Lee, Chang-Hyun;Lee, Sang-Ro;Park, Man-Bok;Koo, Yeon-Soo;Lee, Man-Seung
    • Resources Recycling
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    • v.26 no.6
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    • pp.45-49
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    • 2017
  • Most Waste slurry is produced in the process of silicon manufacturing for semiconductor industry, containing silicon (Si) and silicon carbide (SiC). Waste slurry is simply stored with solidifying by cement or buried. On the other hand, it was suggested in this study that the waste slurry should be used for heating source as supplementary material in steel making process. The waste slurry was refined and pulverized, which was recycled into SiC-based sludge briquette. Chemical composition for SiC-based sludge briquette was analyzed and the feature of heating source was observed in accordance with the injection time and input amount. As a result, SiC-based sludge briquette in terms of low cost and high efficiency had an effect on increasing liquid steel temperature in steel making plants.

Synthesis of Tetramethylorthosilicate (TMOS) and Silica Nanopowder from the Waste Silicon Sludge (폐(廢)실리콘슬러지로부터 TMOS 및 실리카 나노분말(粉末) 제조(製造))

  • Jang, Hee-Dong;Chang, Han-Kwon;Cho, Kuk;Kil, Dae-Sup
    • Resources Recycling
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    • v.16 no.5
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    • pp.41-45
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    • 2007
  • Tetramethylorthosilicate (TMOS) and silica nanopowder were synthesized from the waste silicon sludge containing 15% weight of silicon powder. TMOS, a precursor of silica nanopowder, was firstly prepared from the waste silicon sludge by catalytic chemical reaction. The maximum recovery of the TMOS was 100% after 5 hrs regardless of reaction temperature above $130^{\circ}C$. But the initial reaction rate became faster while the reaction temperature was higher than $150^{\circ}C$. As the methanol feedrate Increased from 0.8 ml/min to 1.4 ml/min, the yield of reaction was not varied after 3 hrs. Then, silica nanopowder was synthesized from the synthesized TMOS by flame spray pyrolysis. The morphology of as-prepared silica nanopowder was spherical and non-aggregated. The average particle diameters ranged from 9 nm to 30 nm and were in proportional to the precursor feed rate, and precursor concentration.

Recycling of Cutting Oil from Silicon Waste Sludge of Solar Wafer (태양광용 웨이퍼 실리콘 폐슬러지로부터 절삭유의 재생)

  • Um, Myeong-Heon;Lee, Jong-Jib;Ha, Beom Yong
    • Clean Technology
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    • v.22 no.4
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    • pp.274-280
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    • 2016
  • In this study, it was to develop a chemical method that can recycle the cutting oil which accounts for about 25% of the cost of the process among containing materials of silicon waste sludge generated in the process for producing a solar cell wafer. The 7 types of reagents have been used, including acetone, HCl, NaOH, KOH, $Na_2CO_3$, HF, $CH_2Cl_2$, etc. for this experiment. And It was carried out at a speed of 3000 rpm for 60 minutes centrifugation after performing a reaction with a waste sludge at various concentrations. As a result, the best reagents and conditions for separating the solid such as a silicon powder and a metal powder and liquid cutting oil were identified as 0.3 N NaOH. It is found to be pH 6.05 in a post-processing recycled cutting oil with 0.3 N NaOH after reaction of waste sludge and 0.1 N HCl which is effective to remove metal powder in order to adjust the pH to suit the properties of the weak acid is a commercially available cutting oil and it showed excellent turbidity than when applied to sludge with 0.3 N NaOH alone. The results of FT-IR analysis which can compare the properties of the commercially available cutting oil shows it has a possibility of recycling oil. The cutting oil recovery rate obtained through the experiment was found to be 86.9%.

