• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.87-88
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• 2006

To investigate the possibility of ceria abrasive-added slurry for the oxide-chemical mechanical polishing (oxide-CMP) application, two kinds of retreated methods were introduced as follows: First, the characteristics of mixed abrasive slurry (MAS) using $CeO_2$ powder as an abrasive added within diluted silica slurry (DSS) were evaluated to achieve the improvement of removal rates and non-uniformity. Second, the control of pH level due to the dilution of slurry was examined. And then, we have discussed the CMP characteristics as a function of abrasive dispersion time.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.49-50
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• 2006

The studies on Cu CMP have focused on material removal and its mechanisms. Although many studies have been conducted on the mechanism of Cu CMP, a study on uniformity in Cu CMP is still unknown. Since the aim of CMP is global and local planarization, the approach to uniformity in Cu CMP is essential to elucidate the Cu CMP mechanism as well. The main purpose of the experiment reported here was to investigate the roles of slurry components in the formation of the uniformity in Cu CMP. All the results of in this study showed that the uniformity in Cu CMP could be controlled by the contents of slurry components.

• Proceedings of the Membrane Society of Korea Conference
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• 1998.10a
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• pp.156-158
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• 1998

원자력 발전소에서 사용하는 1차 냉각수에 대해 살펴보면, 일차냉각수의 pH는 5~8 범위이며, 수질기준은 염소이온과 불소이온이 0.15 ppm, 현탁고형물 이 0.2 ppm이나 실제 농도는 기준치보다 훨씬 낮은 매우 순수한 상태로 유지된다. 다만, 핵분열 반응도를 제어하기 위해 주입되는 붕소가 수백 ppm정도, pH를 조절하기 위해 부가되는 리튬의 1 ppm정도 포함되며, 그밖에 1ppm 정도의 실리카가 포함될 수 있다. 붕산으로 포화 운전되는 이온교환 수지탑 내에서는 붕산보다 이온선택도가 낮은 실리카는 이온교환수지에 흡착되지 않기 때문에 발전소의 가동년수의 증가에 ㄷ아라 원자로 냉각제의 실리카 농도는 점차 증가하게 되었다.

• Resources Recycling
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• v.5 no.2
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• pp.57-62
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• 1996

The regeneration of wastc piddlng acid from ironmaking industry produces Iron oxides as by products which are used for pigments and raw matcrial of ferrite. Thc impurilies level of iron axides for ferrile arc strictly regalated. Filtrat~on, adsorption medw technique, Fe leaching and ncutralizaiion wcre tried in order to remove silica impurities in the wasb pickling acid solution.

• Journal of Industrial and Engineering Chemistry
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• v.67
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• pp.407-416
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• 2018

This study presents a novel complete solution starting with a synthesis of silica modified with potassium-nickel hexacyanoferrate and ethanolamine (SiEA-KNiFe) sorbent through radiocesium sorption in different process configurations and moving on to the vitrification of the spent sorbent, using the sol-gel method. The experimental data for deionized water solution, as well as seawater solution, correlates strongly with the Langmuir isotherm model. Moreover, the study also presents a method for spent sorbent solidification in the glass matrix. The cesium leaching test confirmed that spent sorbent can be stably bound in the glass matrix after radionuclide removal.

• Korean Chemical Engineering Research
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• v.51 no.1
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• pp.80-86
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• 2013

In this study, the photocatalytic reactor system equipped with photocatalyst-carrying-silica-media cartridges [photocatalytic reactor system (1)] was used to perform the treatment of waste air containing malodor and volatile organic compound (VOC). The result of its performance was evaluated and compared with that of the photocatalytic reactor system equipped with commercial photocatalyst-carrying-nonwoven filter-media cartridges [photocatalytic reactor system (2)]. In case of photocatalytic reactor system (1), at the 1st stage of run the removal efficiencies of ethanol and toluene continued to be 80% and 20%, respectively. However, unlike toluene, the removal efficiency of ethanol dropped to 40% at the end of the 1st stage of run. The removal efficiency of hydrogen sulfide decreased from 100% to 90%. At the 2nd stage of its run the removal efficiency of ethanol decreased to 10% while the removal efficiencies of hydrogen sulfide and toluene remained as same as 90% and 20%, respectively, even though the inlet load of toluene increased by factor of four. In the 3rd stage of its run, as the result of application of aluminium-coated reflector film to the inner wall of photocatalytic reactor system, the removal efficiencies of ethanol and toluene increased by 5% to be 15% and 25%, respectively. In case of photocatalytic reactor system (2), at the 1st stage of its run, the removal efficiencies of ethanol, hydrogen sulfide and toluene continued to be 10%, 97% and 100%, respectively. However, at 2nd stage of its run their removal efficiencies became 5%, 95% and 2~3%, respectively, which showed that the removal efficiencies of ethanol and hydrogen sulfide decreased insignificantly while the removal efficiency of toluene dropped significantly from the perfect elimination. Moreover, the reflector film did not affect the performance of photocatalytic reactor system (2) at all. Therefore the removal of ethanol, hydrogen sulfide and toluene by photocatalytic reactor system (2) was mainly attributed to hydrophobic adsorption of its nonwoven filter media and its extent of photocatalytic removal turned out to be negligible, compared to that of photocatalytic reactor system (1).

