• 한국재료학회지
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• 제29권9호
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• pp.547-552
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• 2019

In the present study, the thermal conductivity of a silicon nitride($Si_3N_4$) thin-film is evaluated using the dual-wavelength pump-probe technique. A 100-nm thick $Si_3N_4$ film is deposited on a silicon (100) wafer using the radio frequency plasma enhanced chemical vapor deposition technique and film structural characteristics are observed using the X-ray reflectivity technique. The film's thermal conductivity is measured using a pump-probe setup powered by a femtosecond laser system of which pump-beam wavelength is frequency-doubled using a beta barium borate crystal. A multilayer transient heat conduction equation is numerically solved to quantify the film property. A finite difference method based on the Crank-Nicolson scheme is employed for the computation so that the experimental data can be curve-fitted. Results show that the thermal conductivity value of the film is lower than that of its bulk status by an order of magnitude. This investigation offers an effective way to evaluate thermophysical properties of nanoscale ceramic and dielectric materials with high temporal and spatial resolutions.

• 대한기계학회논문집B
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• 제34권2호
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• pp.105-111
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• 2010

양극산화법과 DRIE 법으로 제작된 다공성 실리콘막을 이용하여 두 종류의 전기침투 펌프를 제작하였다. 펌프의 성능은 유기용매를 이용하여 유량과 단위전류당 유량으로 측정하였다. 두 종류 펌프 모두 기존의 다공성 유리막으로 제작된 전기침투 펌프보다 성능이 우월했다. 특히 DRIE 법으로 제작된 다공성 실리콘막은 유량과 단위전류당 유량이 모두 월등한 성능을 보였다. DRIE 법은 널리 알려진 방법이기에 이와 같이 제작된 펌프는 다양한 응용 분야에 비교적 쉽게 적용될 것으로 기대된다.

• 한국산학기술학회논문지
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• 제13권8호
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• pp.3618-3622
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• 2012

본 연구에서는 LCD 생산라인에서 장기적으로 정체상태에 있는 모듈의 수율을 높이고, 현재 TFT-LCD 생산공정에 필수적인 고압의 실리콘주입 장비 및 정밀 제어시스템을 개발하였다. 본 개발을 통하여 향후 본격생산을 준비중인 차세대 디스플레이 생산라인뿐만 아니라 중국으로 이전중인 LCD 생산 설비의 라인 환경에서 장비의 효율을 최대한 발휘함으로써 신규 투자비용을 최소화하고 최대의 효과를 창출할 수 있도록 세부 동작 시퀀스를 제어하기 위한 H/W와 S/W 시스템을 생산라인에 실장하였다. 또한, Fast-evacuating을 위한 Vacuum pump 구조를 제안하고 Pump control 회로 설계 및 실험을 통해 제품화하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1442-1445
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• 2003

In precision machinery industry, it's required with small size and low noise design to using in constant liquid delivery equipment. To accomplish it's purpose, we designed the check valve with rubber sheet of circle shapes as a possible assembly in pump body. The test equipment for piezoelectric pump was able to test pressure-flow property and output property of piezoelectric pump by variation(magnitude of voltage and frequency) of input power.

• 한국생산제조학회지
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• 제26권4호
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• pp.387-394
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• 2017

This paper develops a pump system for patient with chronic pain or cancer. The pump module is consists of two micro-valve and membrane. The micro-valve is operated by a solenoid. With two solenoid valves which are connected via a drug transport line, the inlet and outlet are completely blocked. A silicon rubber membrane located between the two valves makes the flow-rate constant without any backflow. This pump module can control the flow-rate of drugs by controlling the time that the valves are opened and closed. The reservoir consists of a drug chamber and a gas chamber. As the gas chamber encloses the drug chamber, propellant gas which is injected into the gas chamber pressurizes the drug chamber regardless of volume of the drug chamber. To design the pump module, analysis a constant efficiency test, and accuracy test for the pump module were conducted.

