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http://dx.doi.org/10.5762/KAIS.2012.13.8.3618

Study on the Silicon Pump and Control System for TFT-LCD Manufacturing Process  

Park, Hyoung-Keun (Department of Electronic Engineering, Namseoul University)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.13, no.8, 2012 , pp. 3618-3622 More about this Journal
Abstract
In this study, the yield of the modules in LCD production lines, improving current TFT-LCD production process is essential for high-pressure silicone injection equipment, and precision control system was developed. This full-scale production of the future through the development of next-generation display production line is being prepared, being transferred to China in LCD production facilities can make the most of efficient equipment. Therefore, minimize the cost of new investment and help create the maximum effect to control the detailed behavior of the sequence H/W and S/W system was installed on the production line. In addition, Fast-evacuating the structure proposed for the Vacuum pump, Pump control circuit design and experimental results has been completed.
Keywords
Silicon Pump; Fast-evacuating; Vacuum pump; Pump Control;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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