• Journal of the Korean Ceramic Society
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• v.48 no.4
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• pp.312-315
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• 2011

The effect of slurry composition and wafer flatness on a material removal rate (MRR) and resulting surface roughness which are evaluation parameters to determine the CMP characteristics of the on-axis 6H-SiC substrate were systematically investigated. 2-inch SiC wafers were fabricated from the ingot grown by a conventional physical vapor transport (PVT) method were used for this study. The SiC substrate after the CMP process using slurry added oxidizers into slurry consisted of KOH-based colloidal silica and nano-size diamond particle exhibited the significant MRR value and a fine surface without any surface damages. SiC wafers with high bow value after the CMP process exhibited large variation in surface roughness value compared to wafer with low bow value. The CMPprocessed SiC wafer having a low bow value of 1im was observed to result in the Root-mean-square height (RMS) value of 2.747 A and the mean height (Ra) value of 2.147 A.

• KSBB Journal
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• v.15 no.2
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• pp.150-155
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• 2000

Antioxidative activity of c비ture of Streptomyces sp. BH-405 was investigated. After removal of pellets of Streptomyces sp. B BH-405, antioxidative substances were is미ated and suc$\infty$sively purified from culture of Streptomyces sp. BH-405 by by thin | layer chromatography $\pi$LC) or silica gel column chromatography. The fraction 3 obtained from ethylether fractionation of the C culture appeared highest level of anti oxidative activity as determined by thiocyanate method. Band 2 obtained by further P purification of this fraction showed higher anti oxidation level than that of same concentration of dl- $\alpha$ -tocopherol, butylated h hydroxy anisole (BHA). The band 2 showed higher rate of 1, 1.diphenyl 2-picrylhydrazyl (DPPH) decolorization than dl-$\alpha$-tocopherol. In the rat liver microsomes, band 2 rapidly inhibited lipid peroxidation which was initiated enzymatically by r reduced nicotinamide adenine dinucleotide phosphate (NADPH) or non-enzymatically by Fenton’s reagent. Band 2 inhibited on | lipid peroxidation of mitochondria or the linoleic acid hydro peroxide induced peroxidation system. It is concluded that band 2 obtained by fractionation of Streptomyces sp. BH-405 cultivation contained antioxidants with the capacity to inhibit oxidative m modification.

• Journal of the Korea institute for structural maintenance and inspection
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• v.22 no.5
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• pp.47-54
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• 2018

Concrete undergoes various deterioration on surface. Impregnant with silicate is usually applied to concrete surface and forms insoluble hydrates, which can provide many engineering advantages. In the work, concrete impregnated with colloidal silicate is used for durability enhancement in surface and self-clearing performance is evaluated with photocatalyst-$TiO_2$ spraying. For the work, various tests are performed both for strength evaluation and durability evaluation such as absorption ratio, drying shrinkage, chloride penetration, sulfate resistance, and freezing/ thawing action. Furthermore, removal and self-clearing performance are evaluated with Acetaldehyde decomposition and Methylene blue decolorization. Through silicate impregnation and photocatalyst spraying, the impregnated concrete can have not only durability enhance but also self-clearing performance.

• Nuclear Engineering and Technology
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• v.40 no.6
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• pp.497-504
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• 2008

In a study of the optimum operational condition for a melting decontamination, the effects of the basicity, slag type and slag composition on the distribution of depleted uranium were investigated for radioactively contaminated metallic wastes of iron-based metals such as stainless steel (SUS 304L) in a direct current graphite arc furnace. Most of the depleted uranium was easily moved into the slag from the radioactive metal waste. The partitioning ratio of the depleted uranium was influenced by the amount of added slag former and the slag basicity. The composition of the slag former used to capture contaminants such as depleted uranium during the melt decontamination process generally consists of silica ($SiO_2$), calcium oxide (CaO) and aluminum oxide ($Al_2O_3$). Furthermore, calcium fluoride ($CaF_2$), magnesium oxide (MgO), and ferric oxide ($Fe_2O_3$) were added to increase the slag fluidity and oxidative potential. The partitioning ratio of the depleted uranium was increased as the amount of slag former was increased. Up to 97% of the depleted uranium was captured between the ingot phase and the slag phase. The partitioning ratio of the uranium was considerably dependent on the basicity and composition of the slag. The optimum condition for the removal of the depleted uranium was a basicity level of about 1.5. The partitioning ratio of uranium was high, exceeding $5.5{\times}10^3$. The slag formers containing calcium fluoride ($CaF_2$) and a high amount of silica proved to be more effective for a melt decontamination of stainless steel wastes contaminated with depleted uranium.