Browse > Article
http://dx.doi.org/10.3795/KSME-B.2010.34.2.105

Development of Porous Silicon Electro-osmotic Pumps for High Flow Rate Per Current Flow Delivery of Organic Solvents  

Kwon, Kil-Sung (Dept. of Mechanical Engineering, Sogang Univ.)
Kim, Dae-Joong (Dept. of Mechanical Engineering, Sogang Univ.)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.34, no.2, 2010 , pp. 105-111 More about this Journal
Abstract
Two types of electro-osmotic pumps were prepared: with anodized and DRIE porous silicon. The pump performance was characterized for both types in terms of flow rate and flow rate per current using organic solvents. Both types of electro-osmotic pumps showed a better performance compared to porous glass electro-osmotic pumps. The DRIE porous silicon electro-osmotic pump especially demonstrated an excellent flow rate and flow rate per current performance. The DRIE porous silicon electro-osmotic pump is expected to help in the development of electro-osmotic pumps and micropumps in general due to the recently widespread availability of DRIE processes.
Keywords
Electroosmotic Pump; Porous Silicon Membrane; Organic Solvent Pumping;
Citations & Related Records

Times Cited By SCOPUS : 1
연도 인용수 순위
1 Iverson, B. D. and Garimella, S.V., 2008, "Recent Advances in Microscale Pumping Technologies: a Review and Evaluation," Microfluidics and Nanofluidics, Vol. 5, Issue. 2, pp. 145-174   DOI
2 Wang, X., Wang, S., Gendhar, B., Cheng, C., Byun, C. K., Li, G., Zhao, M. and Liu, S., 2009, "Electroosmotic Pumps for Microflow Analysis," Trac-Trends in Analytical Chemistry, Vol. 28, No. 1, pp. 64-74   DOI   ScienceOn
3 Zeng, S., Chen, C. H., Santiago, J. G., Chen, J., Zare, R. N., Tripp, J. A., Svec, F. and Frechet, J., 2001, "Electroosmotic Flow Pumps with Polymer Frits," Sensors and Actuators B Chemisty , Vol. B82, No. 2-3, pp. 209-212
4 Zeng, S., Chem, C.H., Mikkelsen, J. C., and Santiago, J. G., 2001, "Fabrication and Characterization of Electroosmotic Micropumps," Sensors and Actuators B Chemisty, Vol. B79, No. 2-3, pp. 107-114
5 Pretorius, V., Hopkins, B. J. and Schieke, J. D., 1974, "Electro-osmosis a new concept for high-speed liquid chromatography," Journal of Chromatography, 99, pp23-30   DOI   ScienceOn
6 Berroche, Y., Avenas, Y., Schaeffer, C., Wang, P. and Chang, H. –C., 2008, "Optimazation of High Flow Rate Nanoporous Electroosmotic Pump," Journal of Fluids Engineering, Vol. 130, pp. 081604-1-081604-7   DOI   ScienceOn
7 Junwu, K., Zhigang, Y., Taijiang, P., Guangming, C. and Boda, W., 2005, "Design and Test of a High-Performance Piezoelectric Micropump for Drug Delivery," Sensors and Actuators A :Physical, 121, pp. 156-161   DOI   ScienceOn
8 Presting, H., Konle, J., Starkov, V., Vyatkin, A. and Konig, U., 2004, "Porous Silicon for Micro-Sized Fuel Cell Reformer Units," Materials Science and Engineering B, Vol. 108, No. 1-2, pp. 162-165   DOI   ScienceOn
9 Yao, S., A. Myers, M., Posner, J. D., Rose, K. A. and Santiago, J. G., 2006, "Electroosmotic Pumps Fabricated from Porous Silicon Membranes," Journal of Microelectromechanical Systems, Vol. 15, No. 3, pp. 717-728   DOI   ScienceOn
10 Jiang, L., Mikkelsen, J. C., Koo, J.-M., Huber, D., Yao, S., Zhang, L., Zhou, P., Maveety, J.G., Prasher, R., Santiago, J. G., Kenny, T. W. and Goosen, K. E., 2002, "Closed-loop Electroosmotic Microchannel Cooling System for VLSI Circuits," IEEE Transactions on Components and Packaging Technologies, Vol. 25, No. 3, pp. 347-355   DOI   ScienceOn