Briquetting of Waste Silicon Carbide Obtained from Silicon Wafer Sludges (실리콘 wafer sludge로부터 얻어진 SiC의 단광화 기술)

  • Koo, Seong Mo;Yoon, Su Jong;Kim, Hye Sung
    • Journal of Powder Materials
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    • v.23 no.1
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    • pp.43-48
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    • 2016
  • Waste SiC powders obtained from silicon wafer sludge have very low density and a narrow particle size distribution of $10-20{\mu}m$. A scarce yield of C and Si is expected when SiC powders are incorporated into the Fe melt without briquetting. Here, the briquetting variables of the SiC powders are studied as a function of the sintering temperature, pressure, and type and contents of the binders to improve the yield. It is experimentally confirmed that Si and C from the sintered briquette can be incorporated effectively into the Fe melt when the waste SiC powders milled for 30 min with 20 wt.% Fe binder are sintered at $1100^{\circ}C$ upon compaction using a pressure of 250 MPa. XRF-WDS analysis shows that an yield of about 90% is obtained when the SiC briquette is kept in the Fe melt at $1650^{\circ}C$ for more than 1 h.

Suggestion of Physicochemical Characteristics and Safety Management in the Waste Containing Nanomaterials from Engineered Nano-materials Manufacturing Plants and Waste Treatment Facilities (산업용제조시설과 폐기물처리시설에서 발생된 나노폐기물의 물리화학적 특성 및 안전관리방안 제시)

  • Kim, Woo-Il;Yeon, Jin-Mo;Cho, Na-Hyeon;Kim, Yong-Jun;Um, Nam-Il;Kim, Ki-Heon;Lee, Young-Kee
    • Journal of Korea Society of Waste Management
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    • v.35 no.7
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    • pp.670-682
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    • 2018
  • Engineered nanomaterials (ENMs) can be released to humans and the environment through the generation of waste containing engineered nanomaterials (WCNMs) and the use and disposal of nano-products. Nanoparticles can also be introduced intentionally or unintentionally into waste streams. This study examined WCNMs in domestic industries, and target nanomaterials, such as silicon dioxide, titanium oxide, zinc oxide, nano silver, and carbon nanotubes (CNTs), were selected. We tested 48 samples, such as dust, sludge, ash, and by-products from manufacturing facilities and waste treatment facilities. We analyzed leaching and content concentrations for heavy metals and hazardous constituents of the waste. Chemical compositions were also measured by XRD and XRF, and the unique properties of nano-waste were identified by using a particle size distribution analyzer and TEM. The dust and sludge generated from manufacturing facilities and the use of nanomaterials showed higher concentrations of metals such as lead, arsenic, chromium, barium, and zinc. Oiled cloths from facilities using nano silver revealed high concentrations of copper, and the leaching concentrations of copper and lead in fly ash were higher than those in bottom ash. In XRF measurements at the facilities, we detected compounds such as silicon dioxide, sulfur trioxide, calcium oxide, titanium dioxide, and zinc oxide. We found several chemicals such as calcium oxide and silicon dioxide in the bottom ash of waste incinerators.

Fabrication of TiO2 Coated Si Nano Particle using Silicon Sawing Sludge (실리콘 절삭 슬러지를 이용한 TiO2 코팅 나노 실리콘 입자의 제조)

  • Seo, Dong Hyeok;Yim, Hyeon Min;Na, Ho Yoon;Kim, Won Jin;Kim, Ryun Na;Kim, Woo-Byoung
    • Journal of Powder Materials
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    • v.28 no.5
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    • pp.423-428
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    • 2021
  • Here, we report the development of a new and low-cost core-shell structure for lithium-ion battery anodes using silicon waste sludge and the Ti-ion complex. X-ray diffraction (XRD) confirmed the raw waste silicon sludge powder to be pure silicon without other metal impurities and the particle size distribution is measured to be from 200 nm to 3 ㎛ by dynamic light scattering (DLS). As a result of pulverization by a planetary mill, the size of the single crystal according to the Scherrer formula is calculated to be 12.1 nm, but the average particle size of the agglomerate is measured to be 123.6 nm. A Si/TiO2 core-shell structure is formed using simple Ti complex ions, and the ratio of TiO2 peaks increased with an increase in the amount of Ti ions. Transmission electron microscopy (TEM) observations revealed that TiO2 coating on Si nanoparticles results in a Si-TiO2 core-shell structure. This result is expected to improve the stability and cycle of lithium-ion batteries as anodes.