• Journal of the Optical Society of Korea
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• 제17권5호
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• pp.433-440
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• 2013

We present an experimental and numerical study of spectral profiles of effective group indices of hydrogenated amorphous silicon (a-Si:H) waveguides and of their chromatic-dispersion effect on the four-wave-mixing (FWM) signal generation. The a-Si:H waveguides of 220-nm thickness and three different widths of 400, 450 and 500 nm were fabricated by using the conventional CMOS device processes on a $2-{\mu}m$ thick $SiO_2$ bottom layer deposited on 8-inch Si wafers. Mach-Zehnder interferometers (MZIs) were formed with the a-Si:H waveguides, and used for precise measurement of the effective group indices and thus for determination of the spectral profile of the waveguides' chromatic dispersion. The wavelength ranges for the FWM-signal generation were about 45, 75 and 55 nm for the 400-, 450- and 500-nm-wide waveguides, respectively, at the pump wavelength of 1532 nm. A widest wavelength range for the efficient FWM process was observed with the 450-nm-wide waveguide having a zero-dispersion near the pump wavelength.

• Journal of the Optical Society of Korea
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• 제17권5호
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• pp.423-427
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• 2013

We present the preparation and characteristics of liquid-phase sensors based on nano-porous silicon multilayer structures for determination of organic content in gasoline. The principle of the sensor is a determination of the cavity-resonant wavelength shift caused by refractive index change of the nano-porous silicon multilayer cavity due to the interaction with liquids. We use the transfer matrix method (TMM) for the design and prediction of characteristics of microcavity sensors based on nano-porous silicon multilayer structures. The preparation process of the nano-porous silicon microcavity is based on electrochemical etching of single-crystal silicon substrates, which can exactly control the porosity and thickness of the porous silicon layers. The basic characteristics of sensors obtained by experimental measurements of the different liquids with known refractive indices are in good agreement with simulation calculations. The reversibility of liquid-phase sensors is confirmed by fast complete evaporation of organic solvents using a low vacuum pump. The nano-porous silicon microcavity sensors can be used to determine different kinds of organic fuel mixtures such as bio-fuel (E5), A92 added ethanol and methanol of different concentrations up to 15%.

• Tribology and Lubricants
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• 제18권2호
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• pp.105-108
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• 2002

Specially designed grooved journal bearings are installed in the main coolant pump for SMART (System-integrated Modular Advanced ReacTor) to support radial load on the rotating shaft. The canned motor type main coolant pumps are arranged vertically on the reactor vessel and filled with circulating primary coolant which is pure water. The main coolant pump bearings are lubricated with this coolant without any other external lubricant supply. Because lubricating condition is too severe for this bearing to generate proper hydrodynamic film, investigation of lubrication characteristics of the journal bearing is important to satisfy life constraint of whole pump system, and the results will be applied to the analysis of dynamic characteristics of the shaft system. The bearing is made of silicon graphite which has self$.$lubricating effect. A lubrication analysis method is proposed for this vertically grooved journal bearing in the main coolant pump of SMART, and lubricational characteristics of the bearings are examined in this paper.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1017-1019
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• 1998

In this paper, the fabrication of a micropump with two giant magnetostrictive films of Sm-Fe and Tb-Fe is presented. The pump consist of one silicon wafer and one cover glass. The micropump consists of an actuator diaphragm, a paired nozzle and diffuser, and two through holes. The Structure of the micropump is fabricated by the chemical vapor deposition, the etching and the sputtering of the magnetostrictive films. The deflection of the actuator measured diaphragm is measured by using the laser vibrometer and the flow rate of the micro pump is observed by using a video microscope.

• Journal of Information Display
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• 제7권1호
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• pp.35-40
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• 2006

Organic light-emitting diode (OLED) display panel using the charge-pump (CP) pixel addressing scheme was fabricated, and the results show that it is applicable for information display. A CP-OLED panel with 64 ${\times}$ 64 pixels consisting of thin-film capacitors and amorphous silicon Schottky diodes was fabricated using conventional thin-film processes. The pixel drive circuit passes electrical current into the OLED cell during most of the frame period as in the thin-film transistor (TFT)-based active-matrix (AM) OLED displays. In this study, the panel was operated at a voltage level of below 4 V, and this operation voltage can be reduced by eliminating the overlap capacitance between the column bus line and the common electrode.