11 Theeuwees, F., 1975, "Elementary Osmotic Pump," Journal of Pharmaceutical Sciences, Vol. 64, No. 12, pp. 1987-1991   DOI
12 Kirby, B. J., Shepodd, T. J. and Hasselbrink, E. F., 2002, "Voltage-Addressable on/off Microvalves for High-Pressure Microchip Separations," Journal of Chromatography A, 979, pp. 147-154   DOI   ScienceOn
13 Gan, W., Yang, L., He, Y., Zeng, R., M. Cervera, L. and Guardia de la, M., 2000, " Mechanism of Porous Core Electroosmotic Pump flow Injection System and its Application to Determeination of Chromium(VI) in Waste-Water," Talanta, Vol. 51, pp. 667-675   DOI   ScienceOn
14 Paul, P. H. and Rakestraw, D. J., 2000, "Electrokinetic High Pressure Hydraulic System," U.S. Patent 6 019 882
15 Brask, A., Kutter, J.P. and Bruus, H., 2005, "Longterm Stable Electroosmotic Pump with Ion Exchange Membrane," Lab on a Chip, 5, pp. 730-738   DOI   ScienceOn
16 Chen, C. and Santiago, J. G., 2002, "A Planar Electroosmotic Micropump," Journal of Microelectromechanic Systems, Vol. 11, No. 6, pp. 672-683   DOI   ScienceOn
17 Laser, D. Yao, J., S., Chen, C. H., Mikkelsen, J. C., Goodsen, K.E., Santiago, J. G. and Kenny, T. W., 2001, "A Low Voltage Silicon Micromachined Parallel-Plate Electrokinetic Pump ," in Proc. 11th Int. Conference. Solid-State Sensors and Actuators (Transducers'01), Munich,Germany
18 Yao, S., Hertzog, D. E., Zeng, S., Mikkelsen, J. C. and Santiago, J. G., 2003, "Porous Glass Electroosmotic Pump: Design and Experiments," Journal of Colloid Interface Science, Vol.268, pp. 143-153   DOI   ScienceOn
19 P. Prakhar, M. D. Grissom, A. L. Zydney, 2006, "Development of an Electroosmotic Pump for High Performance Actuation," Journal of Membrane Science, 386, pp. 153-160
20 Chen, Y. F., Li, M.-C., Hu, Y. H., Chang, W.-J. and Wang, C. -C., 2008, "Low-Voltage Electroosmotic Pumping Using Porous Anodic Alumina Membranes," Microfluid Nanofluid, 5, pp 234-244
21 H. Foll, M. Christophersen, J. Cartensen, and G. Hasse, 2002, "Formation and Application of Porous Silicon," Materials Science and Engineering, Vol. 39, Issue 4, pp. 93-141   DOI   ScienceOn
22 Canham, L.T., 1990, "Silicon Quantum Wire Array Fabrication by Electrochemical and Chemical Dissolution of Wafers," Applied Physics Letters, Vol. 57, pp. 1046-1048   DOI
23 Buie, C., Posner, J. D., Fabian, T., Cha, S.W., Kim, D., Prinz, F. B., Eaton, J. K. and Santiago, J.G., 2006, "Water Management in Proton Exchange Membrane Fuel Cells Using Integrated Electroosmotic Pumping," Journal of Power sources ,Vol. 161, No. 1, pp. 191-202   DOI   ScienceOn
24 Yao, S. and Santiago, J. G., 2003, "Porous Glass Electroosmotic Pumps: Theory," Journal of Colloid Interface Science, Vol. 268, pp. 133-142   DOI   ScienceOn
25 Harrison, D. J., Glavina, P. G. and Manz. A., 1993, "Toward Miniaturized Electrophoresis and Chemical Analysis Systems on Silicon: An Alternative to Chemical Sensors," Sensors and Actuators B Chemistry, Vol. B10, pp. 107-116
26 Kim, D., Posner, J. D. and Santiago, J. G., 2008, "High Flow Rate per Power Electroosmotic Pumping Using Low Ion Density Solvents," Sensors and Actuators A: Physical, Vol. 141, pp. 201-212   DOI   ScienceOn