A Comparative Study on Morphologies and Characteristics of Silica Nanoparticles Recycled from Silicon Sludge Waste of Semiconductor Process Based on Synthesis Methods (반도체 공정에서 발생하는 폐실리콘 슬러지의 재활용을 통한 실리카 나노입자의 제조 및 합성법에 따른 형상 및 특성 비교 연구)

  • Jiwon Kim;Minki Sa;Yeon-Ryong Chu;Suk Jekal;Ha-Yeong Kim;Chan-Gyo Kim;Hyung Sub Sim;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.31 no.3
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    • pp.5-13
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    • 2023
  • In this study, a comparative study is conducted on the synthesis methods for silica nanoparticle employing the silicon sludge waste generated from the semiconductor manufacturing processes. Specifically, acid-washed silicon sludge wastes with no impurities are employed as the precursors of sol-gel and hydrothermal methods for silica nanoparticles preparation. The morphologies and properties of silica nanoparticles synthesized via two synthetic methods are examined by various analysis methods. As a result, silica nanoparticles from the sol-gel method are fabricated with high purity and uniform shape, while the hydrothermal method exhibits advantages in yield and ease of synthetic process. This comparative study offers detailed experimental results on the two synthetic methods for silica nanoparticle synthesis, which may contribute to the establishment of manufacturing high-value materials using the by-products generated in the semiconductor process.

Microstructures Of Continuously Porous SiC-Si3N4 Composites Fabricated Using Waste SiC Sludge (폐 SiC 슬러지를 이용하여 제조한 연속다공질 SiC-Si3N4 복합체의 미세조직)

  • Gain Asit Kumar;Lee Hee-Jung;Jang Hee-Dong;Lee Byong-Taek
    • Korean Journal of Materials Research
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    • v.15 no.3
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    • pp.177-182
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    • 2005
  • Large amounts of the waste SiC sludge containing small amounts of Si and organic lubricant were produced during the wire cutting process of the single silicon crystal ingots. The waste SiC sludge was purified by the washing process and the purified SiC powders were used to fabricate continuously porous $SiC-Si_3N_4$ composites using a fibrous monolithic process, in which carbon, $6wt\%\;Y_2O_3-2\;wt\%\;A1_2O_3$ and ethylene vinyl acetate were added as a pore-forming agent, sintering additives, and binder, respectively. In the burning-out process, carbon was fully removed and continuously porous $SiC-Si_3N_4$ composites were successfully fabricated. The green bodies containing SiC, Si particles and sintering additives were nitrided at $1410^{\circ}C$ in a flowing $N_2+10\%\;H_2$ gas mixture. Continuously porous composites were combined with SiC, ${\alpha}Si_3N_4,\;\beta-Si_3N_4$ and a few $\%$ of Fe phases. The pore size of the 2nd and the 3rd passed $SiC-Si_3N_4$ composites was $260\;{\mu}m$ and $35\;{\mu}m$ in diameter, respectively.

Fabrication of Silicon Nitride Ceramics Using Semiconductor-Waste-Si Sludge (반도체 폐 Si 슬러지를 이용한 질화규소세라믹의 제조)

  • Lee, Byong-Taek;Yoo, Jung-Ho;Kim, Hai-Doo
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1170-1175
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    • 1999
  • The microstructures and mechanical properties of $Si_3N_4$ ceramics produced by nitridation and post-sintering using semiconductor-waste-Si sludge were investigated. Lots of microcracks were observed in the waste-Si powders which contained some amounts of amorphous $SiO_2$. The nitridation rate of waste-Si compacts showed lower value than that of commercial Si powder compacts. The nitridation rate was increased with increasing nitridation temperature and then the percent of nitridation at 1470$^{\circ}C$ showed 98%. The phases of $Si_3N_4$ in the reaction-bonded bodies were mixed with ${\alpha}$ and ${\beta}$-type, and small amounts of $Si_2N_2O$ phase while those after post-sintering were ${\beta}$-$Si_3N_4$ and ${\alpha}$-Sialon. The sample post-sintered at 1950$^{\circ}C$ showed the fracture toughness of 5.6 $^MPa{\cdot}m^{1/2}$ and the fracture strength of 497 MPa which were lower than those of sintered body using commercial Si powder possibly due to the formation of ${\alpha}$-Sialon phase.

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