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http://dx.doi.org/10.4191/KCERS.2011.48.4.312

The Effect of Slurry and Wafer Morphology on the SiC Wafer Surface Quality in CMP Process  

Park, Jong-Hwi (Electronic Ceramics Center (ECC), Department of Materials and Components Engineering, Dong-Eui University)
Yang, Woo-Sung (Electronic Ceramics Center (ECC), Department of Materials and Components Engineering, Dong-Eui University)
Jung, Jung-Young (Electronic Ceramics Center (ECC), Department of Materials and Components Engineering, Dong-Eui University)
Lee, Sang-Il (Electronic Ceramics Center (ECC), Department of Materials and Components Engineering, Dong-Eui University)
Park, Mi-Seon (Electronic Ceramics Center (ECC), Department of Materials and Components Engineering, Dong-Eui University)
Lee, Won-Jae (Electronic Ceramics Center (ECC), Department of Materials and Components Engineering, Dong-Eui University)
Kim, Jae-Yuk (R&D Center for Advanced Materials, SsangYong Materials Corp.)
Lee, Sang-Don (R&D Center for Advanced Materials, SsangYong Materials Corp.)
Kim, Ji-Hye (R&D Center for Advanced Materials, SsangYong Materials Corp.)
Publication Information
Journal of the Korean Ceramic Society / v.48, no.4, 2011 , pp. 312-315 More about this Journal
Abstract
The effect of slurry composition and wafer flatness on a material removal rate (MRR) and resulting surface roughness which are evaluation parameters to determine the CMP characteristics of the on-axis 6H-SiC substrate were systematically investigated. 2-inch SiC wafers were fabricated from the ingot grown by a conventional physical vapor transport (PVT) method were used for this study. The SiC substrate after the CMP process using slurry added oxidizers into slurry consisted of KOH-based colloidal silica and nano-size diamond particle exhibited the significant MRR value and a fine surface without any surface damages. SiC wafers with high bow value after the CMP process exhibited large variation in surface roughness value compared to wafer with low bow value. The CMPprocessed SiC wafer having a low bow value of 1im was observed to result in the Root-mean-square height (RMS) value of 2.747 A and the mean height (Ra) value of 2.147 A.
Keywords
CMP; 6H-SiC; PVT; KOH-based colloidal silica;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 0
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